5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

46
06/23/22 1 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu

Transcript of 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

Page 1: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 1

Chemical Hygiene PlanSafety Manual

Bob Hamiltonbob at eecs.berkeley.edu

Page 2: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 2

#1 Rule

No one may work alone in the NanoLab!

• Failure to follow rules can result in suspension of lab privileges.• Will be warned if logging in alone, or if logging out would leave someone

alone.• Can find who is in the lab through MercuryWeb.• During non-staff hours, confirm presence of another lab member.

Page 3: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 3

Safety Test and Quiz• Passing the SAFETY TEST qualifies a NanoLab member to work in the

NanoLab. Qualified on “NANOLAB” and virtual equipment “chp”• Passing an annual, online Safety Quiz is required to renew

membership. Lab members receive an automatic email reminder when your safety quiz is due.

• Revisions to Chemical Hygiene Plan are posted in Revision history and should be regularly reviewed:

Page 4: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 4

Telephone System InformationThe laboratory has an independent telephone system: You cannot dial campus numbers with only 5 digits. You can dial lab numbers with only 3 digits. Use “all call” to page staff or other members in the lab. During staff hours dial “0” to reach the NanoLab office

You must dial “9” to dial an outside number: Both “9 – 911 and 911 will reach an emergency operator.

For emergencies dial 9-1-1 from any lab phone.If you use your cellular phone, call campus police at 510-642-3333

Page 5: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 5

Marvell NanoLab Phone Numbers**** Dial 9 For Outside Line****

  EMERGENCY   NanoLab Phones - Your Location is Highlighted

FireSerious Injury

All Emergencies

Lab Equipment or FacilitiesPhysicalLocation

Description Ext. Number   

During Staff Hours 5th Floor

911From Any Lab Phone

  520 Reception desk 0    

  580-1 Gowning West 641  

Dial "0" (zero)From Any Lab Phone

580-2 Gowning East 640  

or UC Campus Police 581 Service Chase 642  

(510) 642-3333From Your Cell Phone

  582 Cleanroom 643  

If No Response,Use List Below

582A Cleanroom 658  

583 Service Chase 644  

584 Cleanroom 659  

Medical Emergency   585 Service Chase 660  

        586 Cleanroom 661  

Alta Bates Hospital After Staff Hours 593 Service Chase 647  

2450 Ashby Avenue Call in order below until you contact a listed person live.

595 Service Chase 646  

Berkeley, CA 94705 599 Level5 Gas/Chem Room 645  

Tel.: (510) 204-4444 Bob Hamilton   3rd Floor

  Cell: (510) 325 - 7557 380 Cleanroom 648  

Minor Injuries Home: (510) 644 - 3329 381 Service Chase 649  

UHS Tang Center   382 Cleanroom 650  

2222 Bancroft Way Bill Flounders   383 Service Chase 655  

Berkeley, CA 94720 Cell: (510) 301 - 1082 384 Cleanroom 651  

Tel.: (510) 642-3188 Home: (510) 845 - 4847 385 Service Chase 656  

M - F 8:00 AM - 6:00 PM   386 Cleanroom 652  

Sunday 9:00 AM - 5:00 PM Danny Pestal   391 Service Chase 653  

    Cell: (510) 394 - 4897 393 Service Chase 654  

Building/Facilities     395 Service Chase 670  

Sutardja Dai Hall Building Manager Ed Hester   399 Level3 Gas/Chem Room 657  

Domenico Caramagno Cell: (510) 502-6025

Cell: (510) 206 -9516 Lab Services

Home: (510) 428 - 9820 158 Level1 Telecom Room 664  

    180 Electrical Room 632  

Campus Services Al Briggs   280-1 Level2 Mech. Room South 666  

(510) 642-1032 Home: (510) 647 - 9218 280-2 Level2 Mech. Room North 667  

      481 Mezzanine Telecom Room 662  

Cory Labs Mike Linan   681 Mezzanine Telecom Room 663  

(510) 642-2796 Home: (707) 864 - 2605 780 Level7 Exhaust Fan Room 665    

Page 6: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 6

Emergency ResponseIn event of fire: Pull a red fire alarm pull station. Pull a blue Hazmat alarm pull station. Evacuate the building.

In event of medical emergency: Call 911 if life threatening. Visit Tang Center for minor injuries. If Tang Center closed, the Trauma Center at Alta Bates Hospital on

Ashby and Telegraph is at all hours.

In event of flooding or utility problem: Contact staff. Shutoff water supply if you can identify the source.

If there is a non-NanoLab building issue: Contact campus hotline at 510-642-1032. Follow up with call to building manager Domenico Carmagno at 510-502-6025.

If you call an EMERGENCY phone number on left, follow-up with a call to a number on right.

Page 7: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 7

Blue Hazmat pull stations are located at every emergency exit and at several locations throughout the lab. Lab members shoulduse these pulls when they believe the lab should be evacuated:

- hazmat activates blue lights and audible alarm.- hazmat seals all hazardous gases.- hazmat notifies a 24 hour alarm company. that then contacts laboratory staff.- hazmat does not call 911.- If blue light is flashing upon arrival,

you may NOT enter the lab.

At each lab entrance is a Firefighter Restricted“break glass” emergency ventilation pull station. This station turns off air recirculation and putsthe lab in a state of maximum exhaust.Lab members are Never allowed to activate this pull station!

Blue Hazmat Evacuation Pulls

Page 8: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 8

NanoLab Evacuation Procedure Secure your process. As you proceed to a blue emergency exit door ask other

lab members to follow. Exit the building. If after hours, bring a phone list from

the exit door. The assembly area for an Emergency Exit from the

NanoLab is NE of the Hearst Ave stairwell. The assembly area for SDH is to the West of the Qual

Comm Café Remain available to pass on details you have about

events that lead to an evacuation. Such information is useful.

Page 9: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

NanoLab Evacuation Routes

04/18/23 10

Page 10: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 11

NanoLab Assembly Area

Page 11: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 12

SDH Building & NanoLab Office Emergency Assembly Area

X12

Page 12: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 13

Clean Gowning Proper attire requires before entering

cleanroom:– Goggles, bouffant cap, nitrile gloves,

shoe covers, gown, boot covers.

Safety glasses must be worn at all times! Safety Glasses must comply

with OSHA standard: 1910.133 – Prescription Safety glasses available

through UC Optometry Department

– Contact lenses discouraged: They can trap abrasive chemicals next to eyes.

No sandals, open toe shoes, hi-heels or bare feet. Shorts allowed under full coverall suits.

Page 13: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

Cleanroom Face Mask Is Not A Safety Device!

Page 14: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 15

General Laboratory Practices Walk, do not run while in the lab.

Food or drinks are not allowed in the NanoLab. Cellular phone use is permitted in gowning area and main lab

aisle, along west-windows. Use of music players is allowed only in the gowning area only. Visitors are allowed on by pre-approval. Request permission request via:

visitor at silicon.eecs.berkeley.edu

Always remove your gloves as you exit the laboratory. It is recommended lab users wash their hands after leaving

the NanoLab or other Campus labs.

Page 15: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 16

The laboratory is equipped with ten safety Shower/eyewash systems.

Five of these are sited in fully-equipped Safety Stations located between bays.

Each safety station is equipped with:1. Safety shower2. Eyewash3. First Aid Kit4. Chemical Spill clean up kit5. HF burn paste and pH test strips

* Two Safety Stations are equipped with defibrillators

Eyewash, Showers, Safety Stations

Page 16: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 18

Chemicals Common chemicals are

supplied by the NanoLab.– For use in NanoLab ONLY.– Chemicals are stored in lab member

accessible labeled cabinets throughout the lab.

Chemicals are also stored in rolling carts under the sinks.

View available chemicals on Mercury.

Page 17: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 19

Special Chemicals A “Special Chemical” is a proper name for any chemical not supplied

by the NanoLab. Special Chemicals must be approved prior to bringing them into the

NanoLab. Approval Process:

– Obtain a Material Safety Data Sheet (MSDS).

– Email MSDS to Chemical Safety Officer Bill Flounders (bill at eecs.berkeley.edu) and request special chemical review.

– If approved, when you obtain your chemical, visit the NanoLab office to obtain a red “Approved Special Chemical” label.

– Even if previously approved, additional purchases of the same chemical must go through the approval process to maintain up to date chemical inventories.

– It is recommended that you complete the approval process prior to ordering chemical.

– Special Chemicals may require special hazardous waste disposal methods.

Page 18: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 20

Transporting Chemicals Lab members are NEVER allowed in the chemical storage areas within the

gas vaults, rooms 399 and 599 without staff escort or prior approval.

Make sure there are no open bottles of desired chemical already in the area.

Use safety carriers to move bottles within the NanoLab.

Store opened standard chemicals in designated areas near the sinks.

Notify staff if there is no stock of a chemical.

Chemical transport between levels is to be minimized:– No chemicals are allowed in the lab passenger elevator.– Always use bottle carriers in the stairs or the chemical “dumb waiter”.

20

Page 19: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 21

Chemical Transport

“Dumb Waiter”

Page 20: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 22

Working with Chemicals All wet chemical work must be

performed at a NanoLab sink.:

You must wear protective equipment (PPE) when working with any chemicals:– Chemically resistant gloves, face

shield & apron.

You must wear chemically-rated gloves, chemical resistant apron and a face shield when working with any chemicals.

– The only exception to this rule is the tri-polymer chemically resistant gloves are not required when handling small amber bottles of photoresist.

Page 21: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 23

Working with Chemicals Respirators are not required when working with standard or

approved Special Chemicals at NanoLab sinks. NanoLab sinks are annually certified as fume hoods. If your process requires you to handle chemicals outside of a

NanoLab sink, review your process with Chemical Safety Officer Bill Flounders.

Incidental use of isopropanol, methanol, or acetone squeeze bottles outside of NanoLab sinks is permitted.

Cal-OSHA requires all chemical containers to be labeled with their content!

23

Page 22: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 24

Working with Chemicals Always add acid to water.

– Exception being Piranha

Do not use glassware with HF acid. Ongoing processed must be labeled for chemical content, contact

information date and time of return.– Place setups toward the back of fume hood where there is maximum exhaust.

Clean unidentified spills by:– Checking pH with a test strip.– If strongly acidic or basic (pH <4 or >10) use a sink hose to flush into the sink.– If neutral, mop up with Techni-cloths.

All chemicals must be stored in proper containers with the contents identified!

Page 23: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 25

Dry Chemicals

Measure dry chemicals by pouring into weigh boat or weighing paper:

– Always use a clean spatula if scooping is necessary.– Never return chemicals to the source bottle.– All chemicals must be labeled and stored in proper containers, i.e.

no beakers with foil or unlabeled dry chemicals.

Page 24: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 26

Storing Chemicals

Page 25: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 27

Chemical Disposal

Does it contain metal ions?

yes

Is it non-halogenated water soluble

solvent or acid or base?

Is it water immiscible or

halogenated solvent?Take to msink 1, 16,18

Is Organic waste bottle more than

75% full?

Pour in funnel

yes

yesReplace full with empty bottle, capping full one

lightly

Take full to Chemical Disposal

Cabinet in 582A

Complete and attach HAZMAT sticker, fill

out Chemical Disposal Manifest

no

Aspirate in sink

Did you receive Special Chemical approval?

Stop, see Chemical Safety

Officer

nono

yes

no

Follow disposal guidelines provided during Special

Chemical review

yes

Treat as photoresist Collect separately

no

Page 26: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 28

Chemical Bottle Disposal Take empty bottles of drain disposable chemicals to

the automated bottle rinse station in 582a.– Rinse using the in foot-peddles of the bottle rinse station. – Wearing a face shield and gloves.– Cross out label with an ‘x’ and place in bins near the rinse station.

Empty bottles of non-drain disposable solvent bottles should be placed in rear of fume hood to allow bottle to dry out, then put in a trash can.

Bottles of silicon etch should be washed and placed in marked bin in 582A for refilling.

Page 27: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 29

Chemical Waste Bottles

Page 28: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 30

Photoresist & Spin Coatings

Residues from spin coating such as aluminum foil, cleanroom wipes, swabs, etc, that contain volatile solvents should be disposed of in the vented waste cans located at msink1 and msink3.

30

Page 29: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 31

Chemical Exposures

Remove the affected clothing. Rinse the exposed areas with water for 15 minutes using a

safety shower or eyewash. Notify staff after exposure using the posted Emergency

Contact Information. In an emergency, the deck hoses are usually your closest

source of water.

Page 30: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 32

Eye Exposure

If eyes are exposed:Flush eyes for at least15 minutes – NOT LESS!– Use an eye-wash.– Sinks have DI deck guns which can be used followed by an eye

wash.– Contact staff for assistance or cal 911.– Follow up eye exposures with visit to a medical professional.

All eye exposures require a follow up visit to Tang Center or a hospital emergency room.

Lab members should assist a colleague in the event of an eye exposure!

32

Page 31: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 33

HF Burns

HF acts as an anesthetic, you may not feel the burn until damage is already done.

If exposed:– Remove affected clothing, flush with cold water

for 15 minutes.– Massage calcium gluconate ointment from safety

stations onto exposed area.– Notify staff after exposure, using posted

Emergency contact information.

Page 32: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 34

TMAH

TMAH is used in photoresist developer @ ~ 3% It is hazardous by ingestion, inhalation, skin

exposure or eye contact Exposure to concentrations > 15% may cause

respiratory or heart failure – a ganglion inhibitor Flush expose area with water for 15 minutes. Notify staff after exposure, using posted

Emergency contact information.

Page 33: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 35

Chemical Spills During staff hours, contact a staff member. Contain spills using the Spill Containment Kit

available at Safety Stations. Contact staff for assistance using the posted

emergency contact information posted at every phone.

Final spill cleanup must be done by trained staff certified for spill cleanup.

Page 34: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 36

Toxic Metals General practices for handling metals:

– Consider all metal dust as potentially hazardous

– Minimize quantities

– Protect bench top with disposable covers.

– Confine material as you work

– Change gloves when leaving the area

– Solutions used for etching of toxic materials requires proper disposal

– Confine dust - use dampened lab wipes to collect metal dust

– Contact staff for proper disposal of cleaning materials contaminated with toxic metals

– Mechanical cleaning should be done with fume hood at 200 ft per minute face velocity and a HEPA vacuum

– Do not use N2 blowoff guns - use a HEPA vacuum

– New evaporation sources or sputter targets must be reviewed as Special Chemicals

Page 35: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 37

Work with Gallium Arsenides or other highly toxic metals must first be reviewed with Bill Flounders!

Follow the same procedures as outlined for: SPECIAL CHEMICALS

37

Page 36: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 38

Sharps & Dangerous Objects Dispose broken glassware in yellow trash pails labeled “broken

glass”. Dispose Si wafers in the blue Si wafer recycle bins. Dispose needles, razor blades, and other sharp objects in red

“SHARPS” bins. Mercury thermometers are banned from the lab. Contact lab staff in event of a mercury spill. Batteries and electronic waste disposal is via the NanoLab

office to assure proper disposal.

Page 37: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 39

Cylinder Gases

Lab members are not allowed to handle compressed gas cylinders.

Corrosive and Toxic Gases are kept in the dedicated gas vaults, room 399 and 599.

Gases are stored in ventilated steel gas cabinets. Toxic Gases are monitored by the Toxic Gas Monitoring system, which will shut them off at source if leak is detected or if HAZMAT alarm is pulled.

Lab members are NEVER allowed in the gas and chemical storage areas, rooms 399 and 599 without staff escort or prior approval.

Page 38: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 40

Lasers

• Lasers are allowed after review and approval of Bill Flounders (bill at eecs.berkeley.edu).

• More information on safe use of lasers at: www.ehs.berkeley.edu

Page 39: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

Ionizing Radiation Safety

MNL has 4 radiation producing machines and one radiation source.

Radiation Producing Machines

• LEO 1550 scanning electron microscope (RUA 2501)

• FEI 650 Nova Nano scanning electron microscope (RUA 2511)

• Crestec CABL-9510CC electron beam writer (RUA 2531)

• Siemans D5000 x-ray diffractometer (RUA 1501)

Radiation Source

• SemiTest SCA 2500 – Po210 (RUA 3631)

UC policy requires anyone working in the presence of such machines to read UC’s Radiation Safety Guidelines for Non-Users.

http://nanolab.berkeley.edu/public/factsheets/radsafenonuser.pdf

This link is provided in the MNL chemical hygiene plan. To pass the MNL safety test you must confirm that you have read and understand these guidelines.

Page 40: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 42

Cryogens Review EH&S Cryogen fact Sheet before working with

cryogens. Liquid Nitrogen is stored in vacuum jacketed cylinders

called dewars. Hazards are from freezing burns and asphyxiation due

to sudden oxygen depletion. Wear gloves and goggles when transferring to a

smaller container. Use care to avoid spills to minimize damage to the

floor in the lab.

Page 41: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 43

Flooding in the Lab Search for the source of the leak and turn off the

supply valve. Use the squeegees located in the freight elevator

vestibule area to direct most water to floor drain. Use the wet vacuum located in the freight elevator

vestibule area to vacuum up any remaining water from the floor.

Notify a staff member and report the incident on Mercury as a problem under facilities.

Page 42: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 44

Electrical Safety Report all electrical issues to staff. In event of electrocution, shutoff the power sources

at the east end of each chase. Use of power strips is regulated in the lab, see

Staff. Never use the ON/OFF, EMO or EPO buttons to

reboot tools. Such functions are for emergencies. The use of ON/OFF, EMO/EPO functions runs the risk of equipment damage.

44

Page 43: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 45

Lock out, Tag out

If an equipment is labeled red (fatal) in Mercury, do not attempt to use it or energize it in any way.

Watch for Engineer Photo ID tags on equipment and follow the instructions on these tags.

Page 44: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 46

Fire Prevention and Response Use care with heat lamps or when heating flammable

solvents:– Use only digitally controlled hot plates.– Always use a water bath to transfer heat.

In event of fire:– Fire extinguishers are clean room “approved”.– Fire extinguishers are located throughout the lab and near every door.– You are not expected to fight fires. Use a fire extinguisher only if you are

feel safe doing so.– You are expected to “Notify, Evaluate, Evacuate”.– If clothes are involved use a safety shower.

Page 45: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

NanoLab Evacuation Routes

04/18/23 47

Page 46: 5/16/20151 Chemical Hygiene Plan Safety Manual Bob Hamilton bob at eecs.berkeley.edu.

04/18/23 48

NanoLab Assembly Area