4th Production Equipment Conference Thin Film Schiller Reischl

1 04/03/09 © SCHILLER AUTOMATION

New integrated logistics and automation concept for mass production of thin film solar modules

Dr. Andreas ReischlProduct Manager Photovoltaics

SCHILLER AUTOMATION GmbH & Co. KGSonnenbühl

Automation a key technology focusing on the requirements of the process equipments

PTS Munich 5. March 2009

4th PV production equipment conference (tf)

Vorführender

Präsentationsnotizen

Startseite

INTRODUCTION INLINECONCEPT BATCH

Outline

■ Introduction• Our basic ideas for automation

■ Inline logistics concept for FAB automation• Inline logistics schematic• Logistics components• Comparison

■ Batch logistics concept• Batch Logistics schematic• Logistics components • Comparison

■ Summary & Outlook

04/03/09 © SCHILLER AUTOMATION2

Thin Film Solar FAB Automation

Vorführender


Outline


Company profile


■ Founded in 1978 by Sieghard Schiller

■ 100% family-owned

■ 280 employees & 52 M€ turnover

■ Certified quality management DIN ISO 9001

■ Management board

• Stefan Schiller• Karl-Heinz Bahnmüller• Martin Speidel• Hans-Peter Hennig• Herbert Höhn 39,7%

31,3%

17,8%

11,2%

Photovoltaics Cristalline

MicroelectronicsPhotovoltaics Thin Film

Services

Vorführender


Company Profile


© SCHILLER AUTOMATION4

SCHILLER Automation –know how incorporated in our Thin Film PV solutions

Semiconductor Flat Panel Display Microelectronics

TF Photovoltaics

Handling of Glass Substrates

Inline Concepts

TF Process AutomationData Tracking

Logistic Concepts

Cleanroom

Stocker Management

Introduction: our experience

04/03/09

upon these experience we have based our concept

Vorführender


Synergie of know how from different markets incorporated in our TF PF solutions


Introduction: our concept

■ Focus on requirements of process equipments, can be• Batch or inline processing• Times: cycle time, maintenance time, MTBF, …• Buffering: before and / or after process, I/O• Environment: temperature, clean room, …• Orientation: front in/out, sunny side up, short side leading

■ Focus on production plans• Fast projecting, fast ramp-up to mass production• Flexibility of production: # products, engineering lots, …• Scalability: increase in production volume

■ Focus on cost of ownership• Maximal utilization of costly process equipments


Automation the key technology in mass production

Automation a process between processes serving their requirements

Vorführender


Our concept: focus on requirements and further plans. Focusing on costs the aim is maximal utilization which can give you an extra every day during production.


Concepts


Thin Film Solar FAB automation

→ Inline concept

→Batch concept

Process A Process B

Euklid: Any two points can be joined by a straight line.

04/03/09

Vorführender


Our concept: inline production.


Concept: inline overview BE

■ Handling of substrates via • logistics automation and• Interface automation components• Data handling with common data base


Data Tracking / Line Controller

Logistic Automation

Interface Automation

Process Equipment

contacting Edge isolation

Foil lay-up

marriagelaminationEdge trimming

QC sorterJunction box setting

04/03/09

Vorführender


Profil


Contact-ing

Edge Isolation

FoilLay-up

MarriageLamination

Lamination

EdgeTrim-ming

TapingJunction

Box QC Sorter

Centering

Barcode

Buffer

I/O port

Concept: inline BE

04/03/098

possible layout details of automation

© SCHILLER AUTOMATION

logistics


Concept: inline logistics


• Conveyor unit

• Corner turn unit

• Corner transfer unit

automation components

Logistic Automation


Process Equipment


Concept: inline logistics


■ Buffer 100 substrates

■ Overhead logistics: possible to pass underneath

■ Optional cooling

■ Optional sensors

■ ….

Logistics automation: bufferLogistic Automation


Process Equipment


Concept: inline

Advantages■ Simple logistics

-> resulting in high uptime

-> and cost advantages

■ Work in process minimized

-> short substrate processing time (dwell time within production)

■ ….

Disadvantages■ No flexibility due to fixed

interconnections

■ Maintenance access difficult -> long ways

■ Difficult to add additional process tools -> expansion nearly impossible without interruption of production

■ Buffer sizes and locations fixed

■ Downtime of machines will immediately have impact on FAB throughput

■ …



Concepts


Thin Film Solar FAB automation

→ Inline concept

→ Batch concept

04/03/09



Concept: batch overview FEIn

com

ing

Gla

ss

Cle

anin

g

Fron

t Con

tact

D

epos

ition

Abs

orbe

r D

epos

ition

Patte

rnin

g #2

Bac

k C

onta

ct

Dep

ositi

on

Patte

rnin

g #3

Patte

rnin

g #1

QC

Met

rolo

gy A

rea

Clu

ster

s Pr

oces

ses

Equi

pmen

tIn

terf

ace

Aut

omat

ion

Pro Load TF

GEU+Pro Load TF

6-Axes Robot

Pro Load TF

6-Axes Robot

6-Axes Robot

Man. Interface

GEU+Pro Load TF

GEU+Pro Load TF

Logi

stic

A

utom

atio

n

Logistic System Single Substrates / Batch Transfer Concept

Data Tracking / Line Controller

Dat

aB

ase

■ Equipments are connected by • Common logistics automation and interface automation components

04/03/09

Vorführender


Profil


DepositionPIN

CLEAN

Metrology

FC

NEWProcess

QCDepositionPIN

CCH

CCH Central Cassette HandlerProLoadGEU6-axis robotcassette

LASER

LASER

I/O portbuffer

LASER

BC

BC

BC

BC

Concept: batch schematic

LASER

LASER

FC

FC

FC

14 04/03/09 © SCHILLER AUTOMATION

NEWProcess

CCH

Additional Processes

BE



Logistics automation

→between clusters of process equipment

Concepts: logistics

04/03/09


Concept: cluster / batch

■ Transport of cassettes with 20 substrates■ Maximal length of 240 meter■ Serve left/right side on two levels (buffer)■ Line Controller together with the cluster

control ensures that the individual equipments are optimally utilized


Cluster-Line production concept based on batch cassette logistic

Logistic Automation


Process Equipment

Flexible

4 March 2009

Vorführender


Profil



Interface automation

→between process equipment and logistics

Concept: interface automation

04/03/09




Situation automation suppliers facing

■ Technology is defining substrate size

■ Technology is defining process equipment

■ Process equipment is defining requirements for interface automation: • Single substrate / batch-type processing

• horizontal / vertical glass transfer

• Inline same loading / un- position

• Chemical processes / high temp processes

• High throughput machines

■ Depending on requirements different solutions for interface automation will be necessary

6-axis robots used for specific loading applications for process equipment

04/03/09

Vorführender


Profil




Linear handling system for standard Process Equipment

Logistic Automation


Process Equipment

Application Samples

■ Loading of several Process Machines

■ Buffer Concepts

■ Logistic interface

ProcessLogistic Interface

• ProLoad handles one (or more) substrates

• Serves up to 4 processes from 6 cassettes over max. 12.5 meters distance

• GEU can exchange substrates in < 8 seconds

04/03/09

Vorführender


Profil



Glass exchange unit (GEU)■ Substrate exchange■ Substrate centering■ Substrate rotation■ Option:

• Quality control• ID tracking

■ …


Logistic Automation


Process Equipment


Concept: batch

Advantages■ Expansion of production by

additional or modified process tools possible

■ Easy service access to process tools

■ Flexibility of substrate routing

■ Buffer sizes and buffer locations flexible

■ Short downtimes have minimal impact on yield

■ Handling of Dummy Substrates possible

Disadvantages

■ More complex => higher costs compared to inline concept

■ WIP high => dwell time of substrates within production high

■ High sophisticated logistic system

■ …



Summary and outlook

Summary■ Shown the Schiller FAB automation concept■ Best concept consist of

• Maximal utilization of process equipment• Most reliable during projecting phase, ramp-up and production• Flexibility in production and engineering• Scalability and maintainability

■ Best solution considering all costs


Outlook■ ProLoad Multi interface logistics handles several substrates■ Big FAB concepts scalability and synergy effects■ Fully automated back-ends with minimal # operators■ New logistics and automation concepts also for crystalline PV■ ...

Vorführender


Summary & outlook



Thank you for your attention

Andreas Reischl

SCHILLER AUTOMATION GmbH & Co. KGPfullinger Strasse 5872820 Sonnenbuehl-GenkingenGermany

Tel +49 / 7128 / 386-5755Fax +49 / 7128 / 386-299

[email protected]

Vorführender


Danke (Schlussseite)



Our profile

Company

■ In almost 30 years, SCHILLER evolved into one of the most competent automation companies in the microelectronics business.

■ Our strength: Holistic consideration of all sorts of conceptual formulations

■ All from one source: Development Engineering Manufacturing Assembly Installation and start-up After sales support

■ SCHILLER is a 100% family-owned company.

Vorführender


Profil



Our company structure

Company

Company Management

Quality Management

Customer Center Engineering Production Internal Services

· Sales / Marketing · Mech./Electr. Engineering · Materials Administration · Controlling / PPS

· Project Management · Software Engineering / Document. · Manufacturing · Admin

· Customer Support · Research & Development · Assembly · Information Technology

Vorführender


Organisation



Numbers & Facts

■ Foundation: 1978

■ Management: Stefan Schiller Managing Director Karl-Heinz Bahnmüller Customer Center Martin Speidel Engineering Hans-Peter Hennig Production/Internal Services Herbert Höhn Key Account Manager

■ Certification : DIN ISO 9001:2000

Company: facts & numbers



Our products

Company

SCHILLER is a leading supplier of production systems for manufacturing and handling of:

■ Microelectronics components, including power modules and controls & sensors for automotive applications

■ Photovoltaic products, including solar cell manufacturing and fab automation for thin-film solar cell manufacturing

Moreover SCHILLER has know-how and experience in following fields:

■ Semiconductor products in all clean room classes■ Flat panel displays■ Data storage products■ Smart card modules

Vorführender


Märkte



Our references

Company

Vorführender


Referenzen



Our strengths –the people at SCHILLER

Company

■ ... with more than 2,500 man-years experience.

■ ... with analytical abilities/competency.

■ ... in interdisciplinary project teams.

■ ... with responsibility for costs, operations and target dates.

■ ... with passion for the common task.

■ ... create success!

Vorführender


Stärken



Our core competences

Core Competences

Vorführender


Kernkompetenzen



Your benefit

■ Individual solutions

■ Proven modules

■ Automation solutions from one source

■ Lowest TCO

■ After Sales Service

■ Short start-up periode

■ Innovation

Core Competences

Vorführender


Nutzen TCO = total cost of ownership



Our solutions –success story of our customers

■ Microelectronics, Automotive, Power Module

■ Photovoltaics

And■ Semiconductor■ Flat Panel Display■ Data Storage■ Smart Cards

Solutions

Vorführender


Lösungen



Photovoltaics

■ Customer specific automation systems for crystalline solar cell production

Interlinking of process equipment Loading/Unloading of process

equipment Customer specific QC lines Fully automatic stocker systems

Vorführender


Folie 1 Photovoltaik



Photovoltaics

■ Customer specific automation systems for thin film solar cell production

Loading/Unloading of process equipment

Modular Schiller 5 axes handling system for glass substrates

Cassette station Cassettes for substrates Stocker systems for cassettes and

single substrates

Vorführender


Folie 2 Photovoltaik (letzte Seite Photovoltaik)

4th Production Equipment Conference Thin Film Schiller Reischl

Documents

Transcript of 4th Production Equipment Conference Thin Film Schiller Reischl