Dear Customer

All reasonable offers are being considered.

Any tools you want, please contact us now.

Please contact us if you have any question.

Contact us : renonix@irenonix.com

NO. P/N Descripiton

1 0040-09136 CHAMBER 200MM BW

2 0020-09999 PLATE, FRONT, THROTTLE DRIVE

3 0020-30335 QUARTZ TUBE HOUSING

4 0020-10135 MANIFOLD-WETER SUPPLY

5 0020-30102 OUTPUT MANIFOLD

6 0190-13175 Centura 5200 EPI - Light Pen

7 0190-75073 LOAD LOCK LEAD SCREW

8 0150-22550 CABLE ASSY, STATUS LAMP TO CNTLR-

9 0030-70046 MACHINING,BRKT CLAMP SOURCE

10 0020-20488 CLAMP BAKEOUT LAMP

11 0100-18051 Ultima HDP Plus

12 0021-09758 MAINFOLD, OUTPUT,DXZ

13 0050-75433 ROUGHING LINE,TURBO ADAPTER CVD TIN,TXZ

14 0040-54484 EXHAUST TEE, TURBO, 200MM TXZ

15 0040-63457 WATER BOX, TXZ 200MM C I P

16 0190-13558 FEEDTHRU, VECTRA IMP

17 0010-20317 Degas Lamp Assy

18 0240-23355 KIT, HTHU HEAT SHIELD, W/C, 6", 8"

19 0010-20754 PEDESTAL LIFT ASSY PC II

20 0100-01792 5Phase Drive Interface BD

Head office : 272, Naehyangan-gil, Jeongnam-myeon,

Hwaseong-city, Gyeonggi-do, Korea

Tel : +82-31-354-9494 Fax : +82-31-354-9323

www.irenonix.com

2nd NEW

Parts List

21 0050-26886 WELDMENT N2 PURGE INPUT XFER

22 0050-30403 WELDMENT N2 PURGE COOLDWN CHM

23 0090-70019 SW MAGNETIC CONTACT ASSY

24 0140-05204 HARNESS ASSY, W/ ORIENTER CH E LIFT INTE

25 0010-25249 TOP COVER-3 & EXHAUST GASKET

26 0010-70871 L/L Chamber

27 0020-10763 ISOLATOR, TEFLON 200 MM, MODIFIED

28 0020-13519 BOTTOM PLATE, DUMMY CASSETTE CENTURA

29 0020-13520 TOP COVER, DUMMY CASSETTE CENTURA

30 0020-13521 WAFER REST, LEFT, DUMMY CASSETTE CENTURA

31 0020-13522 WAFER REST, RIGHT, DUMMY CASSETTE CENTURA

32 0020-13523 SIDE WALL, LEFT, DUMMY CASSETTE CENTURA

33 0020-13524 SIDE WALL, RIGHT, DUMMY CASSETTE CENTURA

34 0020-13529 INDEXER HOUSING, LEFT W/DUMMY CASETTE CENTURA

35 0020-13530 INDEXER HOUSING, RIGHT W/DUMMY CASSETTE CENTURA

36 0020-20162 PLATE, BACKINGSOURCE 11.30" ENDURA

37 0020-22909 PEDESTAL SHIELD, 6" PRECLEAN ENDURA

38 0020-25443 CLAMP RING 8" SNNF COH TIN .2MM WAF ENDURA

39 0020-27207 CLAMP RING 6" SMF PADDED HTHU HTR ENDURA

40 0020-27773 PUMPING PLATE, 200MM W/SKIRT, LPCVD XGEN

41 0020-29459 CLAMP RING, 6" SMRMF, SST, EE 3.429 ENDURA

42 0020-30066 Block Mounting

43 0020-34720 SCREW, NOSE LINER, TEFLON, SIN, DXZ P5000

44 0020-38328 COVER,HOLE 125/150MM LIFT PIN RTP PRODUCTS

45 0020-39504 COVER, SPDT SWITCH, DXZ P5000

46 0020-42284 PLATE,BLOCKER 6" EC WXZ 5000 TUNGSTEN

47 0020-42446 RING, PUMPING PLATE, 24HOLES, 200MM SING

48 0020-52785 PLATE, BLOCKER, 144 SIDE HOLES, 200

49 0020-61886 WINDOW FRAME

50 0020-64185 Pumping Plate

51 0020-78642 FLANGE, UPPER EXHAUST

52 0020-79943 CLEAR PVD WINDOW

53 0021-02321 HINGE, OUTER, LID, DXZ, DCVD P5000 CVD

54 0021-03057 SHAFT, HINGE, LID, DXZ, DCVD

55 0021-03654 BLOCK GAS SPRING CH 200MM PRODUCER

56 0021-04277 INSERT,SLIT VALVE RTP PRODUCTS

57 0021-04304 BUSHING DELRIN GAS BOX 200MM PRODUCER

58 0021-04404 BLANKOFF,SINGLE FREQ, BOTTOM MODULE, NITRIDE550

59 0021-04795 MANIFOLD, GAS SINERGY

60 0021-06185 PLUNGER, INTERLOCK, SINERGY

61 0021-06315 LATCH, LID, DXZ

62 0021-06373 BODY, LOWER HINGE

63 0021-06374 BODY, UPPER HINGE

64 0021-06376 SHAFT GRND, HINGE SINERGY CHMBR

65 0021-06430 MANIFOLD, PLASMA TRANSPORT, CHMBR LID, S

66 0021-06952 PERF PLATE, 200MM SINERGY

67 0021-09077 ADAPTER,MCVD/DCS CHAMBER P5000 TUNGSTEN

68 0021-09625 CHAMBER,LOWER,DPS

69 0021-09721 BRACKET,HEATER LIFT DXZ

70 0021-16857 GAS MIXER, 200MM OXZGEN, LPCVD

71 0021-16858 MIXER MANIFOLD, 200MM OXZGEN, LPCVD

72 0021-17725 DISK, SNNF, SHUTTER, TA/BESC, AL-APRAYED

73 0021-18081 PLATE BOTTOM

74 0021-18082 PLATE TOP

75 0021-18083 PLATE CENTER

76 0021-18436 COVER RING, 200MM, BESC, TITANIUM 5000 TUNGSTEN

77 0021-20044 DISK 6"B101 SHUTTER SST ENDURA

78 0021-20198 SHIM 0.50MM G-TYPE ENCAPSULATED MAGNET C

79 0021-20207 SPACER 3.5MM MAGNET ROTARY FEEDTHRU SHIM

80 0021-21002 MANIFOLD WATER NESLAB B101@CH1,2,3,4

81 0021-24158 PLATE, SHIM

82 0021-27072 FACEPLATE, ADVANCED PATTERNING

83 0021-28010 SST SEAL CLAMP

84 0021-35788 PLT BLOCKER, 200MM P5000 TUNGSTEN

85 0021-37705 SIDE RECEIVER, LEFT 150MM, 316-EP

86 0021-37706 SIDE RECEIVER, RIGHT 150MM, 316-EP

87 0021-38133 BALL STUD, 5/16-18 X .86LG DXZ GAS SPRIN

88 0021-38833 PLATFORM ELECTRO POLISH

89 0021-38834 CASSETTE SUPPORT EP

90 0021-39748 BLOCKER, PERF, SILANE, NITRIDE550

91 0021-46147 P-5000 DXL RPS PLUNGER INTERLOCK SW

92 0021-70210 DEPOSITION RING,8 SNNF, 9MM, E-CHUCK, TI

93 0021-70375 COVER 6 PEDESTAL LOWER, B101 SST IMP

94 0021-70396 COVER DISC W/DUMMY

95 0021-77204 GROPPER MOUNTING

96 0021-78165 COVER FRONT

97 0021-79977 COVER

98 0040-00904 BRACKET,AC LINE FILTER,BOTTOM MODULE,NIT

99 0040-00941 CONNECTOR RF IN

100 0040-00942 CONNECTOR RF OUT

101 0040-00943 CONNECTOR RF RETURN

102 0040-01183 MNFLD,OUTPUT,MIXING BLOCK,DXZ,FLUORINE GENERATOR

103 0040-02325 HINGE, INNER, LID, DXZ, DCVD

104 0040-03149 HANDLE, L SHAPE, LID ASSY

105 0040-03771 LID,PUMPING PLATE,GAS SPRING,SILANE DXZ

106 0040-18158 RING, SYM GAS DIST, ULTIMA HDP-CVD

107 0040-22811 FINGER EXTENDED LIFT HOOP 6 B101

108 0040-38666 RF COVER, RIGHT, PRODUCER 200MM

109 0040-39551 LID, PUMPING PLATE, TEOS, DXZ, DCVD

110 0040-44901 GAS BOX

111 0040-47677 FACEPLATE, SIN, XG, DXZ DCVD

112 0040-53927 GAS BOX CHAMBER LID 200MM PRODUCER

113 0040-54106 LID, REMOTE PLASMA, SINERGY

114 0040-60523 RF COVER, LEFT, PRDUCER 200MM

115 0040-77501 SST DISC CARRIER DDF HD

116 0040-77604 6 INCH CASSETTE TRAY PLATE

117 0040-80376 BASE GIMBAL

118 0040-89837 GIMBAL BASE (UNIVERSAL) PAD CONDITIONER

119 0041-00087 CHAMBER BODY 200MM XZ

120 0041-11268 CONTACTOR GROUNDING FOR SOURCE

121 0041-12671 P-5000 DXL RPS 2 HOLE PLASMA INPUT MANIFOLD

122 0041-12673 P-5000 DXL RPS 2 HOLE LID PLATE

123 0045-00126 PUMPING CHANNEL, ANODIZED, PRODUCER 200MM

124 0270-00649 SHAFT, PLUG, SHIPPING, SINERGY

125 0270-01021 CLAMP, SHIP, CHAMVER LID, 200MM SINGEN

126 0270-01133 SHIPPING PLUG, 200MMM SIGEN

127 3790-01259 STDF M/F 1/4 HEX X 1-3/4LG SST 8-32 THD PASSIVATE

128 3790-01400 STDFM/F 1/4 HEX X 1.50 LG SST 6-32 THD PSVT

129 3790-01114 STDFM/F 3/8HEX 8-32 X 1/2L SST NO-FINISH

130 0021-07128 CLAMP,TUBE SUPPORT,OTB FCW,CENTURA MMF

131 0021-39097 GASLINE HOLD SUPPORT 3HOLE

132 0040-42386 COVER, FLOOR REAR FAC, MIDDLE, CMF

133 0020-09064 WINDOW FLANGE

134 0021-14255 COVER, LEADSCREW, LIFT

135 0021-36198 BLOCK EXHAUST PORT DCSXZ

136 0040-01348 HUB, DUAL ZONE HEATER

137 0040-01356 PLATE, CHAMBER MOUNTING

138 0040-34219 LEFT BLOCK CLMP/GAS SPRNG DXZ FLUORINE GENERATOR

139 0040-40598 CARRIER, LOWER LIFTER

140 0190-09459 Optical cable (RE_C)

141 3700-01351 SEAL CTR RING ASSY NW100 W/VITON ORING SST

142 0020-07281 PLATE, WBLL TOP PLATFORM, A200-B3MJ-PK

143 3480-01128 Bracket, Minibeam Sensor

144 3690-03888 SCREW

145 3780-02272 SPRING

146 3690-00436 SCREW

147 3690-01081 SCR CAP SKT HD 1/4-20X 3L HEX SKT SST

148 0060-13135 LABEL FLOWMETER ADAPTER GEN RACK

149 0200-05959 SINGLE RING QUARTZ

150 0040-76820 GRANITE SURFACE PLATE

151 0021-19342(S) SHIELD

152 0200-10324 DOME, CERAMIC, DPS CHAMBER, R1 ROUGH KC

153 0040-47488 Ultima RF Side Coil

154 0040-09095 GAS BOX MOUNT(8-6")

155 0020-10402 PUMPING PLATE

156 0020-10117 TEOS SHOWER HEAD 200mm

157 0040-09091 GAS BOX 456PL

158 0020-30108 CLAMP SHIELD NITRIDE

159 0020-30086 PLATE PERFORATED 150MM NITRIDE GIANT GAP

160 0020-10721 COVER,SCREW,TEFLON THIN PERF PLATE

161 0020-10403 PUMP PLATE 4,5&6 SILANE/OX

162 0020-10134 MANIFOLD OUTPUT PL

163 0020-09885 ISOLATOR THICK PLATE

164 0020-09602 INPUT MAINFOLD

165 0020-09307 BUSHING TERMINAL

166 0020-30580 BLOCKER PERF COM SIL4-6

167 0020-10936 BLOCKER PLATE,SILANE 200MM

168 0020-30797 wPLATE PERF 200MM GIANT GAP NITRIDE

169 0020-09135 SUPPORT HINGE LMP MODULE

170 0020-09270 COVER, FRONT

171 0020-09604 HOUSING

172 0020-09609 BUSHING TERMINAL

173 0020-10185 SUPPORT HOOP 200mm

174 0020-10186 COVER TOP 200MM

175 0020-10759 COVER, FRONT

176 0021-10296 OUTPUT MNFLD,UNIV CH.,W/ALIGN. HOLES

177 0040-09096 VACPORT/SLIT WDW/HINGE SUPPORT-THNGSTEN

178 0040-09221 CHAMBER 200MM SACVD

179 0040-32073 GAS BOX, UNIVERSAL LID,W/ALIGNMENT HOLES

180 0020-10189 PLATE CONNECTOR 200M

181 0020-10059 RING,WAFER LIFT RP

182 0020-10943 ISOLATOR TEFLON 200mm

183 0020-42187 INPUT MAINFOLD

184 0020-42258 OUTPUT MAINFOLD- OUTER

185 0020-42262 OUTPUT MAINFOLD- INNER

186 0040-31980 GAS BOX EC WXZ

187 0040-09699 CHAMBER(WXZ)

188 0020-30407 SHOWERHEAD

189 0020-10190 PLATE CONNECTOR SACVD / WB

190 0021-07573 BRACKET, INTERFACE, LLB SIDE, SMIF

191 0021-07574 BRACKET, INTERFACE, LLA SIDE SMIF

192 0021-06742 SHIELD,TERM. BLOCK 5 POS. 9/16 CTR CENTU

193 00190-13351 BRACKET, LLB SIDE

194 0021-02249 SUPER-E(FLNAGE-A)

195 0040-38995 SUPER-E(FLNAGE-B)

196 0021-02250 SENSOR STOP

197 0021-02248 FLAG LIFT ARM

198 0021-02246 SUPER-E(SIDE COVER)

199 0040-38996 SUPER-E(BODY)

200 0040-39988 COVER UPPER

201 0020-34695 LINER, CATHODE, FULL FLOW

202 0020-38055 SUPPORT PEDESTAL

203 0040-22803 BRACKET, LEFT MATCH BOX SUPPORT

204 0020-28935 MOUNTING BRACKET, LEFT

205 0040-22489 BASE

206 0040-23215 COVER, RF WATER BOX, IMP-CU, BLT PED

207 0040-22813 CASE

208 0040-22802 HUB SPACER B101 HEATER

209 0040-08896 CASE

210 0020-34048 SUPPORT, BELLOWS

211 0050-20037 MANIFOLD PEDESTAL CD WAFER 150MM

212 0020-21114 BLADE 6" BUFFER ROBOT

213 0020-21112 CLAMP 6" BLADE BUFFER ROBOT

214 0020-21113 CAP 6" TRANSFER BLADE FROG LEG

215 0020-20356 CAP 8 BLADE, FROG LEG

216 0020-21025 CLAMP 8 BLADE TRANSFER FROG LEG

217 0020-20431 COUMATOR 6"

218 0020-21033 BLADE 6" TRANSFER FROG LEG

219 0020-21486 PLATE CONTACT DC SOURCE 11.3 LEFT

220 0020-29127 BRACKET FLOW SWITCH PVD IMP

221 0020-75872 HOOP, 6 HTHU HEATER

222 0040-13384 SLEEVED CAP, EXTENDED REACH

223 0020-75889 CLAMP, BLADE, EXTENDED WRIST

224 0020-20354 CAP 6" BLADE FROG LEG

225 0020-21024 CLAMP 6" BLADE TRANSFER FROG LEG

226 0020-27869 PEDESTAL, 6 SMF @ C & D MOD FLAT

227 0040-70187 HOUSING VGA TTW

228 0020-20972 BLOCK, FIXTURE, GAS SPRING 13"

229 0020-21219 BASE CD/PT WAFER 150 MM

230 0020-20023 OUT CASE

231 0020-20295 wFRAME SOURCE 11.30"

232 0020-20558 BLANK SLIT VALVE

233 0020-21069 SLIP-HINGE, MALE, REAR STEP

234 0020-21073 BLANK FLANGE TRANSFER W/RGA PORT

235 0020-21089 COVER, CHAMBER INTERCONNECT BD.

236 0020-22805 PLATE ADAPTER CLAMP WIDE BODY CHAMBER

237 0020-24085 PLATE ADAPTER CLAMP WIDE BODY CHAMBER

238 0020-70495 BLANK FLANGE TRANSFER CH 5 W/RGA PORT

239 0040-76073 ARM, WELDMENT, SOURCE, W/B

240 0020-25193 LOL COVER RING

241 0020-23042 ADAPTOR SOURCE 13"

242 0020-20919 COVER PVD POST

243 0020-22263 ADAPTER PVD WATER LINES ON BOARD CRYO

244 0020-23836 PLATE ADAPTER CLAMP G-12

245 0020-24748 PIN DOWEL 375 DIA 2.88LG SST

246 0020-70822 LID BRACKET

247 0020-20815 CASSETE STAGE

248 0020-20510 HEATER BOX

249 0020-20913 BOX HEATER AC POWER

250 0020-20914 COVER HTR AC POWER BOX

251 0020-70237 BUFFER BLADE

252 0020-20124 CLAMP 6" BLADE BUFFER ROBOT

253 0020-13336 CLEAN CHAMVER BASE

254 0020-20164 FRAME COVER INSULATOR

255 0020-22838 LIFT HOOP, PRELEAN

256 0020-10758 HOUSING, TC AMP

257 0020-20074 PANEL

258 0020-28364 6" ALOL SHUTTER BLADE

259 0020-21222 HOOP CD/PT 150 MM

260 0020-75199 FRAME, CHAMBER TRAY

261 0040-75141 PCD BRACKET

262 0020-76632 COVER A

263 0040-05835 MANIFOLDER OUTPUT-R

264 0040-05836 MANIFOLDER OUTPUT-L

265 0020-70823 ORIENT COVER

266 0021-70240 DXZ LIFT ASSEMBLY

267 0020-23490 MODULE BOX ASS'Y

268 0020-34831 PLATE, MOUNTING,RF/HV,W/INTERLOCK

269 0020-57450 PCW VALVE PANEL

270 0040-39754 FLANGE(T-ELBOW ASS'Y)

271 0040-22203 AL BLOCK

272 0040-20703 WIDE CHAMBER WALL

273 0020-21377 CHAMBER LID(ADAPTOR)

274 0020-70336 ROBOT ARM

275 0020-20390 ROBOT ARM HINGE-R

276 0020-20390 ROBOT ARM HINGE-L

277 0020-25769 VHP ROBOT ARM(REAR ARM(R))

278 0020-25770 VHP ROBOT ARM(REAR ARM(L))

279 0040-75906 VHP ROBOT ARM(FRONT ARM(R))

280 0040-75907 VHP ROBOT ARM(FRONT ARM(L))

281 0020-20159 PLATE

282 0021-35744 PLATE,BLOCKER,TXZ 200MM

283 0040-76072 ARM, WELDMENT SOURCE CHAMBER

284 0020-34031 CATHODE ASS'Y(HOUSING)

285 0020-24967 BLADE

286 0010-21803 UPPER DC HOUSING W/BUSS BAR

287 0020-20784 TC HOLDER

288 0020-20896 REFLECTOR HEATER, 5/6" DEGAS

289 0020-20895 BASE HEATER, 5/6" DEGAS

290 0020-20897 SOCKET RETAINER 5/6" GEGAS

291 0020-20911 BUSS BAR, LOWER 5/6"

292 0020-21686 DISC, 5/6" DEGAS

293 0020-20898 COVER, ELECTRICAL 5/6" DEGAS

294 0020-21261 GUIDE SHAFT ORIENT

295 0020-21488 PLATE CONTACT DC SOURCE RIGHT

296 0020-21688 CLAMP WINDOW CCD SEE

297 0020-21704 CHUCK ORIENTER 5"

298 0020-21706 CHUCK ORIENTER 6"

299 0020-22079 FINGER SUPPORT, HOOP CD/PT 150

300 0020-22362 HOOP, LIFTER T/C 6"

301 0020-22414 8 CHUCK, TC

302 0020-22547 SOURCE ADAPTOR(G-12 WIDE)

303 0020-22844 PRECLEAN PEDESTAL SHIELD 6"

304 0020-22982 ADAPTER TIN 8 WAFER CHAMBER 16CHAMBER LID(ADAPTOR)(G-12)

305 0020-23208 LIFT FINGER, 101% COVERAGE,WIDE BODY

306 0020-23209 lift hoop,8"wide body,101% coverage

307 0020-23286 COVER, INSULATOR SOURCE(G-12)

308 0020-23346 RETAINER RING

309 0020-23411 WATER BOX COVER

310 0020-23442 COVER PLUMBING MOTORIZED LFT

311 0020-23441 BRACKET PLUMBING MOTORIZED LFT

312 0020-23591 TUBE, 5/6/8 VIEW SUPPORT

313 0020-23593 HOLDER ORIENTER 6"

314 0020-23621 FRAME, SOURCE G12

315 0020-24291 MOUNTING PLATE PC 2 RF MATCH

316 0020-25304 CAP, HTHU 6 HEATER

317 0020-26899 HEAT SHIELD HTHU HEATER LEFT

318 0020-27103 LIFTER HOOP(8")

319 0020-27124 PEDESTAL PC IT 6" JMF/SMF

320 0020-28258 LIFT HOOP 6" ADV 101 WB

321 0020-75128 6" CASSETTE

322 0030-75872 HOOP

323 0020-76708 FLANGE ASS'Y

324 0021-20495 HEAT SHIELD, RIGHT HALF, HTHU

325 0021-20572 PEDESTAL,6" ADV.101 FULL CVRG

326 0040-20276 UPPER SHIELD

327 0040-20727 TUBE FLANGED HTR RF LOWER ESC/HT HTR/P

328 0040-22651 CLAMP V-BLOCK MAGNET HOLDER

329 0040-24190 COVER FULL BOTTOM CHAMBER E, F

330 0020-22296 COVER ORIENTATION PCB

331 0021-07978 REFLECTOR, 8 HIGH UNIFORMITY 34 DEG BE

332 0040-05037 BASE, HEATER

333 0020-20663 BRACKET TERMINAL

334 0020-20656 BUSS BAR LOWER 8"

335 0020-20655 BUSS BAR UPPER 8"

336 0021-08320 SOCKET RETAINER BRACKET

337 0021-08319 RETAINER, 8 HIGH UNIFORMITY KEYED SOCKE

338 0020-21218 BASE CD WAFER 200 MM

339 0040-43748 LEFT ROBOT ARM, HP+ EXT REACH ROBOT

340 0040-43749 RIGHT ROBOT ARM, HP+ EXT REACH ROBOT

341 0040-01144 BRK,AC BOX SUPPORT SIDE,MCE CHMB

342 0020-20115 SCREW,ISOLATOR DC BIAS

343 0020-22868 BUSHING, INNER SHUTTER MGN COUPLING

344 0020-27136 SUPPORT, ACTUATOR SHUTTER LINKAGE

345 0020-24782 SHUTTER ASS'Y(BRAKCET)

346 0020-28293 BLANKOFF SHUTTER ENCLOSURE

347 0020-24775 SHUTTER ASS'Y(SENSOR BRAKCET)

348 0040-21164 COOLING PLATE ACTUATOR SHUTTER LINKAGE

349 0040-75976 VHP ROBOT ARM-R(FRONT ARM-R)

350 0020-75907 HUB, LAMP FEEDTHROUGH

351 0020-23286 COVER INSULATOR TIN 8

352 0020-05389 PIN, REACTIVE PRECLEAN PLUS LIFT

353 0020-20781 SCREEN MONOLITH BUF/XFER CHAMBER CRYOPUM

354 0020-22263 ADAPTER PVD WATER LINES ON BOARD CRYO

355 0020-22387 8HOOP WITH TC

356 0020-22570 LIFT HOOP 6, SHUTTER CHAMBER

357 0020-22844 PRECLEAN PEDESTAL SHIELD 8"

358 0020-22980 PLATE CONTACT DC, LEFT TIN 8 WAFER

359 0020-22970 SHIELD, HI CONDUCT.UPPER 8"

360 0020-23046 ADAPTER 13" SOURCE WIDE BODY CHAMBER

361 0020-23259 HOOP LIFT 8" HIGH TEMP

362 0020-23355 PC II PEDESTAL

363 0020-23487 BRACKET MOUNTING 2-PHASE DRIVER

364 0040-23557 COVER

365 0020-26444 LIFT HOOP, WAFER, 6 HTESC

366 0020-26691 PIN, HTHU 6" HEATER

367 0020-29614 BLADE SHUTTER, 8 E-CHUCK

368 0020-37551 BRKT,ASP,MFC,REMOTE ELECTRONICS

369 0020-37947 PALLET, GAS BOX, 5200 CENTURA

370 0020-39842 LIFTER,WXZ ORIENTOR, 200MM P5000/CENTURA

371 0040-75889 BLADE HOLDER COVER

372 0040-13265 GEAR(RIGHT)

373 0020-75890 CLAMP, PIVOT, EXTENDED REACH WRIST

374 0021-04348 BLADE,PADDED 8" BUFFER FROG LEG ROBOT

375 0040-01415 COVER

376 0020-34030 BASE,PEDESTAL,ESC,SIMPLE CATHODE

377 0020-34035 SUPPORT, LIFT CYLINDER, SIMPLE CATHODE

378 0020-34044 BLOCK, RF INSULATOR, BOTTOM

379 0040-31846 COVER, ACCESS, HELIUM AND WATER LINES

380 0040-31845 COVER, CYLINDER SUPPORT

381 0020-34074 CATHODE ASS'Y(LOWER COVER)

382 0020-34034 CYLINDER,LIFTER,ETCH CHAMBER

383 0020-34048 SUPPORT, BELLOWS

384 0020-30347 CYLINDERICAL SPACER

385 0020-09029 COOLING PIPE

386 0040-09005 BASE STD CATHODE NOT REPAIRABLE

387 0200-10246 UNI-INSERT,GDP,LINER,88 HOLD, QTZ

388 0020-31627 FLANGE BASE ESC

389 0200-01766 RPS SUPPORT

390 0040-02538 SHAFT, ALUM, CONSOLIDATED HTR, 200MM SA-

391 0021-06977 HINGE, PLATE 1/2 RABBIT, 200MM PRODUCER

392 0020-92881 RPS2 MANIFOLD, CHAMBER LID, SACVD 200MM

393 0021-06099 COVER MIXING INSERT LID PRODUCER 200MM

394 0021-06499 MANIFOLD, TEFLON FEED THRU, LID, CH PRDC

395 0021-06500 PLATE, MANIFOLD, LID, CHAMBER PRODUCER 2

396 0021-06569 INSERT RING 200MM PRODUCER

397 0021-18097 LINER, SEAL, SECTIONED, 200MM HT USG

398 0021-25875 PLATE, BLOCKER, SACVD 200MM PRODUCER

399 0021-26841 SHORT MIXING BLOCK INSERT, CHAMBER LID M

400 0040-00796 GAS BOX CHAMBER LID 200MM PRODUCER

401 0040-01618 MANIFOLD, INPUT, 200MM PRODUCER

402 0040-47028 MANIFOLD, OUT, RH, 200MM, PRODUCER, SACV

403 0040-47029 MANIFOLD, OUT, LH, 200MM, PRODUCER, SACV

404 0040-54104 SUPPORT CENTER RPS2 LID 200MM PRODUCER

405 0040-70319 FACEPLATE, WATER COOLED, 200MM SACVD PRO

406 0040-97965 MANIFOLD, RPS2, 200MM SACVD PRODUCER

407 0021-03637 FACEPLATE, SILANE PRODUCER 200MM

408 0040-54082 PLATE MOUNT, ASTRON EX, LOW K, PRODUCER

409 0020-30111 PLATE,BLOCKER 200MM BW

410 0020-10771 PERF PLATE 150MM OX(TEOS)

411 0021-30797 SHOWERHEAD 8" (PASSIVATION)

412 0020-42286 PLATE,PERF 6" EC WXZ

413 0021-01572 FACEPLATE, GIGA-FILL SACVD, BPSG CENT 23

414 0020-16215 PLATE BLOCKER 200MM,BW FOR WSIX LID

415 0020-30406 PERF.PLATE 150MM BW

416 0020-32036 PLATE, BLOCKER .100 SX, UNIVERSAL CHAMBE

417 0040-37667 LID PLATE, TXZ CIP

418 0040-02132 LID PLATE BKM1 ENHANCED TXZ 200MM

419 0020-61943 BOCKER PLATE

420 0020-42083 PLATE, PUMPING, 6" FC, WXZ

421 0040-02520 GAS BOX, SILANE, 200MM PRODUCER

422 0020-33677 TUBE, LIFT, DXZ

423 0021-09914 PLATE,BLOCKER,DXZ SACVD,CENTURA

424 0040-61877 LID, PUMPING PLATE, TEOS, GIGAFIL, SACVD

425 0021-02797 SHIM,CLAMP SPRINGS,CXZ LID

426 0020-20340 DOOR TRANSFER SLIT VALVE

427 0021-20718 PEDESTAL COVER LOWER 8" B101 REV 2.1 SST

428 0020-29343 SHIELD CLAMP, DARKSPACE .727 TALL VECTR

429 0010-36522 ASSY,EDGE RING,TXZ,200MM,SNNF

430 0020-27804 PEDESTAL, A101 HI-PWR POIS COH-TITIN

431 0020-28715 PIN, RESTRAINT, HTESC

432 0020-23811 8" COHERENT W/1.25:1 0.5" HEX

433 0020-38753 LIFT PIN,CONDUCTIVE,SIMP. CATHODE

434 0020-76301 ADAPTER, SLIT VALVE

435 0020-70643 OBS, DOOR, SLIT VALVE, ADOIZED, CENTURA

436 0020-34326 GAS INLET, COVER SSGD

437 0020-30190 wADAPTER,TOP,METAL ETCH CHMBR

438 0020-09030 BASE FLANGE

439 0050-31101 COVER, GAS INLET, SSGD, MxP

440 0021-10223 LINER,CHAMBER,CLAMP LID

441 3690-03341 SCR CAP PNL SKT HD 1/4 X 1.50L HEX SST

442 0020-33881 TUBE,STD CATHODE,R2

443 0020-33883 CYLINDER,HOT INNER,R2 STD CATHODE

444 0020-31613 CYLINDER,LIFT,ALUM,150MM

445 0020-04194 TOP LID

446 0020-33998 PLATE,COVER ACCESS PANEL- P/C END POINT(SUPER E)

447 0020-32046 BASE EXTENSION, ESC, FOCUS RING

448 0020-01416 Clamp Ring, 8" SNNF, SST, E/E 3.302mm, 1

449 0020-22492 CLAMP, SHIELD COLLIMATOR LOWER 8"

450 0020-22493 CLAMP, SHD COLLIMATOR UPPER 8"

451 0020-23041 CLAMP, SHD 8" WAFER

452 0020-24101 8 PC II SNNF PROCESS TI PED

453 0020-24914 COVER RING SST 8 101 COVERAGE

454 0020-26112 CLAMP RING 8 HOT SNNF ALUMINUM

455 0020-26967 PC II GAS TRENCH COVER

456 0020-26973 8 TI SHUTTER DISK

457 0020-27690 CLAMP RING 8 SNNF SHUT COMP 10405ARN SS

458 0020-28754 PEDESTAL COVER 8 101 VECTRA-IMP

459 0020-28867 DISK 8 ADVANCED 101 SHUTTER

460 0020-28906 HUB DC BIAS MODIFIED SHUTTER COMPATIBLE

461 0020-28937 COVER, 8 PEDESTAL ADVANCED 101

462 0020-29320 SHIELD, DARK SPACE, VECTRA IMP

463 0020-42082 PLATE, PUMPING, 8 FC, WXZ

464 0020-34694 LINER,GDP,R2 OXIDE

465 0021-02983 SHIELD, INNER, TXZ, STD

466 0021-35752 OBS SHIELD,INNER,TXZ

467 0021-35869 ERF PLATE,TxZ 200MM

468 0021-35946 EDGE RING, TxZ 200mm

469 0021-02395 INSERT RING, ALUMINUM, DXZ SACVD

470 0021-09104 LINER, CATHODE, ALIGNED, OXIDE ETCH

471 0200-35579 INSERT,CHB TxZ

472 0020-23400 CLAMP RING 8TIN SNNF MOTOROLA

473 0021-36625 COVER,SIDE,LOWER CHAMBER,DPS

474 0040-33998 LINER, SLIT LINER DOOR

475 0040-02609 LINER, CATHODE, MAGNET, SUPER-E

476 0040-09893 CHAMBER BODY,R2,EDGES GAS FEED

477 0020-34297 TOP COVER, SSGD, R2 CHAMBER

478 0040-38994 SHROUD TOP

479 0040-39619 LID, CLAMP, SLIT VALVE DOOR - 200MM CENT

480 0020-75041 DOOR LOAD LOCK

481 0020-19002 DOOR, SLIT VALVE SHO

482 0020-38663 SPACER,SLIT VALVE,MXP CENTURA

483 0020-23981 LoadLock Housing(A)/SIDE RECIVER

484 0020-31774 CYLINDER, HOT INNER

485 0010-01412 ACTURATOR ASSY-SLIT LINER DOOR

486 0040-22274 ADAPTER, REV 4.3/4.2 VECTRA IMP

487 0020-26823 SHIELD 6 HTHU DEPO LOW KNEE

488 0040-20133 COOL DOWN FLANGE

489 0020-33808 ADAPTER, GAS FEED ASSY, A3 DPS(METAL)

490 0020-75988 LIFTER, 200MM WAFER ORIENTER, OPTIMA

491 0040-31953 ADAPTER,GV,LOWER CHAMBER,DPS MEC

492 0020-33804 ADAPTER, GAS FEED, DPS MEC(METAL)

493 0020-33805 COVER, GAS FEED, DPS MEC(METAL)

494 0020-33806 CHAMBER, UPPER, DPS A3(POLY)

495 0021-00540 PLATE, UPPER CBR BLANK,DPS-200MM(POLY)

496 0021-01421 CHAMBER, UPPER,A-COAT,M-DPS(METAL)

497 0020-63668 DOOR, SV BLOCKER, SINGLE ROD, DPSII

498 0040-41703 DOOR, SLIT VALVE, DPS 2

499 0021-38119 FACEPLATE, DXZ DCVD CENTER HOLE

500 0021-19495 HOOP, 200MM, ASP

501 0040-35487 REDUCER LINE, SS316L, METCH R2 SEIKO 301

502 0040-34866 LINER, CATHODE, MAG RING, WAFFEL-LESS, D(E-Max)

503 0040-03260 DOOR, SLIT VALVE DOOR, EMAX 200MM

504 0040-03264 LINER, CATHODE, MAGNET RING, DIRECT-COOL

505 0040-03265 LINER, DGDP, CHAMBER(E-Max)

506 0040-50414 DOOR, SLIT VALVE, WAFFLE-LESS, 200 EMAX

507 0021-09007 COVER, UNI-LID, SSGD, MXP

508 0021-09835 LINER POLY, MXP PLUS, 1/4 THICK

509 0040-77343 SUS FLEXTUER

510 0020-09881 ADAPTOR MANIFOLD

511 0020-10123 PLATE PERF NI 200MM

512 0020-30983 PLATE, TOP, CHMBR, PRSP

513 0021-09761 GAS BOX, SIN, DXZ

514 0020-30681 MANIFOLD, INPUT SACVD(IMO)

515 0020-34736 MANIFOLD INPUT(DXZ TEOS)

516 0021-09760 GAS BOX(DXZ TEOS)

517 0021-09601 CHAMBER, UPPER, DPS(METAL)

518 0040-34865 LINER, DGDP, CHAMBER, WAFFLE-LESS, 200MM Emax

519 0040-90491 LINER CHAMBER , 1.25 GAP, 200MM EMAX VH

520 0020-04993 BLOCK GAS FEED ULTIMA HDP-CVD

521 0020-23152 PIVOT ARM RIGHT W/HELICOILS

522 0020-31493 GAS DISTRIBUTION PLATE, 133 HOLES

523 0020-32259 TAS DIST PLATE, 119 HOLES, .156 THICK

524 0040-09723 UNIBODY, ETCH CHAMBER WITH .397 STEP

525 0020-31035 MANIFOLD INPUT BWCVD

526 0020-34840 MANIFOLD OUT, BSE MCVD

527 0040-09323 GAS BOX UNIVERSAL LID

528 0020-30198 TUBE, EXTERNAL, TAPERED, EXT CATHODE

529 0020-32117 HOUSING,INNER THROTTLE VALVE

530 0020-10119 PLATE PERF 100-150M

531 0020-19003 INSERT, SLIT VALVE SHO(BUFFER)

532 0021-06092 DOOR SLIT LINER

533 0020-09610 PLATE RETAINER

534 0020-23106 CLEAR COVER, PVD CH

535 0020-26961 PLATE PUMPING 200MM SHADOW RING BWCVD

536 0020-30602 PLATE PUMPING 200MM SHADOW RING BWCVD

537 0020-64327 HOUSING, GRIP ACTION SUSCEPTOR SUPPORT S

538 0021-01598 FACEPLATE, NICKEL TI-XZ

539 0021-04793 SPOOL, EXHAUST, CHAMBER TICL4 TIN

540 0021-06043 ADAPTER, DXZ, TOP MOUNT, FLUORINE GENERA

541 0021-06044 INSERT, MIXING BLOCK, FLUORINE GENERATOR

542 0021-09718 LINER,SLIT VALVE

543 0021-09787 LID, PUMPING PLATE, SIN, DXZ

544 0021-37053 BRACKET, RECESSED ENDPOINT WINDOW

545 0040-00221 PUMP TO BY PASS 200MM(NIT)

546 0040-00906 BASE,HEATER,NITRIDE550

547 0040-01075 BASE CONNECTOR, HEATER

548 0040-01783 ADAPTER GAS LINE DXZ

549 0040-01834 MANIFOLD, INPUT, DXZ, FLUORINE GENERATOR

550 0040-02954 MOUNTING RING,DOME,.40 COIL HT,HR DTCU,

551 0040-04650 RING, SYM. GAS DIST. 24 PORTS, ULTIMA

552 0040-09094 CHAMBER STD 200MM

553 0040-35132 BASE PLATE EPi CHAMBER

554 0040-47723 MANIFOLD, OUTPUT, 1 HOLE, RIGHT, 200MM P

555 0040-47724 MANIFOLD, OUTPUT, 1 HOLE, LEFT, 200MM PR

556 0040-61266 GAS BOX, SIN, DXZ DCVD

557 0040-62900 CENTER GAS FEED BLOCK TOP CLEAN ULTIMA 1

558 0040-89620 BUFFER ROBOT BLADE

559 0020-33333 FILTER, UV, CHAMBER

560 0020-09969 COVER PLATE RF

561 0020-13262 BLOCK, MANIFOLD, RF GEN. WATER, SAE/MS F

562 0020-40190 UV Filter for Ultima HDP

563 0040-53913 MNFLD,OUTPUT,MIXING BLOCK,DXZ,FLUORINE G

564 0020-21067 STEP, REAR

565 0020-20595 STRIP, HOLD DOWN, 10 CHANNEL GASBOX

566 0020-20596 GASKET, 10 CHANNEL GASBOX

567 0040-75117 ENCLOSURE, VALVE, REAR, RIGHT

568 0020-20597 10 channel gasbox cover

569 0020-21217 COVER, 10 CHANNEL GASBOX

570 0020-21068 BRACKET, REAR STEP, RIGHT

571 0020-21091 COVER, CHAMBER A/B INTERCONNECT BD.

572 0010-01419 LONG LEVELING FOOT ENDURA

573 0021-09218 circuit breaker box cover

574 0040-75200 PANEL BLKHD. PROCESS CHAM.

575 0040-23559 BRACKET, RF MATCH MOUNT

576 0040-22976 BRACKET,2 STAGE LL VENT,MAINFRAME SUPPORT

577 0020-21214 SPACER, REAR STEP

578 0020-40137 LOCK SHIPPING DOOR, LLC

579 0040-52152 BLADE, SHUTTER, 8 TA/BESC; W/PIN

580 0040-76086 BRKT, GEN RACK, STABILIZER NON-OFFSET

581 0040-85134 SHIPPING FIXTURE, BESC MOTORIZED LIFT

582 0020-20018 TOP COVER, REAR

583 0020-22635 CABLE HOLD DOWN

584 0020-13138 COVER, GAS BOX, INTERCONNECT

585 0020-23687 BRACKET, GUIDE SOURCE, SIMP 200MM

586 0040-23558 CLAMP, RF MATCH MOUNT

587 0020-21070 SLIP-HINGE, FEMALE, REAR STEP

588 0021-23198 HOOP, LIFT, OPEN, 8 MCA E-CHUCK

589 0020-70460 PLATE AIR EXHAUST, TECH SINGAPORE

590 0040-76087 BRKT, GEN RACK, STABILIZER W/OFFSET

591 0020-27437 COVER TURBO PANEL SINGLE NT20

592 0020-20818 COVER PANEL PNEUMATIC DISTR BD

593 0020-34431 BRACKET, ENDPOINT, DPS MEC(Metal)

594 0020-18330 HARD STOP,UPPER,ROBOT EXTENSION

595 0020-18333 ROBOT FLAG,ROBOT EXTENSION

596 0020-18329 HARD STOP,LOWER,ROBOT EXTENSION

597 0020-18462 PLATE,LOWER MOTOR,ROBOT EXTENSION

598 0040-00022 WELDMENT RF WATER BOX CU SZ ESC CHILLER

599 0040-08952 WATER, WATERBOX COOLING LINES

600 0020-44559 COVER, WAFER ORIENTER CONTROLLER PCBA

601 0020-21325 BUSS BAR, SHORT AC REMOTE

602 0020-21326 BUSS BAR, LONG AC REMOTE

603 0020-13145 COVER, FRONT, LEFT/RIGHT INDEXER, NBLL

604 0040-22592 COVER SHIPPING PC MOD. FOR GAS TRENCH

605 0040-81262 COVER LEFT SIDE RIGHT INDEXER LEFT INDEXER

606 0020-75379 SHIELD, BUS MAIN AC

607 0040-37907 RETROFIT BRACKET, MOUNTING ASSEMBLY, TTW MONITOR

608 0040-45473 COVER LEFT SIDE RIGHT INDEXER

609 0040-45475 COVER RIGHT SIDE RIGHT INDEXER

610 0040-45477 COVER RIGHT SIDE LEFT INDEXER

611 0040-08953 BLANKOFF, SZBESC WATERBOX FLOW SWITCH

612 0040-21338 SUB PANEL 3RD MON W/2ND SW

613 0020-21194 BRACKET, SHIPPINGCLDWN, WATER LIFT

614 0020-20460 BASE, ADAPTER HANDLE, CASSETTE LOADLOCK CHAMBER

615 0020-20839 INSULATOR, COVER HARNESS TRANSFER & BUF. CHAMBER

616 0040-49556 COVER PRE-CLEAN/COOL DOWN MONOLITH

617 0020-02394 DUMMY TARGET, 200MM SIP TTN SOURCE

618 0020-09680 BRACKET HANDLE

619 0020-20929 INSULATOR MAG SWITCH

620 0020-20838 BRACKET,HARNESS CONNECTOR, HP TRNFR & BU

621 0020-20930 BRACKET MAG SWITCH

622 0020-18295 COVER, SCREW, 3/8-16 UNC, ALUM

623 0020-98018 ASP+ Applicator Flange

624 0020-75144 ACTUATOR SAFETY VALVE

625 0020-75145 MOUNT, SAFETY VALVE

626 0020-21266 FLAT COVER, CHAMBER INTERCONNECT BD.

627 0020-18366 SCREW,SLOTTED PAN HD, 8-32 X 5/16L, MONE

628 0020-18367 SCREW,SLOTTED PAN HD, 8-32 X 0.15L, MONE

629 0020-07293 Bracket B/D HX Valves TPCC

630 0040-84641 Cover Floor Right Rear FAC, W/DPN, CMF

631 0190-05335 Outrigger Support Assy, TPCC AC Box

632 0040-50293 Cover Floor Pneumatic Section DPN. CMF

633 0040-50290 Cover Floor Rear FAC, Middle DPN, CMF

634 0020-76216 OBS: SHIELD CONTACTOR MAIN AC

635 0040-51377 PANEL, DUAL TURBO CONTROLLER, LEYBOLD NT

636 0020-33815 PLATE, BLANKOFF, DPS MEC

637 0020-21582 STRAP UPPER AC BOX

638 0040-49047 STRAP CENTER AC BOX

639 0021-22230 CLAMP,BOTTOM CABLE HOLDER SOURCE GROUNDS

640 0040-49046 STRAP SIDE AC BOX

641 0040-49048 ASSEMBLY PLATE ADAPTER

642 0020-20791 AC COVER CHAMBER 1-4,A&B

643 0021-22229 CLAMP,TOP CABLE HOLDER SOURCE GROUNDS

644 0020-02922 SPACER LOWER GUARD LONG MOTORIXED LIFT

645 0020-02921 SPACER LOWER GUARD SHORT MOTORIXED LIFT

646 0020-11162 SPACER LOWER SLIT VALVE SIDE MOTORIXED LIFT

647 0040-42380 ADAPTER PLATE

648 0040-42379 CONNECTING PLATE

649 0021-22484 SHIELD MAIN AC CB1 600A

650 0020-29033 PLATE, ADAPTER, CB1, 600A MAIN AC

651 0020-08099 BRACKET,BV4 PALLET 5200 CENTURA

652 0040-84643 COVER FLOOR RIGHT REAR FAC TPCC

653 0040-04110 COVER FLOOR CH.B Sin.CMF

654 0020-75199 FRAME CHAMBER TRAY ASSEMBLY

655 0020-37562 CLAMP,BOTTOM WF6/SIH4

656 0020-37563 CLAMP,TOP WF6/SIH4

657 0020-76953 BRACKET CLAMP 1/2-1 1/2WALL

658 0020-21007 BLOCK WALL CLAMP

659 0020-76473 BRKT, GEN RACK, FLOOR MOUNT

660 0270-04796 jig(emax)

661 0040-34244 SLD ASS

662 0270-01726 lift(emax turbo)

663 0227-61662 200mm cassette

664 0020-23213 lift pin

665 0040-21529 MOUNTING BRACKET

666 0020-40706 REAR INDEXER COVER

667 0020-05228 TUBE SUPPORT CLAMP

668 0020-13611 BRACKET HOLD MFLD ADAPT

669 0040-06368 Floor Panel

670 0021-10902 KICK PLATE

671 0021-23214 LIFT PIN, ADJUST, FAST LIFT, 200MM, EMAX

672 0020-27674 COVER

673 0040-01089 OTB BRACKET

674 0020-05227 BRACKET,TUBE SUPPORT,OTB FCW,CENTURA MMF

675 0020-70348 WINDOW, UPPER CLEAR

676 0040-32595 rear mounting bracket

677 0020-70347 WINDOW, LOWER CLEAR

678 0021-35569 PANEL, FLOOR, BLANK, POS C/D

679 0021-35570 PANEL, FLOOR, BLANK, POS E/F

680 0010-76136 ASSY, WAFER LIFT HTHU HEATER

681 0040-20811 ADPATER ELBOW WITH CRYO BAFFLE ROUGHING

682 0040-20697 ARM SOURCE WELDMENT HIGH TEMP CHMBR

683 0020-10002 FLAGE THROTTLE DRIVE

684 0021-35054 CLAMP,QUARTZ WINDOW,ATM CHMBR LAMP HOUSING

685 0021-04266 CLAMP, LAMP HOUSING, ATMOSPHERIC CHAMBER

686 0040-62234 WELDMENT SIDE TUBE FI OUTRIGGER

687 0020-37471 BRKT, LEFT HINGE,ATM CHMBR LAMP HOUSING

688 0020-37472 BRKT,RIGHT HINGE,ATM CHMBR LAMP HOUSING

689 0020-37473 RING,SUPPORT,WINDOW,QUARTZ,ATM CHAMBER

690 0020-75990 BLANKOFF, MAINFRAME FLOW SWITCH

691 0021-03667 SPACER, HARD STOP, HEATER LIFT, TXZ MOD

692 0040-22457 WELDMENT, OUTRIGGER, CVD GASBOX

693 0020-76580 DUMMY TARGET FOR 6"/8" WAFER

694 0021-08190 BRACKET, SUPPORT XDCR

695 0020-20627 BLOCK MOUNTING MFC

696 0020-28744 COVER PLATE

697 0020-20060 PANEL TURBO CONTROLLER

698 0020-24412 CATHODE SWITCH COVER PRECLEAN 2

699 0040-22819 COVER, AC BOX B101 WATER BOX

700 0020-27123 PEDESTAL, PCII 8" SNNF

701 0020-76384 INTLK TRIP BRACKET, PCII RESN

702 0020-23959 PANEL AC OUTLET 20A GEN RACK

703 0020-20699 CLAMP AR FLEX 8" GATE VALVE

704 0020-20700 CLAMP END AR FLEX 8 GATE VALVE

705 0021-76346 COVER, LEAD SCREW HT ESC

706 0020-29957 DEFLECTOR, WATER, GENRACK

707 0021-22268 BLOCK MOUNTING SHUT-OFF VALVE MODIFIED

708 0021-24811 INSERT LINER, EXHAUST, TXZ 200MM

709 0021-20450 TEE NUT PINCH GUARD HTESC RF

710 0020-27864 PANEL PNEUMATIC CONTROL 6 STATION

711 0021-04258 PLATE, RETAINER ALUMINUM

712 0021-20744 BRACKET DC BLANKOFF RIGHT RF MATCH REV

713 0021-21874 SHIELD, RF HEATER TOP, 1.574" SHAFT

714 0021-20777 Gas panel cover, MFC Access Left

715 0021-20787 GAS PANEL COVER, MFC ACCESS, RIGHT

716 0021-20449 GUARD,PINCH POINT,HT ESC STD/WC CHAMBER

717 0050-75354 FEEDTHRU ADJ AR, MIX

718 0020-21673 LOAD LOCK MECHANISM SHIELD

719 0020-23951 BLADE 8" SHUTTER

720 0020-20752 FINGER HOOP 200MM CD

721 0020-29409 CONDUCTOR,FLEX DC BIAS

722 0021-04256 BLACKOFF, MAINFRAME FLOW SWITCH

723 0021-04257 CUP OUTER FEEDTHRU SUPPORT SST RECESSED

724 0020-70633 BRKT, MTG, STATUS LMP

725 0040-84493 MOUNT, LEAD SCREW GUARD

726 0020-29582 GUARD, LEAD SCREW

727 0040-23472 BLANKOFF HTESC PWR SUPPLY SHASSIS

728 0040-76528 WELDMENT, 8" HOOP, PVD STD CHAMBER

729 0020-07128 CLAMP, 3/8 IN GASLINE, BOTTOM

730 3180-01048 CATCH PUMP

731 0020-79260 MOUNT, NOZZLE

732 0020-78401 RIGHT HOOK

733 0040-77742 EXHAUST BRACKET

734 0020-79261 BRACKET , MTG

735 0020-36430 BRKT,MTG CURRENT XFORMER

736 0020-78383 CATCH BRACKET

737 0020-13460 PROT COVER, GFI SENSOR, PVD CENT

738 0020-79339 MANIFOLD

739 0020-76435 BRACKET, MOUNT, LASER

740 0020-42254 CLAMP BYPASS/FORELINE GAS MOD

741 0020-76975 BLOCK, CLAMP, REAR, UPPER, CHBR C&D, CENTURA

742 0021-76439 ADAPTER, STANOFF, EARTHQUAKE CENTURA

743 0021-22493 BUTTON, RF MATCH INTERLOCK

744 0020-13261 BLOCK, CLAMP REAR, LOWER, CHBR C&D, CENTURA

745 0021-22495 CLAMP, RF MATCH INTERLOCK

746 0021-08978 BRACKET LEFT POWER SUPPLY CNTLR CENTIRA II

747 0021-08977 BRACKET RIGHT POWER SUPPLY CNTRL CENTURA II

748 0020-76980 MOUNT, CLAMP, REAR CHAM A&B, CENTURA GASLINES

749 0020-76979 MOUNT, CLAMP, REAR CHAM C&D, CENTURA GASLINES

750 0021-22494 PLATE, RF MATCH INTERLOCK SW HOUSING

751 0020-07259 PLATE, ISOLATOR CLAMP, WXZ

752 0020-76976 BLOCK, CLAMP, REAR, MIDDLE, CHBR C&D, CENTURA

753 0020-42255 BASE CLAMP BYPASS/FORELINE GAS MOD

754 0020-42259 CLAMP ISOLATOR EC WXZ

755 0020-76995 RUNWAY HORIZONTAL, GASLINE CENTURA GASPANEL

756 0020-30511 MANIFOLD WATER

757 0020-42171 SHIELD, HTR RETRACT INTLK GECO

758 0020-76981 RACEWAY, REAR, LEFT, CENTURA UHP GAS PNL

759 0020-75265 COVER, LEFT RUNWAY, COMMON CENTURA GASLINES

760 0020-76982 RACEWAY, REAR, RIGHT, CENTURA UHP GAS PNL

761 0020-41512 BRACKET, PNEUMATIC MANIFOLD COVER, LOW PRESSURE

762 0040-54479 BRACKET, PNEUMATIC MANIFOLD COVER, HIGH

763 0040-13577 PANEL ASSY, SID EPANEL, A/C FRONT

764 0021-76435 PANEL, A/C RR, B/D FR COVER SIDE EQ, MF

765 0040-13576 PANEL ASSY, SID EPANEL, B/D FRONT

766 0021-70161 PANEL,SIDE UPPER FRAME,REAR,CENTURA COMMON

767 0020-75264 COVER, RIGHT RUNWAY, COMMON CENTURA GASLINES

768 0020-37652 PLATE MID COVER LEFT

769 0020-37653 PLATE MID COVER RIGHT

770 0020-76475 BRKT, GEN RACK, STABILIZER MARKER

771 0020-76572 CLAMP, PLT REAR WATER LINE FAC I/F CENTURA 5200ST

772 0020-76618 CLAMP, HOLD REAR WATER LINE FAC I/F CENTURA 5200ST

773 0020-76571 CLAMP, BASE REAR WATER LINE FAC I/F CENTURA 5200ST

774 0020-76570 CLAMP, HOLD FRNT WATER LINE FAC I/F CENTURA 5200ST

775 0020-76569 CLAMP, BASE FRNT WATER LINE FAC I/F CENTURA 5200ST

776 0040-23995 FLOOR COVER REAR SEC POST B&D

777 0040-76587 PANEL FLOOR, FRONT, POST A/C, MCVD, SECTION TWO

778 0021-76374 COVER FLR REARFRAME MID SEC MCVD CMMN M/F PH II

779 0021-76378 FRONT COVER GL SECII MCVD CMMN M/F PH II

780 0021-76372 COVER FLR CHBR TRAY C&D MCVD PH II

781 0021-76373 COVER FLR CHBR TRAY A&B MCVD CMMN M/F PH II

782 0021-76375 FLOOR COVER, FRT OUTER POS. C, MCVD PH II

783 0020-76431 CENTER PLATE UPPER FRAME REAR CENTURA 5200ST

784 0020-40161 PLATE, KICK

785 0020-13335 COVER,GL,REAR,MCVD COMMON M/F

786 0021-06354 FLOOR COVER, FRT OUTER POS. D, MCVD PH II

787 0020-47600 PANEL FLOOR, FRONT, POST A/C, MCVD, SECTION ONE

788 0021-06367 FRONT COVER, POS. D MCVD CMMN M/F PH II

789 0021-35565 PANEL, FLOOR, PNEUMATICS

790 0021-35566 COVER, GAGES, INERT GASES

791 0021-70169 COVER, FLR REARFRAME, OUTER SECTION

792 0021-70288 FLOOR COVER FRT SEC. POST B&D

793 0020-13217 PLATE, REINFORCING, EARTHQUAKE BRKT MTG

794 0040-23656 cassette nest 25slot mod

795 0020-76429 SIDE PLATE UPPER FRAME REAR CENTURA 5200ST

796 0040-76091 FRONT PANEL, RIGHT REAR, CENTURA SKINS

797 0040-76090 FRONT PANEL, LEFT REAR, CENTURA SKINS

798 0040-02980 EMO Bracket

799 0040-07423 TOP PANEL, REAR, UGP

800 0040-08003 Front Panel 3 for singen skin

801 0040-76092 FRONT PANEL, TOP REAR, CENTURA SKINS

802 0020-43511 PANEL, LEFT FRONT WITH LAMP TOWER

803 0040-76093 FRONT PANEL, TOP FRONT, CENTURA SKINS

804 0020-07431 EMO BLANK OFF CENTURA SKINS

805 0021-10965 SKID MICROWAVE GENERATOR REMOTE PLASMA SOURCE

806 0021-03844 ENCLOSURE APPLICATOR WATER SWICH GIGA-FILL SACVD

807 0020-27383 BRACKET PNEUMATIC MANIFOLD COVER

808 0040-21333 Sub Panel Standard Serial/Video PCB

809 0030-00292 Washer Flat 0.562ID*1.50OD*0.78THK Teflon

810 0040-64739 DOOR REAR COMMON

811 0020-75460 Panel Water Switch MF

812 3090-01250 Bolt, Eye Forged 1/2-13*1L

813 0020-22821 Cover, Wafer Map LED

814 0020-23203 Cup, RF Match INTLK

815 0020-29311 spacer, source guide pin, vectra imp

816 0021-10789 BRACKET, TXZ SLIT WINDOW

817 0020-27365 Baratron Shipping Fixture

818 0021-06361 Bracket, 486PC P2 Distri BD PVD

819 0021-22587 NUT RF CONNECTOR, 10-32

820 0020-76742 Bracket, Endura Xfer Lid

821 0020-52812 Endura Front Bracket Bottom

822 4000-01321 CDCGE Front Panel, 2HP*3U

823 0020-76740 Bolt, Lid Bracket Assy

824 0020-29350 Cover, Shipment Packing Vectra-IMP Feedthru

825 0020-76474 BRKT, GEN RACK, CONNECTOR PLATE

826 0021-07979 Bracket, Collimator High Unifomity

827 0021-04234 Bracket, Enhanced Handler Shipping

828 0020-20817 COVER, FRONT LEG

829 0020-10107 Top Cover Front Left/Right Side

830 0021-12427 GUARD, WATER BOX TO WAFER LIFT, SZBESC

831 0040-02069 PANEL, SECONDARY SERIPLEX GENRACK BULKHEAD

832 0040-05881 COVER RF WATER BOX SUB-ZERO ESC 1.574" SHAFT

833 0040-07936 GUARD, UPPER SLIT VALVE SIDE, MOTORIZED LIFT

834 0040-20165 BRACKET VCR CROSS MIXED

835 0040-61804 GUARD, LOWER, CLEAR, MOTORIZED LIFT

836 0040-38711 POST,PVD CHAMBER CART

837 0040-79705 GUARD, LOWER, CLEAR, FLAG ACCESS, MOTORIZED LIFT

838 0040-86545 BRACKET WATER FLOW

839 0021-22011 TUBE, FLANGED, HEATER LIFT BEARING, BESC

840 0020-20719 RAIL SUPPORT RF GEN CABINET

841 0020-05808 CLAMP, INSERT INSULATOR

842 0020-07274 SPACER, SOURCE GUIDE PIN, SIP

843 0020-28743 BLOCK, WATER IMP

844 0020-02513 SHIELD, RF EMISSIONS, SIDE, SIP TTN SOURCE

845 0040-20037 UNION, FLEX "T" 8" GATE VALVE

846 0040-07287 PLATE, RF EMISSIONS GROUNDING, SIP SOURCE

847 0020-02514 SHIELD, RF EMISSIONS, CRYOSIDE, SIP TTN SOURCE

848 0020-02515 SHIELD, RF EMISSIONS, ROBOTSIDE, SIP TTN SOURCE

849 0020-02920 BRACKET SENSOR FLAG MOTORLIZED LIFT,SZBESC

850 0021-31991 FLAG SENSOR MOTORIZED LIFT

851 0040-23542 POST, FLAG MOUNT, MOTORIZED LIFT

852 0020-70717 LEVER, GAS POST, MACHINED

853 0020-70781 PLATE 18KW POWERSP CORD STRN RLF

854 0020-13998 PLATE, SOURCE ALIGNMENT PIN

855 0020-20841 BOLT,GAS POST

856 0021-08783 HOLDER LEAD SCREW COVER CU SZ ESC WATERBOX

857 0020-08104 PLATE, CONVERT SZ CHILLER TO ROOM TEMP WATER BOX

858 0020-19544 BRKT, INTERLOCK SWITCH SMIF

859 3790-01723 STDFM/F 3/8 HEX 8-32 X 1.0L SST NO FINIS

860 0020-24319 CLAMP 2" & 1.5" PIPE

861 0270-20069 8" CASS INDEXER TO ROBOT CAL PLATE

862 3480-01055 SMC SHOCK ABSORBER

863 0020-40703 KEY, COUPLING MAIN SHAFT INDEXER

864 0270-20037 TOOL, INDEXER CALIBRATION BAR

865 0020-40704 COVER FRONT INDEXER

866 0020-40705 TOP COVER

867 0040-13907 COVER SIDE,LL A CENTURA MF

868 0040-07937 GUARD, UPPER CRYOSIDE, MOTORIZED LIFT

869 0040-76179 CROSS BAR, TRANSPORT CART

870 0010-22156 ASSY BESC MOTORIZED LIFT

871 0021-21858 STUD,MOUNTING,MOTORIZED LIFT

872 0040-23543 CLAMP,HEATER,1.574 SHAFT,PNEUMATIC/MOTO

873 0040-23544 BLOCK,MOUNTING,1.574

874 0040-24228 SHLD RF HTR BTM 1.574

875 0040-23546 BRACKET ASSEMBLY,BELLOWS TWIST,1.574

876 3710-01085 SHAFT GND .4499

877 0020-34299 FLANGE, INSULATION, UNIBODY, .400THK

878 0045-20040 COLLAR 1.574

879 0020-21192 BRACKET SHIPPING PVD WAFER LIFT

880 0020-21193 BRACKET SHIPPING HEATER LIFT

881 0040-04134 STRAP, GROUNDING SHIELD SUPPORT

882 0030-00027 BLOCK MOUNTING SHUT-OFF VALVE

883 0020-20575 BRACKET MOTOR BRUSHLESS

884 0020-20500 SHIELD CRYO, ROUND

885 0020-20484 HUB END LAMP COVER

886 0040-70165 VACUUM LINE 1.50 X 58" KF-40

887 0020-04606 Grounding Button Support Strap

888 0020-23642 GUIDE RF MATCH MODIFIED

889 0010-39650 DPS Wafer Lift Pin Assy

890 0020-44764 CENTURA II WB HEATED LOCK

891 0020-13952 BRACKET VALVE DIFFERENTIAL PLUMBING MF POST MOUNT

892 0040-06936 PLATE LOWER BACK HEATED LL

893 0040-06934 COVER WIRE HEATED LL

894 0020-75852 Load lock Cassette stage(WBLL) Kit

895 0021-21984 BRACKET, PROTEUS FLOW SWITCH

896 3790-01779 STDF F/F 5/16HEX 10-32 X 5/8L SST

897 0020-40710 BRACKET, CASSETTE PRESENT, LLC

898 0020-28612 STEP, REAR CVD POSN 3

899 0040-44415 BRKT, ENDURA STAND SUPPORT W/HE MANIFOLD

900 0021-36020 SOCKET, LIGHT BULB,TxZ

901 0021-02155 RING, LOWER, ISOLATOR

902 0020-48700 EDGE RING, 9 HOLE, PURGE HEATER 200MM TXZ

903 0020-21716 PLUG, CVD/MONOLITH INTERFACE

904 0020-24982 COVER CVD LAMP DRIVER

905 0020-28083 STOP, H2 SENSOR ASSY

906 0020-26323 FRONT COVER

907 0050-13038 DUCT AIR METAL 2

908 0041-02999 COVER, H2 SENSOR AND DISPLAY BRACKET, CVD GAS BOX

909 0020-22313 SHIELD TERM BLOCK 2 POS

910 0020-13992 CASSET 200MM WBLL CMF CENTURA

911 0020-16149 COVER, AC BOX ON KICK PLATE, CENTURA

912 0021-02863 TOP RING, SPRING COIL, DTCU, DPS

913 0050-07045 ADAPTER, VCR VALVE, CM PORT, MXP+/EMXP+

914 0190-36045 GROUND STRAP WITH CLEARANCE MAG BRACKET

915 0020-39745 BASE H.O.T PACK 5200

916 0020-39746 PLATE BASE H.O.T PACK 5200

917 0040-75075 CLAMP AC CONDUIT CENT CHMBR FAC

918 0021-39779 FLOOR PANEL eMxP/MxP+/RPS POS

919 0021-10610 BRACKET ELBOW POS A&B R2 PH II COMMON

920 0021-00487 FLOOR PANEL MXP POS

921 4000-01254 CDCGE SCREW PAN HD, M6 X 16 POZIDRIVE ZINC-PLATED

922 0020-61544 2-PHASE DRIVER MOUNTING BRACKET

923 0021-21704 SCREEN RF SHIELD, 6 VIEWPORT IMP, PVD

924 0021-20371 BLANKOFF, N-CONNECTOR B101 HEATER WATER BOX

925 0020-34261 BRKT,GAS LINES,BOTTOM,CENTURA

926 0020-49604 BRACKET, GAS PANEL DOOR, INTERLOCK BYPASS

927 0020-20967 PANEL, 2-PLUG,RF GEN CABINET

928 0040-38840 STRAP, RACK, DXZ+

929 0270-20044 TOOL CALIB. ORIENTER 8" SEE

930 0040-38839 RACK, BASIC, NITRIDE550

931 0020-39869 BRKT., BLOCK VALVE, GAS BOX, CENTURA

932 0021-36821 BRKT, FLAT, VERIFLO, SINGLE VALVE, GAS P

933 0040-61064 STIFFENER, LOWER, DOOR FRAME TIM ASSEMBLY, CENTURA

934 0021-76134 PLATE OTB LEFT REAR,PH2 OTB COMMON MAINFRAME

935 0021-76133 PLATE OTB RIGHT REAR,PH2 OTB COMMON MAINFRAME

936 0021-70240 CARRIER, LOWER, HEATER LIFT DXZ

937 0021-46620 TOOL SPANNER WRENCH FOR SMC AIR CYL

938 0021-76956 COVER, FLOOR, REAR - MIDDLE, CENTURA

939 0021-39989 INSULATOR SHIELD, FACEPLATE, SILANE DXZ

940 0021-38336 MANIFOLD,COOLING,NITRIDE550

941 0021-12883 PLUNGER, INTLK SWITCH, DUAL FREQ., BOTTOM MODULE

942 0021-12882 CARRIER, INTRLK SWITCH, BOTTOM MODULE

943 0021-11722 PLUG, THROTTLE VALVE, SIN, DXZ

944 0021-10841 COVER,FRONT,LEFT,CENTER,CENTURA DCVD

945 0021-06151 BRACKET, VALVE, TOP MOUNT, FLUORINE GENE

946 0021-09724 STRAP,RF INPUT, SIN,DXZ

947 0021-06083 BRACKET, SUPPORT, OUTER, DXZ, FLUORINE GENERATOR

948 0020-34112 PLATE,REFERENCE,INDICATOR

949 0020-34617 PLATE,MTG,T/C AMP

950 0020-34111 PLATE,LEVELING,HEATER,DXZ

951 0020-33343 CUP,CLAMP SCREW

952 0020-13658 LOCK SHIPPING DOOR, LLC, CENTURA

953 0040-92679 COVER, FLOOR L/L B, BACK, UNIV. CENTURA

954 0020-08423 BRACKET, FUSE BLOCK

955 0020-13047 WAFER, ALUMINUM CALIBRATION

956 0020-13996 Plate OTB Center, Rear, Ext Umbilicals, CMF

957 0021-39253 BUMP GUARD, DOOR, GAS PANEL

958 0021-39259 BUMP GUARD, VERTICAL W/ADHESIVE, GAS PANEL

959 0021-39260 BUMP GUARD, HORIZONTAL, W/ADHESIVE, GAS PANEL

960 0021-39261 BUMP GUARD, END PIECE, W/ADHESIVE, GAS PANEL

961 0021-76955 COVER, FLOOR, SIDE - MIDDLE, CENTURA

962 0040-36486 FAB, PLATE, TOP, TIM IQ PUMPS, EDWARDS

963 0040-02229 BASE, LATCH, LID, DXZ

964 0040-61063 STIFFENER, UPPER, DOOR FRAME TIM ASSEMBLY, CENTURA

965 0040-36487 FAB, PLATE, BOTTOM, TIM IQ PUMPS, EDWARDS

966 0040-01892 LEFT BLOCK CLMP/GAS SPRNG DXZ FLUORINE GENERATOR

967 0020-37948 BRACKET SINGLE VALVE GAS BOX CENTURAGECO

968 0040-01893 RIGHT BLOCK CLMP/GAS SPRNG DXZ FLUORINE GENERATOR

969 0020-44040 BRACKET, EMO SWITCH, NO SKINS CENTURA MAINFRAME

970 0020-40923 LOADLOCK INDEX UP-DOWN ASSY BLOCK

971 0020-76870 BLANKOFF BOTTOM EXHAUST CONTROLLER/AC ENCL.

972 0021-02795 CAPTIVE WASHER, HASTELLOY, 4-40 X .5THK

973 0021-06082 BRACKET, SUPPORT, INNER, DXZ, FLUORINE GENERATOR

974 0021-04402 PIN, INTLK SWITCH, BOTTOM MODULE

975 0020-76306 BRACKET, SUPPORT, CHAMBER LID LIFT

976 0021-13286 COVER,FLOOR,SIDE-FRONT, CENTURA AC BOX

977 0021-41451 VIEWPORT COVER TRANSFER CHAMBER

978 0030-40007 BRACKET, MAIN, LLC, NON-ENP

979 0020-34252 BRACKET BV5

980 0020-40156 WINDOW FRONT DOOR COVER

981 0020-40977 COVER, WIRE, DOOR MECH

982 0020-41091 MOUNT SAFETY VALVE

983 0020-70583 DOOR, LOADLOCK ALUMINUM

984 0020-33803 PAD, FOOT, UPPER CHAMBER DPS MEC

985 0040-02807 DTCU POWER CONNECTOR COVER

986 0020-13088 PLATE, BKT MTG, HARD DISK DRIVE

987 0020-40157 CLIP, SPRING

988 0040-82067 COVER, FRONT LLK DOOR

989 0227-98809 Bracket Clip

990 0225-96857 Bracket Cover Switch

991 0041-08813 Bracket Upper Valve 13 Drop TF

992 0041-08811 Enclosure Top Feed SLD Facility 13 Drop

993 0021-41820 Plate top TF SLD Encl 13 Drop Centura

994 0040-35796 Plate APC Controller Gas panel

995 0041-08812 Door Facilities TF SLD Encl 13 Drop TF SLD

996 0021-39008 Bracket, 4-position Fuijikin Gas Box 31

997 0021-39840 Bracket 7-position Fujikin Gas Box 31

998 0020-33098 BRACKET,COIL,REAT TOP,R2

999 0021-09097 PLATE, LINER ALIGNMENT, VESPEL

1000 0020-48489 COVER, PNEUTRONICS BOARD BULKHEADS

1001 0021-12852 BRACKET SENSOR TRANSDUCER MEGASONICS

1002 0021-79491 BRACKET, 1 DI FLOW VALVE DDF3

1003 0020-79635 BRACKET, VACUUM GENERATOR MEMBRANE

1004 0040-32323 COVER,DIRECT DRIVE MOTOR SACVD THROTTLE

1005 0021-04541 COVER, TERMINAL, SAFETY

1006 0020-46639 HANDLE, RND .50 DIA, OFFSET, 4

1007 0020-23837 SPACER 6-12 SOURCE GUIDE PIN

1008 0020-22664 SPACER SOURCE GUIDE PIN WIDE BODY CBR

1009 0040-20055 FEED THRU ADJ AR

1010 0020-20149 PLATE, H-SENSOR SOURCE

1011 0020-13999 BRKT, SOURCE, ALIGNMENT PIN

1012 0020-27668 BLADE 8 101 SHUTTER

1013 0040-01215 COVER RF OUTPUT ENI 288

1014 0021-37154 SHIELD TERM BLOXK 8 POSITION

1015 0020-76423 CLAMP VACUUM LINE CENTURA CHAMBER FACILITIES

1016 0040-76365 COVER SIDE LL B CENTURA

1017 0040-76364 COVER, SIDE LL A CENTURA

1018 0040-88065 RF TUBE PRECLEAN II

1019 0020-24890 LIMITER WAFER LIFT PC II

1020 0270-35395 ASSEMBLY, VIEW LID W/ GUARD, DXZ

1021 0020-21901 2HOLE BRACKET

1022 0020-75377 SHIELD, CONTACTOR MAIN AC

1023 0020-79132 CONTROL PANEL CONTROL UNIT SLURRY

1024 0021-79292 BRKT,MOUNTING FRONT,STAND ALONE FLAT PANEL DISPLAY OPTION

1025 0021-77914 BRACKET, MOUNT REAR

1026 0040-77688 DUCT ADAPTER, SLURRY MAIN TRAY, LOWER TO

1027 0021-78275 GASKET, DUCT ADAPTER, LOWER EXHAUST

1028 0021-79549 BRACKET, SUPPORT FI-SMIF

1029 0020-79398 PLUG 3 LINE SPLASH GUARD

1030 0021-79551 BRACKET, LEFT SIDE FI-SMIF

1031 0040-41146 BRKT WELDMENT EXTERNAL MOUNT FABS COMBO ARM FPD

1032 0021-79550 BRACKET, RIGHT SIDE FI-SMIF

1033 0021-78957 PLATE, COVER, LOAD FLANGE, SAMSUNG

1034 0021-78499 SHIELD, REAR

1035 0040-79557 PANEL,REAR LEFT F1-SMIF

1036 0020-42781 PANEL, REAR RIGHT, FI-SMIF

1037 0021-79020 FLANGE, LOAD FI

1038 0021-78958 PLATE, COVER, UNLOAD FLNGE FI

1039 0040-75432 PANEL, FRONT LIGHT TOWER ASSY CMP CONTRO

1040 0021-79548 BRACKET, TOP REAR PANEL FI-SMIF

1041 0020-14450 BRACKET, WAFER LOSS SENSOR

1042 0040-78365 COVER, SENSOR, WAFER LOSS

1043 0021-47311 LINK MANAGER MOUNTING PLATE

1044 0021-77920 MOUNTING PLATE FLAT PANEL DISPLAY OPTION

1045 0021-79293 BRKT,MOUNTING REAR FLAT PANEL DISPLAY OPTION

1046 0021-11593 PLATE ADATER FOR BROOKS AUTOMATION

1047 0040-50639 BRACKET, BOTTOM REAR PANEL FI-SMIF

1048 0040-09559 SHELF, DEIONIZER TANK, MODIFIED

1049 0040-77881 SKIN, REAR, UPPER LEFT

1050 0021-79528 COVER, REAR, LEFT, WB

1051 0022-77109 COVER, REAR RIGHT WB

1052 0020-05067 PCW bulk bracket Right

1053 0020-23640 LIFT MOUNT BLOCK

1054 0020-76383 TRIP BRACKET,INTLK,EXT PCII

1055 0020-26753 WASHER,INSULATOR PVD LIFTER,HTHU HOOP

1056 0020-29036 FLAG,UPPER MOTORIZED LIFT EXTENSION

1057 0040-75314 PVD CHMBR POS D WATER RETURN PANEL

1058 0040-32596 PLUG SIGNAL TOWER CONDUCTIVE PAINT

1059 0020-27205 CLAMP RING 8 INCH SNNF HTHU 6 PADS

1060 0040-33908 PANEL INTERFACE,UPPER CONTROLLER W/BCR

1061 0040-23094 PANEL DISK DRIVE SUPT SYSTEM CONTROLLER

1062 0040-62473 PANEL REAR LEFT FI-SMIF

1063 0020-31691 CENTERING RING GATE VALVE

1064 0040-75375 TEE STAINLESS THREADED W/ 1/2

1065 0020-27127 PEDESTAL, PCII 8 JMF @ C&D

1066 0020-38925 DOME BLANKOFF SHIPPING PLATE DPS CHAMBER

1067 0020-23760 INTERLOCK BRACKET PC 2 RF MATCH

1068 0020-24410 BRACKET INTERLOCK CATHODE LIFT

1069 0020-23759 INTERLOCK HOUSING PC 2 RF MATCH

1070 0020-23754 RF MATCH INTLK BRACKET PREDEAN2

1071 0020-24063 FLAG SENSOR MOTORIZED LIFT

1072 0040-23545 BRACKET,CONNECTOR,1.574

1073 0020-25639 INSERT SLIT VALVE CENTURA CLAMPED DEGAS

1074 0040-23539 BRACKET CASS PRESENT

1075 0040-34840 BRACKET VCR CROSS CAJON

1076 0040-79075 GUARD LOWER CLEAR FLAG ACCESS MOTORIZED LIFT

1077 0021-22018 FLANGE, HUB, HEATER LIFT 1.574 DIA SHAFT BESC

1078 0021-35819 CHUCK, ASP, 200MM, TOP MOUNT TYPE

1079 0021-76849 ALIGNMENT PIN

1080 0020-24230 BASE PRECLEAN 2

1081 0040-22570 MTG PLATE PCII W/TRUBO RF MATCH

1082 0270-01597 U-FRAME,PRODUCER,200&300MM

1083 0020-47952 REFLECTOR-ADJ PLATFORM WBLL CMF CENTURA

1084 0015-16036 BRKT RELAY MOUNT RF GEN

1085 0020-39067 BRACKET BOTTOMFRONT PANEL

1086 0021-37395 COVER BOX 1-CONNECTOR CHX CABLE

1087 0021-27546 DIFFUSER,AIR AMPL, E-DTCU, DPS

1088 0021-37393 BOX SHIELDING CHX CABLE

1089 0021-37394 COVER BOX 2-CONNECTOR, C-HX CABLE

1090 0020-13977 L/L Wafer Present&Slid Sensor Cover(Wide)

1091 0021-07272 PANEL, BLANKFOFF 19 INCH RACK 1.060 INCHES HIGH

1092 0021-36639 BRACKET, SHROUD RACEWAY, HTD PROC LN

1093 0021-36141 BRACKET MNFRM,HTD GAS LN

1094 0040-02642 PANEL, FLOOR DPS, CHBR POS C#2 MCE

1095 0040-32593 PANEL,FRONT,COND.PAINT,WIDE BODY,ETCH

1096 0040-76439 BRKT,COVER DET ADJUST ASSY FAST WAFER MAPPER

1097 0021-35801 BRACKET MNFRM VDS LN

1098 0021-10295 PANEL BLANK-OFF 19 INCH RACK, 1.58 INCH HIGH

1099 0021-33627 GAS LINE BLOCK ARM

1100 3005-6500 GAS LINE SIDE BLOCK

1101 0020-20835 BRKT MTG PLATE DISK DR

1102 0021-39098 BRKT,BLNK TRIPLE GAS LINE

1103 0040-01752 CLAMP FORELINE,BOTTOM NON-DPA

1104 0040-39482 BRACKET FINAL INTEGRATION,

1105 0040-39483 BRACKET FINAL INTEGRATION,Upper

1106 0270-35058 CLAMP SHIP CHAMBER/LID WXZ

1107 0020-28888 PLUNGER DC BIAS

1108 0020-29207 POST DC BIAS

1109 3550-01097 PIN

1110 0020-24836 EXTENSON ARM HTHU HEATER

1111 0020-23352 DISK HEATER

1112 0020-20667 MOUNT LIFTER BEARING

1113 0050-21983 GAS LINE, ADAPTER, FEED THRU-MIXED

1114 0020-39305 BRACKET,RACEWAY

1115 0040-23218 BASE TC ISOLATION AMPLIFIER,SUB-ZERO LTBESC&BLT

1116 0021-45789 BLOCK MOUNTING STEC SEC-Z500X MFC

1117 0020-35903 STACK,6" EXHAUST

1118 0020-36426 COVER,CUTOUT,EXHAUST STACK

1119 0020-36423 BRKT,MOUNTING,CONNECTOR

1120 0020-05066 PCW bulk bracket Left

1121 0021-70094 PANEL,ADAPTER UPPER,IPS HYBRID

1122 0041-13342 STABILIZER/FRKLEFT RAIL, EQUIPMENT RACK, CENTURAⅡ

1123 0020-34131 BASE,RF

1124 0021-39803 COVER, TC AMP

1125 3880-01123 3/8 ROUND MALE-FEMALE STANDOFFS

1126 0041-04807 ROD,CONDUCTOR,RF FEEDTHROUGH,PRODUCER 200MM

1127 0021-03006 BRACKET PIN LIFT SST, PRODUCER

1128 0021-01634 BALL STUD 5/16-18 GAS SPRING PRODUCER 20

1129 0021-36269 CUP,PIN LIFT BELLOWS

1130 0021-04297 MANIFOLD CLEAN GAS 200MM PRODUCER

1131 3300-03512 ISO-KF ELDOW90 SMOOTH RADIUS

1132 0021-32330 INSULATOR,SLEEVE,RF FEEDTHROUGH,PROUCER 200MM

1133 0021-14670 SCREW, ALUM, DXZ PUMPING PLATE, SACVD

1134 0021-07149 SHIELD, TERM BLOCK, 4 POSITION

1135 0021-76018 BUSS BAR GRN

1136 0021-15955 BRKT. BLANK 1/2&1/4 GAS LINE 300 MM PROD

1137 0021-23744 DELRIN BUSHING CHAMBER LID GAS BOX PMD 2

1138 0021-16142 BUS BAR, GROUND, LOTO BOX, EPSILON

1139 3790-01402 STDF M/F 1/4 HEX X 3/4 LG 4-40 THD SST

1140 0040-75224 SHIM, CLAMP, RIGHT OR LEFT PRODUCER

1141 0040-01558 BRACKET, CLAMP SUPPORT, FORELINE,

1142 0021-01810 L-BRACKET, RAMPED SACVD DXZ

1143 0040-33199 PANEL, FRONT, CH B/C, AC DIST BOX, PROD S

1144 0020-08436 BRACKET, MOUNTING, ACDIST CONDUIT, PROD

1145 0020-54436 BRACKET, TEOS LINE, 1.375 OD, PRODUCER

1146 0040-23552 COVER, RF HEATER ACE, HT BESC

1147 0020-75864 BRACKET, CONN DUAL AXIS MOTOR AND

1148 0020-75993 BLOCK NEST CAAETTE 200MM ENP WBLL CMP CENTURA

1149 0020-34287 BRKT,GAS LINES,MIDDLE,CENTURA

1150 0020-40022 BAR SAFETY DOOR MECH

1151 0020-41092 ACTUATOR SAFETY VALVE

1152 0020-34286 BRKT,GAS LINES,SIDE POST,TOP,CENTURA

1153 0020-13597 BRACKET, TALL MANIFOLD, HEC

1154 0020-41483 COVER, ENCLOSURE, CHMB A/C/E CENTURA CMF

1155 0020-13596 BRACKET, TALL MANIFOLD, HEC

1156 0020-34265 BRKT,GAS LINES,SIDE,TOP,CENTURA

1157 0020-42469 SHIELD, DUPLIX RECEPTACLE

1158 0020-41484 COVER, ENCLOSURE, CHMB B/D/F CENTURA CMF

1159 0020-34263 BRKT,GAS LINES,SIDE,BOTTOM,CENTURA

1160 0020-34285 BRKT,GAS LINES,SIDE POST,BOTTOM,CENTURA

1161 0020-34264 BRKT,GAS LINES,SIDE,MIDDLE,CENTURA

1162 0020-34262 BRKT,GAS LINES,TOP,CENTURA

1163 0020-13594 BRACKET, SHORT MANIFOLD, HEC

1164 0020-13595 BRACKET, SHORT MANIFOLD, HEC

1165 0040-81827 BRACKET,TUBING SUPPORT,MANIFOLD

1166 0021-37972 BRACKET, TUBING SUPPORT, N2/AR INLET

1167 0021-36159 BRACKET, 1/4 TUBING SUPPORT ALUMINUN, B

1168 0021-36162 BRACKET, DIGITAL DISPLAY CLAMP

1169 0021-36161 BRACKET, DIGITAL DISPLAY HOLDER

1170 0021-36160 BRACKET, 1/4 TUBING SUPPORT ALUMINUN, T

1171 0021-37967 BRACKET, TUBING SUPPORT, H2 & N2/AR

1172 0021-36952 CLAMP,3/8"TUBING

1173 0021-36951 CLAMP, 1/4 TUBING

1174 0021-45781 BRACKET,DIGITAL DISPLAY HOLDER

1175 0021-45782 BRACKET,DIGITAL DISPLAY CLAMP

1176 0021-04248 HOOP LEFT EXTENDED 8"/6" B101

1177 0040-20726 SHIELD,HTHU HEATER RF TOP

1178 0270-76079 INSERT, 6" CASSETTE HANDLER SHIPPING CLAMP

1179 0020-21444 BRACE, FRONT SKIN

1180 0020-21003 BRACKET, LOADBLOCK

1181 0020-22983 BRACKET PILLOW BLOCK

1182 0030-00084 HOLDDOWN RING VIEWPORT

1183 0020-23007 END PLATE, 6 AUTO LOADLOCK

1184 0020-22994 SIDE RECEIVER, LEFT 6

1185 0020-22996 ACTIVATOR PIN ,6 ALL

1186 0020-23161 COUNTERWEIGHT, CASSETTE SENSOR

1187 0020-22995 SIDE RECEIVER, RIGHT 6

1188 0020-23063 SHAFT,SENSOR,FLAG

1189 0020-23136 REVERSE BLOCK 150MM PLASTIC CASSETTE

1190 0020-23233 BRACKET RIGHT 150MM CASSETTE

1191 0020-23138 BRACKET SENSOR, A.L.L. CASSETTE SENSOR 2

1192 0020-23234 BRACKET LEFT 150MM CASSETTE

1193 0020-22629 ROLLER MOUNT CASSETTE CLAMPING

1194 0020-23064 REFLECTOR, SENSOR, FLAG

1195 0020-22630 WEIGHT CASSETTE CLAMPING 150MM PLASTIC

1196 0020-23154 HARD STOP, SENSOR FLAG

1197 0020-23228 RECEIVER BASE, AUTO LOADLOCK HANDLER

1198 0020-23165 BRACKET CONNECTOR, A.L.L. CASSETTE SENSO

1199 0020-22740 CASSETTE SUPPORT

1200 0020-22627 LEVER CASSETTE CLAMPING

1201 0020-22626 PIVOT BLOCK CASSETTE CLAMPING

1202 0020-23060 BRACKET, MOUNTING, SENSOR, FLAG

1203 0020-22628 PIVOT POST CASSETTE CLAMPING

1204 0020-20802 BUSS BAR, MEDIUM 250A

1205 0040-46059 HOOK, LID LATCH, BUFFER / TRANSFER LID H

1206 0021-11038 BLANKOFF, LCF LID, BUFFER CH, C-E OR D-F

1207 0020-17523 HARDSTOP, BUFFER / TRANSFER LID HOIST

1208 0200-00669 WINDOW,QUARTZLCFC-EORD-F,BUFFERCHLID

1209 0021-16503 COVER, EMITTER INTFC PCB, LCF, C-E OR D-

1210 0040-32841 PANEL, LCF CABLE BULKHEAD, MAINFRAME

1211 0021-04587 PLATE, BLANKOFF, LCF, XFER CH LID

1212 0040-08192 LID,BUFFERCHAMBER,LCFCOMPATIBLE

1213 0020-26319 INSULATORLIGHTLID

1214 0040-28990 Bracket, 8 Mounting Holes, Status Lamp

1215 0021-01593 POST REFERENCE HEIGHT MOD I RTP

1216 0021-01594 CAP REFERENCE HEIGHT MOD I RTP

1217 0020-44415 COVER, TOP, CLEAR, CHAMBER RACK PRODUCER S

1218 0021-25070 SPACER CHAMBER RACK PRODUER S

1219 0020-40702 FLAG,ROTATION

1220 0020-13753 COUPLING, DRIVEN

1221 0020-40701 FLANGE, DRIVER

1222 0020-43126 BRACKET, IVL, 3WAY DIVERT VALVE, PRODUCE

1223 0020-10464 NUT, FEED THRU

1224 0040-05781 BRACKET, LOWER FINAL LINES, CH. C PRODUC

1225 0040-34816 COVER, RF FILTER PRODUCER

1226 0040-42934 BRACKET, RIGHT, FINAL LINES, PRODUCER S

1227 0040-34564 BRACKET, UPPER TEOS LINE, CH C, PROD S S

1228 0021-23517 C-CLAMP, SACVD

1229 0040-01496 BRACKET, BACK SUPPORT, FL GEN 200MM SACV

1230 0040-61563 BRACKET, CLAMP, IVL, VALVE, 200MM PRODUC

1231 0040-60934 CLAMP, TOP, IVL, VALVE BRCKET, 200MM PRO

1232 0021-02999 CONNECTOR, BOTTOM, HEATER 200MM PRODUCER

1233 0270-76077 INSERT CLAMP 6"/8"CASSETTE HANDLER SHIPPING

1234 0021-37168 MANIFOLD WATER TOP MOUNT

1235 0021-38840 BLANK-OFF, HR DTCU W/O IEP, DPS CHAMBER

1236 0040-13239 OUTRIGGER INNER MAINFRAME

1237 0040-13240 OUTRIGGER OUTER MAINFRAME

1238 0200-00166 WINDOW QUARTZ LCF SLITVQCTUATOR

1239 0021-54188 SUPPORT UPPER ADAPTER RF SOURCE 200MM

1240 0270-09350 TOOL TOP BASE WINDOW SUPPORT RTP

1241 0270-35199 TOOL COVER REFLECTOR PLATE MOD I

1242 0020-34585 BRACKET, LF, GENERATOR, DXZ

1243 0040-22804 BRACKET, RIGHT MATCH BOX SUPPORT

1244 0020-20113 HUB DC BIAS, SHIELD ASSY

1245 0040-46057 BRACKET, LID LIFT, BUFFER / TRANSFER LID

1246 0040-70214 BUMPER, ENDURA SHIPPING BUMPER

1247 0040-01195 CRYO-PUMP PROTECTION BRACKET

1248 0020-40002 KEY ACTUATOR

1249 0020-35979 COVER TOP XFMR PEC

1250 0020-36606 BUSS BAR GROUND XFMR BOX CENTURA 15 POS

1251 0020-75670 RAIL, SUPT DIST. & FILTER BOX CENTURA CO

1252 0021-03282 BRACKET TMS,SEIKO SEIKO 1300 DPS METAL

1253 0040-38340 BRACKET, MOUNTING, SIGNAL TOWER, W/O, PE

1254 0040-01278 ENCLOSURE TRANSFORMER PEC

1255 0040-06741 BRACKET,VAT CONTROLLER, TO PUMP

1256 0020-35980 SHIELD CRT BREAKER XFMR PEC

1257 0021-03481 BRACKET, VAT-CONTROLLER

1258 0021-10087 PLATE, SINGLE PLUG, RF GENERATOR RACK

1259 0020-40006 MOUNT, DOUBLE SENSOR, INDEXER

1260 0041-05223 MANIFOLD INFUT CVG TXZ CHAMBER

1261 0041-05230 MANIFOLD OUTPUT CVG TXZ CHAMBER

1262 0020-06487 ENDURA AC RACK POWER Line Block

1263 0020-06484 BUSS BAR 250A LEFT LINE MAIN CONACTOR

1264 0020-06485 BUSS BAR 250A CENTER LINE MAIN CONACTOR

1265 0040-01566 ENCLOSURE, LCFCONTROLCARD, STAND-ALONE

1266 3690-03088 SCRCAP SKT HD 4-40X1-3/4L HEX SKT SST SLVR-PLT

1267 0040-38041 MANIFOLD, WATER, SAE 9/16-18 PRODUCER 20

1268 0020-45095 STRAP, PLT, RF&HV FEED, CERAMIC ESC

1269 0021-25141 PLUG, IRM, SGD, 200MM EMAX

1270 0015-01375 SCREW, BASE MOUNTING, SHOULDER, AG PLATED

1271 0021-24029 WASHER, BASE MOUNTING, AG PLATED

1272 0021-15954 BRKT. 1/2 & 1/4 GAS LINE 300 MM PRODUCER

1273 0270-76908 CAL TOOL B101 LIFT TO ROBOT 6"

1274 0021-61251 CLAMP BRACKET NON-TOXIC GAS CENTURA CMF

1275 0020-13606 BRACKET, TTF BASE HOLD, COMMON CENTURA

1276 0020-75381 PANEL, FRONT, HARD DISK DRIVE

1277 0021-06241 BRKT,CDA, TTF FTG MOUNTING TPCC, MODULAR

1278 0021-06432 BRACKET, GAS SPRING, CH. LID, SINERGY

1279 0021-04687 NUT, LOCK, HEATER LIFTER

1280 0021-06115 SUPPORT, VCR GLAND, LIFT

1281 0021-04686 PLATE, HEATER LEVELING, 200MM UNIVERSAL

1282 0021-04679 PLATE, LOCK, HEATER LIFTER

1283 0021-04680 PIVOT BLOCK, BALL END, LEVELING STUD

1284 0021-04677 RETAINER, SEAT, SPRING, LIFTER

1285 0021-04673 FLAG, SENSOR, LIFTER

1286 0021-04671 CLAMP, ACME NUT, LIFTER

1287 0021-04672 PLATE, END, LIFTER

1288 0021-06375 COVER, HINGE SINERGY CHAMBER

1289 0021-02609 BRACKET, 24V FAN ASSY WXZ

1290 0021-04670 HOLDER, ACME NUT, LIFTER

1291 0021-04674 PLATE, SENSOR, LIFTER

1292 0021-04676 SEAT, SPRING LIFTER

1293 0020-09533 HANDLE, GAS BOX

1294 0020-07292 BRACKET A/C HX VALVES TPCC

1295 0020-76422 CONDUIT, AC INLET, CENTURA CHAMBER

1296 0021-04669 SPACER, LIMITED EXTENSION, UPPER CARRIER

1297 0021-07812 SMIF T-BAR FOR ROLLER PIN ASSY

1298 0040-21826 FLANGE, EDWARDS PUMP, CVD EXH SW

1299 0020-21251 GENERATOR SUPPORT SHELF

1300 0021-22267 BRACKET MOUNTONG GAS MODULE TXZ

1301 0021-36056 TXZ GAS FEED THROU END CAP

1302 0020-28703 BRACKET, LOADBLOCK PANEL TOP

1303 0040-22196 PANEL, PCB MOUNT, ASYST SMIF I/F

1304 0040-16091 COVER, SMIF-ASYST PCB 0220

1305 0020-24411 CATHODE INTLK COVER PRECLEAN 2

1306 0020-75458 PANEL, FRONT, RIGHT, MAINFRAME

1307 0020-28584 PANEL, DEGAS COOLDOWN ITLK

1308 0020-43074 WBLL BRKT, LED BOARD MOUNT, FAST WAFER M

1309 0020-20068 SIDE COVER, GAS BOX

1310 0040-22199 BRACE, RIGHT, FRONT PANEL, ENDURA WB LL

1311 0040-22200 BRACE, LEFT, FRONT PANEL, ENDURA WB LL

1312 0020-70529 BRKT WATER SWITCH

1313 0021-13032 SIDE COVER FRONT LEFT SIDE

1314 0021-21025 COVER, FRONT SKIN EMO/PCB

1315 0020-21674 LOAD LOCK SHIELD BRACKET

1316 0020-22616 ROLLER SUPPORT LEFT WITH HELICOIL

1317 0021-02793 CAPTIVE SCREW, HASTELLOY, 4-40X .35LG

1318 0021-70346 COVER, LEAD SCREW HT ESC

1319 0050-25994 PVD SUS MANIFOLDER

1320 0021-13339 BRACKET, DPA MOUNTING, CH B/C

1321 0021-04974 COUNTER BALANCE TOP 2 SPRING

1322 0021-03642 SUPPORT ASTRON 200MM SACVD PRODUCER

1323 0021-04973 COUNTER BALANCE BASE 2" SPRING

1324 0020-52097 BRACKET MIRRA BULKHEAD EXPANSION

1325 0020-62595 BRACKET, MIRRA, VACUUM SUPPORT

1326 0020-62870 DRAIN SUPPORT BRACKET

1327 0020-76863 HINGE BLOCK OUTER BOTTOM

1328 0020-76928 STRIKE PLATE LATCH

1329 0020-25477 DISK HUB HEATER ESC/HT HEATER

1330 0021-39093 BRKT, BLNK TRIPLE GAS LINE

1331 0020-22379 BRKT MTG SMOKE DETECTOR

1332 0021-23177 WASHER ALUMINUM

1333 0021-22621 SCREW, STRIKE PLATE, AL

1334 0040-84847 COVER, FLOOR, FAC TRAY 3 REAR, CMF

1335 0040-84846 COVER, FLOOR, FAC TRAY 3 FRONT, CMF

1336 0041-03669 ADAPTER LHS/RHS, ENP PLATFORM, 200MM

1337 0020-40160 BRACKET, BOTTOM

1338 0020-34002 INSERT COVER, GAS FEED R2 CHAMBER

1339 0021-10539 BLOCK, TAPERED RETAINER, 1/4LINER POLY M

1340 0020-38497 BLOCK, SPACER, H/V INTERLOCK

1341 0021-09938 PLUG, MANOMETER PORT, R2

1342 0020-31909 CLAMP, SHIELD, GATE VALVE, BOTTOM

1343 0020-38066 COVER, SUPPORT BOTTOM, SIMPLE CATHODE, M

1344 0021-10538 BLOCK, ROUND PIN RETAINER, 1/4 LINER, POL

1345 0020-31907 SUPPORT, SHIELD, GATE VALVE

1346 0040-31885 SHIELD- FRONT, R2 5000

1347 0040-31889 SHIELD- LEFT, R2 5000

1348 0020-34320 PLATE ALIGNMENT, R2 CHAMBER, SGD

1349 0020-33316 HANDLE, HINGE, R2

1350 0021-10134 SLEEVE, EXTENDED, IR TEMP SENSOR

1351 0040-31888 SHIED- REAR, LEFT, R2, 5000

1352 0021-10601 CYLINDER, SUPPORT, POLY

1353 0020-38062 INSERT 5/16-24

1354 0020-34076 GUIDE, HINGE, UPPER, R2 CHAMBER

1355 0021-10370 COVER, TURBO SIDE

1356 0020-34328 GUIDE, LOWER HINGE, SLOTTED, R2 CHBR GECO

1357 0020-38064 COVER, L/L SIDE

1358 0020-38082 PLATE, STOPPER

1359 0020-38067 WING, GUIDE, RF-BOX

1360 0020-38081 NUT, STOPPER

1361 0020-38083 BOLT, STOPPER

1362 0020-31780 BRKT, PROTECTIVE GATE VLVE SHIPPING

1363 0020-38080 HOLDER, STOPPER

1364 0020-38084 ROD, STOPPER"G"ECO

1365 0020-38085 SCREW, ROD STOPPERGECO

1366 0226-95950 BASE, PLATEFORM, LLA

1367 0040-33422 TRAY MOD WAFER DUMMY WBLL CMF CENTURA

1368 0020-04389 BRACKET. OTB 3/8" N2 LINE, TOP VENT WBLL

1369 0226-95951 BUSHING, PLATFORM,.138-32

1370 0226-98108 SCREW, PLATEFORM SWIVEL

1371 0227-64140 LEXAN EMO COVER, FINGER SAFE

1372 0020-08582 PLATEFORM, TOP WBLL, MOD LOCK, CMF CENTURA

1373 0020-15127 GROMMENT, 25 ID, TEFLON

1374 0226-95959 BASE, PLATEFORM, LLB

1375 0020-56969 FILTER, SLIT WINDOW, ASP

1376 0690-01796 CLAMP FLG SGL-CLAW M10-BOLT SST SLVR-PLD W/SPLIT

1377 0020-18713 PLATE, SINGLE VALVE MOUNTING .190 THK

1378 0020-07034 P-5000 DXL RPS QUARTZ WINDOW CONVEX

1379 0020-29024 INSULATOR, MAGNETIC SWITCH

1380 0020-22310 SHIELD NEUTRAL BUSS- MAIN AC

1381 0020-22068 SHIELD NEUTRAL BUSS- MAIN AC

1382 0020-01326 HOSE FITTING, MCA+ WATERBOX MOUNT

1383 0270-02508 ALIGMENT TOOL

1384 0020-27812 PIN ALIGNMENT G-12 SOURCE FRAME

1385 0020-29035 FLAG, LOWER MOTOR LIFT EXT

1386 0020-25690 BLANKOFF AC REM CONTROLLER BULKHEAD

1387 0020-22312 SHIELD TERM BLOCK 12 POS

1388 0020-22311 SHIELD TERM BLOCK 6 POS

1389 0020-28373 SHIELD SYSTEM AC CB WITH PROBE HOLES

1390 0020-24057 BRKT VALVE WATER

1391 0020-22314 COVER TB 6 POS (B)-AC CHANNEL

1392 0040-13664 FIXTURE, SHIPMENT MOTOR LIFT

1393 0040-21289 ADAPTER 16

1394 0040-20090 KICK PLATE, PAINTED, NO SMIF, NARROW BOD

1395 0021-20790 DISK, SHUTTER, 8 SNNF, E-CHUCK

1396 0021-21656 PANEL, BLANKOFF, DISK DRIVE SUPPORT, CON

1397 0030-00026 MFC UNIVERSAL MOUNTING BLOCK

1398 0021-21657 BRACKET, BLANKOFF, DISK DRIVE SUPPORT, C

1399 0020-05833 PANEL, FLOOR REAR AC BOX COVER, MCE

1400 0040-01337 SIDE CVR, LL A

1401 0020-13612 BRACKET HOLD MFLD ADAPT, B-D SIDE

1402 0020-31422 BRKT, MTG, MAG GEN INTERFACE, ASP

1403 0020-38726 INSULATION, UPPER FRNT, BTM CHMBR, DPS

1404 0040-04868 HOLDER BARATRON ASSY

1405 0021-35562 PANEL, FLOOR, XFER, OVERPRESS

1406 0021-38021 PANEL, UPPER FLOOR, DPS CHBR, POS C, PH-

1407 0020-90540 8HOOP WITH TC

1408 0021-01791 BRACKET, FRONT PANEL, NBLL W/SPACER

1409 0020-75140 COVER CHAMBER TOP

1410 0020-12519 LIFTER, 6 ORIENTER, NARROW HOOP

1411 0021-01927 OUTRIGGER, FRONT PANEL, NBLL W/SPACER

1412 0040-13274 TOP COVER, CHAMBER TRAY AC, CENTURA

1413 0020-39646 SUPPORT BRACKET, 5200 AUTOTUNER

1414 0020-30977 ASP CH# LID COVER

1415 0021-35957 CLAMP #2, SHROUD RACEWAY, HEATED PROCESS

1416 0020-76918 BRACKET TOP SIDE CENTURA

1417 0020-22129 STIKER, MAG LATCH

1418 0040-75065 FLANGE, FAN FAILURE ALARM

1419 0040-13129 PLATE BASE PLATFORM ENP WBLL CMF CENTURA

1420 0020-75994 PLATE TOP PLATFORM ENP WBLL CMF CENTURA

1421 0020-36378 BLOCK ROTATION LOCK INDEXER

1422 0020-36610 BASE ROTATION LOCK INDEXER

1423 0040-13149 BRACKET, ANALOG SYNC PWA, FAST WAFER MAP

1424 0040-03345 PANEL ASSY.,SIDE COVER W/DOOR CMF, RIGHT

1425 0040-75430 BRACKET, CATCH PLATE

1426 0020-25694 BLOCK MTG HEATER 1.18 DIA SFT MTR LIFT

1427 0040-13128 TRAY STORAGE WAFER DUMMY ENP WBLL CMF CENTURA

1428 0020-76917 ANGLE BRACKET TOP SIDE CENTURA

1429 0040-50006 PANEL REAR EXHAUST COVER M/F FAC.BOTT CONN, CMF

1430 0020-25637 INSULATOR MAG SWITCH PCI CLR CVR EXT

1431 0040-75252 INTERFACE PANEL, LOWER

1432 0021-02733 COVER

1433 3020-01126 AIR CYLINDER, FLOATING JOINT COUPLING, ELBOW TUBIN

1434 0200-09005 QUARTZ WINDOW

1435 0021-04939 WATER COVER

1436 0690-01113 CLAMP FLG SGL-CLAW NW63,80,100 AL 5/16-1

1437 0040-01101 CHAMBER, COOLDOWN, DPS 200MM

1438 0020-39201 COVER, BRACKET, WAFER LIFT, DPS

1439 0035-00087 WAFER LIFT MOUNTING BLOCK

1440 0040-01102 FAST COOLDOWN CHAMBER ASSY

1441 0040-04940 HOOP, COOLDOWN, DPS 200MM

1442 0040-01103 PEDESTAL, COOLDOWN, DPS 200MM

1443 0010-38646 TXZ CHAMBER HINGE ASS'Y

1444 0021-22570 STYLUS, OPERATOR CONTROL PANEL

1445 0040-51499 BRACKET EYED MOUNT EMAX 300

1446 0040-61544 BUS BAR, SIDE PANEL FEED, PHASEB, CENTURA, 400A

1447 0021-38125 TUBE LIFT PLATE, SCREWED DOWN, DXZ

1448 0021-03733 CAP, RF, DXZ UNIVERAL

1449 0040-61543 BUS BAR, SIDE PANEL FEED, PHASEB, CENTURA, 400A

1450 0040-61545 BUS BAR, SIDE PANEL FEED, PHASEB, CENTURA, 400A

1451 0020-39499 RING, RTNR, SI INSERT RTP

1452 0190-75087 COVER, JA-FRAME SIDE PANEL CENTURA PHASE 2

1453 0021-13131 SIDE PANEL, BLANKOFF LOWER CENTURA PHASE

1454 0021-13132 SIDE PANEL, BLANKOFF UPPER CENTURA PHASE

1455 0020-33354 PLUG, CONNECTOR, RF

1456 0020-18597 CLAMP, FNL LINES, INTERRATION, ULTIMA, DXZ

1457 0040-75660 BRACKET, CHAMBER PNEUMATIC MOUNTING

1458 0040-02632 MANIFOLD, TALL, CENTURA MMF

1459 0040-02634 MANIFOLD, SHORT, CENTURA MMF

1460 0040-04109 COVER, FLOOR, CH A, SIN, CMF

1461 0020-76902 PANEL, BOTTOM EXTENSION FRAME CENTURA

1462 0020-76895 PANEL, SIDE EXTENSION FRAME CENTURA

1463 0020-06569 COVER, ENCL, PCB/MANIFOLD, SIN, CMF

1464 0020-20523 CAP, LAMP FEEDTHRU

1465 0020-23978 SHIELD TERM BLOCK 6-POS

1466 0020-23664 BOX CB 250A MOD GFI 3132

1467 0020-20816 PLATE, CASSETTE 200MM

1468 0020-24393 PANEL THROUGH CB MOUNTING

1469 0020-29078 BRUSHIN, GROUND

1470 0020-93159 COVER, BOX GFI CIRCUIT BREAKER 250 AMPS

1471 0020-29077 BUSHING GUIDE

1472 0020-27279 SHIELD TERM BLOCK 12 POS

1473 0020-24388 PANEL SUB-DOOR REMOTE AC (8) GFI CB

1474 0020-26452 BLANK OFF GFI CB

1475 0020-26487 COVER PLASTIC GFI SENSOR&CB SYS AC

1476 0040-42398 ADAPTER, GFI CB FOR NESLAB III

1477 0020-17584 BRACKET, FRONT UNIV FRM FLAT PNL DISPLAY STAND

1478 0020-78415 GUARD SPRAY 6LOAD CUP

1479 0040-77108 SUPPORT, 6CASSETTE TRAY

1480 0020-12813 BRACKET BPSG ASSEMBLY 2ND GAS CH A RTP C

1481 0020-39836 BRACKET,ADAPTER,H.O.T.,DETECTOR

1482 0020-10611 BLANK OFF PRS2 PORT

1483 0021-15991 BLANKOFF WATLOW, PROD S, SPLIT FRAME

1484 0020-31740 SCREW, VESPEL

1485 0021-01109 WINDOW, 200/300MM MANUAL

1486 0040-02922 PANEL FLOOR, SUPER E, POS A,MCE

1487 0040-02924 PANEL FLOOR, SUPER E, POS C #1, MCE

1488 0040-02925 PANEL FLOOR, SUPER E, POS D, MCE

1489 0020-05667 BRKT 4 PNEUMATIC VALVES ULTIMA HDP-CVD

1490 0040-75433 PANEL MAIN GAS PALLET ULTIMA HDP-CVD

1491 0040-75444 BAR, MTG, PALLET HDP-CVD

1492 0020-18709 PLATE, SINGLE VALVE MOUNTING .315 THK

1493 0021-35063 BRKT VERIFLO/NUPRO VLV, SLD

1494 0020-18383 BRKT THREE FINAL VALVES GAS PANEL LOW K

1495 0020-18382 BRKT TWO FINAL VALVES GAS PANEL LOW K

1496 0020-18381 BRKT SNGL VALVE STICK LOW K HDPCVD

1497 0020-18708 PLATE, SIDE PALLET ULTIMA HDP-CVD

1498 0021-06729 PLATE,SEAL, PDD CENTURA 5200

1499 0021-37080 SPACER, SERVICE LAMP

1500 0020-32049 CAP, VESPEL, ESC

1501 0040-62802 BRACKET, MOUNTING, 5-PHASE DRIVER

1502 0020-39837 BRACKET, SUPPORT ENDPOINT

1503 0020-42250 BLOCK EXHAUST PORT WXZ

1504 0020-42036 SHAFT, GROUND, CAP MANO PNL, WXZ

1505 0020-42128 PAD, SHAFT, WFR RCVRY

1506 0020-42252 BRACKET, VALVE, WXZ

1507 0021-03814 BRACKET, HANDLE WXZ LID.

1508 0021-02640 WINDOW, POLYCARBONATE, QRTZ LID WXZ, AXZ

1509 0020-42042 PANEL, DUAL CAP MANO BD, WXZ

1510 0040-75142 BRACKET, PNEUMATIC MANIFOLD CENTURA

1511 0021-02634 CLAMP, QUARTZ WINDOW, WXZ

1512 0020-76718 SEMI S2 H2O PANEL

1513 0020-37000 COVER, CIRCUIT BREAKER, 5KVA

1514 0020-76644 BRACKET(TRANSFORMER COVER1)

1515 0040-01484 COVER, TOP 5KVA TRANSFORMER PHII CONTROLLER

1516 0020-37077 BUSS BAR, 5KVA TRANSFORMER

1517 0270-09228 TOOL, PLATE LID, BAFFLE PURGE

1518 0270-09227 TOOL, PLATE, LID COVER, WXZ

1519 0020-18710 PLATE, BLOCK VALVE MOUNTING .315 THK

1520 0020-18384 BRKT BLOCK VALVE LOW K HDPCVD

1521 0040-01641 BRACKET, MTG CH. A, DPA, PRODUCER, 200MM

1522 0021-03413 COVER, DUAL AXIS DRIVER

1523 0021-18165 BRACKET W-OUT VLV SLD ENC PRODUCER SPLIT

1524 0021-18166 BRACKET W/OUT VLV SLD ENC SHORT PRODUCER SPLIT

1525 0040-83884 COVER PLATE EMO

1526 0040-40489 BRACKET, REAR LAMP TOWER, PROD S SPLIT F

1527 0020-42492 BLANKOFF NF3 GAS, 200MM PROD APF, PECVD

1528 0020-39604 BRACKET FJKN BV4 MANIFOLD

1529 0021-14501 BLANKOFF, EXHAUST DUCT, BOTTOM, PROD S,

1530 0021-18167 CLAMP W/OUT VLV SLD PRODUCER

1531 0040-16037 BRKT, MNTG, M/F ROBOT FRAME

1532 0021-76742 OUTRIGGER SUPPORT BAR SMIF INTERFACE

1533 0020-02319 PLATE, COVER, POWER SUPPLY FLAT

1534 0021-16887 COVER, VIEWPORT, TRANSFER CHAMBER

1535 0040-85041 PLATE, ADAPTER, 200MM GEN RACK

1536 0020-23931 PAD THIN POST COVER LIFT

1537 0020-04570 LARGE INLETMAIN AC ENCLOSURE

1538 0020-23932 PAD THIN POST COVER LIFT

1539 0040-86959 BRACKET LAKE FLOW METER

1540 0020-23035 CAM, RIGHT INBOARD

1541 0020-28371 ASSY, CONTROLLER/AC FRAME

1542 0020-23917 BRACKET CABLE COVER LIFT

1543 0040-20584 MIRROR POLISHED SST KICK PLATE

1544 0021-08111 BRKT, SOURCE PIN GUIDE, SIP CU

1545 0040-70213 PUSH BAR, ENDURA SHIPPING BUMPER

1546 0020-76388 TRIP BRACKET,INTLK,EXT PCII

1547 0020-20991 PANEL, BLANK TURBO CNTL

1548 0090-20430 PANEL ASSY, MFC ACCESS, (CH 2,1,C)E-CLE

1549 0020-21221 HOOP CD 200MM

1550 0040-43230 COVER, TRANSFER CH, HP ROBOT,

1551 0227-29405 ASSEMBLY, DUCT EXHAUST GAS PANEL

1552 0020-31081 PRODUCER TRANSFER CHAMBER

1553 0020-76598 PANEL-REAL MAIN AC FRAME, SEMI-

1554 0020-63929 BRACKET, CHILLER VACUUM

1555 0020-76599 PANEL-RIGHT MAIN AC FRAME, SEMI-

1556 0020-20993 PANEL TOP

1557 0020-76600 PANEL-LEFT MAIN AC FRAME, SEMI-

1558 0020-21046 COVER, FRONT

1559 0020-20588 COVER RF GEN PCB

1560 0020-25476 HUB INSULATOR HEATER ESC/HT

1561 0020-70767 BUSS BAR 400A, LEFT LINE MAIN

1562 0020-70768 BUSS BAR 400A, CENTER LINE MAIN

1563 0020-70769 BUSS BAR 400A, RIGHT LINE MAIN

1564 0020-70770 BUSS BAR 400A, LEFT LOAD MAIN

1565 0020-70772 BUSS BAR 400A, RIGHT LOAD MAIN

1566 0020-70771 BUSS BAR 400A, CENTER LOAD MAIN

1567 0021-02420 BRACKET ALIGNMENT RTP

1568 0040-03008 BASE RING DISPLAY COVER

1569 0021-03724 CENTER FIND FLANGE, COOLDOWN,

1570 0020-18288 SUPPORT, TURBO CONTROLLER, EBARA

1571 0020-18287 BLANKOFF, TURBO CONTROLLER, EBARA

1572 0020-19980 BRACKET, TURBO SUPPORT, HDPCVD ULTIMA

1573 0020-75759 BRACKET, CDA TTF FITTING MOUNTING

1574 0021-36142 BRACKET, SUPPORT, GAS LN

1575 0021-38136 COVER, PROTECTION, 150MM, ESC

1576 0020-20002 BUSS BAR GND

1577 0020-18789 BLANK-OFF GATE-VALVE BONNET PLATE ULTIMA

1578 0020-18617 CLAMP, TOP, GAS MANIFOLD, HDP-CVD, ULTIMA

1579 0020-18616 CLAMP, BASE, GAS MANIFOLD, HDP-CVD, ULTIMA

1580 0021-06770 SCREW, OUTER CAPTIVE, BPSG, RTP

1581 0040-38114 PLATE, MNTG, DPA SYSTEM INTERCO

1582 0040-37948 STANDOFF, M/F, DPA SYSTEM INTERCO

1583 0040-70159 STABILIZER LEG LEFT

1584 0040-70158 STABILIZER LEG RIGHT

1585 0020-39306 BRACKET, RACEWAY LINES

1586 0040-37310 COVER, DC POWER SUPPLY, AUTO

1587 0021-39361 BRACKET, PANEL, MOUNTING

1588 0020-39580 BRACKET, TOP/BOTTOM CLAMP

1589 0040-02923 PANEL FLOOR, SUPER E, POS B, MCE

1590 0020-33165 RING ADAPTER

1591 0020-04910 BRACKET, MAINFRAME NON-HEATED

1592 0020-05811 BRACKET, MNFRM, NON-HTD GAS LN

1593 0040-22415 PANEL MANIFOLD REAR WATER RF

1594 0021-45466 PRODUCER PILOT GIDE 2(RIGHT) 200MM

1595 0270-35187 WAFER, CALIBRATION OTF 200MM FRONT END

1596 0020-04680 COVER, FLOOR, D POS, OUTER, ULTIMA

1597 0020-05986 COVER, FLOOR A POS INNER, ULTIMA

1598 0020-06467 COVER, FLOOR REAR R, CH A,C,B, AND

1599 0020-14645 COVER, FLOOR, L/L B BACK, UNIV. CENTURA

1600 0020-18588 COVER, FLOOR, FLOOR, FACILITIES INNER

1601 0020-18582 COVER, FLOOR, C POS, OUTER, ULTIMA

1602 0020-32022 PANEL, FLOOR B POS, INNER, ULTIMA

1603 0021-09915 COVER, FRONT, LL B, #1, CENTURA DCVD

1604 0021-29290 COVER, FLOOR C POS OUTER ULTIMA

1605 0021-01928 COVER, BOX, CIRCUIT BREAKER, 250 AMP

1606 0040-60925 PLUG, UNIVERSAL SHIPPING, ALL

1607 0021-21469 RING RESTRAINT, 1.574 DIA SHFT

1608 0021-21470 RESTRAINT PIN, CERAMIC RINGS,

1609 0020-05749 ADAPTER, W/B LOADLOCK, ENDURA

1610 0022-77490 BRACKET

1611 0022-77491 BRACKET

1612 0020-31082 PRODUCER CH SHIPPING CLAMP

1613 0270-35098 TOOL, PROBE WRENCH, MOD II

1614 0020-40018 COVER DOOR SWMT

1615 0020-05750 PLUG, W/B LOADLOCK, ENDURA

1616 0020-20416 PANEL,BLANK-OFF,PLUG,RF GEN, CABINET

1617 0040-01338 SIDE CVR, LL B

1618 0040-01149 BRACKET, MOUNTING MAGNET TERMINAL

1619 0020-04039 COVER PLATE RF

1620 0021-09524 BLOCK, MOUNTING, GASLINE NYLON

1621 0020-31126 PLATE, MTG, PPS, POSN B & C, ASP

1622 0020-70525 SCREW LIFT HOOP HAYNES 242 PRODUCER

1623 0020-39500 HANDLE, MOLDED, PUMPING PLATE,

1624 0020-21366 SCR SHOULDER DC BIAS TIW

1625 0040-03146 STABILIZER/FRKLFT RAIL, EQUIPMENT

1626 0020-08730 PLATE DUAL VALVE MTG FUJIKIN VALVE

1627 0040-34572 DUCT, EXHAUST, PROD S, SPLIT FRAME

1628 0020-41227 FLAG Z-DIR INDEXER

1629 0020-23349 HUB HEATER INSULATOR

1630 0020-37985 SPACER, STUD PALLET MOUNTING

1631 0040-05783 BRACKET, LOWER FINAL LINES, CH. A/B, PRO

1632 0021-70160 PANEL, SIDE UPPER FRAME, FRONT,CENTURA

1633 0021-76434 PANEL, A/C FR, B/D RR COVER SIDE

1634 0021-76954 COVER, FLOOR, SIDE-FRONT, CENTURA

1635 0020-34276 COVER, REAR, SIDE, TEOS, CENTURA

1636 0021-36131 COVER, REAR, SIDE, RIGHT CENTURA

1637 0020-34280 COVER, MIDDLE, CENTER, CENTURA

1638 0020-76743 FOOTING, TEFLON, LID BRACKET

1639 0227-62331 KTI, WBLL CASSPLAFRM 200MM

1640 0040-13012 POST SUPPORT SPRING PLATFORM

1641 0040-76555 TRAY STORAGE WAFER DUMMY WBLL

1642 0021-36240 DELIVERY GAS LINE BRACKET

1643 0021-39990 SPACER SLOTTED INSYKATIR SHIELD

1644 0040-01785 CLAMP, H-BAR, DXZ, FLUORINE

1645 0021-06045 BAR, TEFLON, DXZ, FLUORINE

1646 0270-35354 JIG, CALIBRATION, ROBOT COLLAR

1647 0270-35355 TOOL, ROBOT/INDEXER CALIBRATION

1648 0021-37156 BRACKET, MAGNET POWER

1649 0021-04573 GAS BOX COVER

1650 0020-21485 PLATE CONTACT DC SOURCE 13 LEFT

1651 0020-21482 PLATE CONTACT DC SOURCE 13 RIGHT

1652 0020-07776 BRKT, MAINFRAME HV IND WIDEBODY

1653 0020-22577 BRACKET SYSTEM MANIFOLD INLET

1654 0020-27333 BLANK OFF ADV 101 HEATER BOX

1655 0020-76954 BRACKET CLAMP 1 1/2-2 1/2

1656 0020-25746 PAD 8 ZX HEATER DC BIAS

1657 0020-22548 PLATE BLANKOFF SHUTTER ARM

1658 0020-26829 CONNECTOR HEAT SHIELD HEATER

1659 0020-05678 SPACER, NON-HTD FRLN, CENTURA COMN. MF,

1660 0021-36627 CLAMP, SHROUD RACEWAY, PROC /VDS LINES

1661 0021-36819 PALLET SIDE DCVD CENTURA

1662 0020-18430 PALLET RIGHT SIDE EXTENDED DCVD

1663 0020-21035 BRACKET SOURCE WATER LINE

1664 0020-20156 PILLOW BLOCK SOURCE BRACKET

1665 0020-20617 BRACKET HANDLE

1666 0020-75204 BRACKET, CONDUIT MOUNT

1667 0040-13270 BLANKOFF, AC RECEPTACLE, CHAMBER

1668 0020-23633 VENT LINES BRACKET 3 OF 3

1669 0020-05683 COVER CHAMBER TEMPERATURE MONITOR

1670 0270-20088 TOOL PRE-CLEAN II 8" ROBOT ALIGNMENT

1671 0021-21857 PLATE, MOUNTING, PNEU CYL/MOTOR

1672 0060-76187 PC GUIDE COVER

1673 0020-21853 DC ACTUATOR SOURCE

1674 0020-18388 INSERT MO.10-32

1675 0020-18754 BRACKET, LOCK-OUT VALVES

1676 0020-47701 BRACKET CABLE CARRIER LGT STDF

1677 0020-44002 BRACKET CABLE CARRIER RGT STDF

1678 0020-18518 BRACKET, SWITCH, LID INTERLOCK

1679 0020-75735 WATER MANIFOLD 3 METAL BLADE

1680 0040-13002 PINCH COVER NARROW LLA

1681 0041-12399 PLATE COVER LOAD FLANGE,

1682 0020-20945 BRKT, SW MAG/H-SENSOR

1683 0020-18413 HINGE, COVER REV. 3, HDP-CVD

1684 0020-18855 SPACER, NON-HTD FRLN, CENTURA

1685 0020-12754 STUD CLEAN GAS FEED, HDPCVD ULTIMA PLUS

1686 0020-18375 BRACKET, BIAS MATCH SUPPORT, HD

1687 0020-10325 ENG HINGE BLOCK, LEFT ULTIMA

1688 0020-18798 BRACKET, LEFT DUAL GAS SPRING

1689 0020-18404 LATCH BLOCK, LID, HDP-CVD REV.3

1690 0040-39636 PANEL, DRESS LOADLOCK, 200MM

1691 0040-03135 BOX, BIOCON CONNECTION, 200MM

1692 0021-02688 CLAMP, CABLE, OTF FIBER MOUNT

1693 0021-06828 BRACKET, INNER, HOSE MOUNT

1694 0021-06827 BRACKET, OUTER, HOSE, MOUNT

1695 0021-06829 BLANK-OFF FAN SMIF ROBOT

1696 0021-06955 COVER, BIOCON, CONNECTION

1697 0021-76388 BRACKET UPPER, TALL MAN. MOD

1698 0020-05990 BRACKET, LOWER SHORT MANIFOLD

1699 0020-05989 BRACKET, LOWER TALL MANIFOLD

1700 0020-05988 BRACKET, UPPER SHORT MANIFOLD

1701 0020-18376 BRACKET, MATCH, HDPCVD REV 3

1702 0020-10324 END HINGE BLOCK, RIGHT ULTIMA

1703 0040-61153 CATCH, CHAMBER RACK, PROD

1704 0020-18799 BRACKET, RIGHT DUAL GAS SPRING

1705 0021-45464 PRODUCER PILOT GUIDE 1(LEFT) 200MM

1706 0021-45468 PRODUCER PILOT GUIDE 1(LEFT/RIGHT) 200MM

1707 0020-20587 INSERT, SLIT VALVE MACHINED

1708 0021-06956 PLATE, BLOWER MOUNTING, 200MM

1709 0020-53524 GAS LINE SUPPORT, ADJUSTABLE L BRACKET

1710 0040-50949 BRACKET SUPPORT, RPS HDP-CVD

1711 0020-75449 CHILLED WATER VLV BLOCK

1712 0270-04033 SUPPORT PLATE SPACER, SHIPPING U-FRAME

1713 0270-04034 SUPPORT PLATE, SHIPPING U-FRAME,

1714 0020-75450 BRKT, VALVE, CHMB B/D, CENTURA

1715 0020-13579 SHAFT WIDE BODY INDEXER

1716 0040-87410 ADAPTER, WIDE BODY INDEXER CMF

1717 0020-13607 BRACKET, TTF CLAMP HOLD,

1718 0020-60735 REFLECTOR MOUNTING GAUGE, LCF

1719 0020-08759 CLAMP HDPCVD ULTIMA 1.5

1720 0020-18949 COVER, SHIELD CATHODE BASE LIFT

1721 0021-02687 PLATE, OTF FIBER MOUNT, 200MM

1722 0020-40158 L/L GATE DOOR COVER BRACKET

1723 0020-70536 BRKT PCB TURBO INTERCONNECT

1724 0021-36731 BRACKET, NUPRO, N2 TURBO PURGE,

1725 0020-23237 PCB BOARD SENSOR MOUNTING PANEL

1726 0020-29015 CLAMP RING. 8 SNNF, SST, LOW

1727 0040-31834 EPD MONOCHROMATOR BRACKET

1728 0021-20152 CLAMP RING, 8 SNNF WITH SMALL

1729 0021-11269 AL COVER

1730 0040-09679 COVER AC ENCLOSURE THROTTLE/GATE VALVE

1731 0021-35802 BRACKET, MNFRM, NON-HTD GAS LN

1732 0040-20095 ALIGNMENT TOOL FROG LEG ROBOT

1733 0041-27525 LGB RETROFIT, TUBE SUPPORT, BASE

1734 0021-54455 LGB RETROFIT, TUBE SUPPORT, OUTER

1735 0021-54456 LGB RETROFIT, TUBE SUPPORT, MIDDLE

1736 0021-07575 PANEL, RF GENERATOR, ACG-6B

1737 3690-01986 CLAMP

1738 3320-01113 GSKT NEOPRENE 2.12OD X 1.32ID X .031THK

1739 0020-70596 THREELINE BUSSBAR 38HOLE

1740 0021-15894 PLATE, COVER, GPLIS, PROD S, SPLIT FRAME

1741 0020-09054 SENSOR BRACKET

1742 0020-09550 BRKT, GAS SUPPCY

1743 0227-99389 GAS LINE BRACKET

1744 0227-99390 PLATE VDS ASP PALLET

1745 0020-32431 JACK, CONN CLAMP, RF PLATE, ESC

1746 0020-46278 STUD, CRYO/GATE VALVE W/HEX SOCKET FOR W

1747 0020-13345 BLANKOFF, TURBO CNTRL ACCESS

1748 0020-20965 MAIN AC CXTENTION BRAKET PLATE

1749 0021-78969 SHIELD

1750 0020-34577 BLOCK, ROUND PIN RETAINER, R2 CHAMBER

1751 0040-01381 PALLET, 10 GAS LINE, GAS BOX, 31

1752 0040-06000 VIEW PORT ASSEMBLY, ULTIMA, HDP-CVD

1753 0020-21780 FLANGE, BLANKOFF ROTATION

1754 0020-21779 FLANGE, BLANKOFF CCD

1755 0020-26692 SPACER, HTHU UPPER, LIFT

1756 0040-75852 GENERATOR RACK CABLE SUPPORT

1757 0270-18073 COLLAR, 200MM ULTIMA HDP-CVD

1758 0040-05887 CATHODE BASE, TEMP MX, HDP-CVD, ULTIMA

1759 0040-00665 SHELF, INDEXER, SMIF FRONT END, PRODUCER

1760 0021-02691 BRACKET ROBOT SUPPORT LEFT

1761 0040-39310 BRACKET, SMART-COMM, 200MM SMIF-PRODUCER

1762 0021-03010 BRACKET CABLE CARRER LEFT

1763 0021-39833 BRACKET, SW, SMIF FEND, 200MM PRODUCER

1764 0021-02210 MOUNT, UPPER, END EFFECTOR, SMIF FRONT E

1765 0020-18898 COVER, DETECTOR WAFER MAPPING

1766 0020-21231 COVER, CONN

1767 0040-78191 SKIN UPPER RIGHT FLAT 200MM

1768 0020-36641 BRACKET STRAIN RELIEF UMBILICAL

1769 0020-36642 CLAMP STRAIN RELIEF UMBILICAL

1770 0020-39909 BRKT, LOWER SLD

1771 0020-37946 PLATE, SWITCH CONTACT

1772 0021-37180 COVER, BLANKOFF, ENCLOSURE GPLIS

1773 0021-37182 COVERM ACCESS, ENCLOSURE GPLIS

1774 0020-05240 SLD COVER, COMMON, EXHAUST

1775 0040-32637 PANEL, COVER BOTTOM ENCLOSURE

1776 0020-34777 PANEL, BOTTOM, ENCLOSURE GECO

1777 0010-75518 CASSETTE HANDLER LLB

1778 0010-75517 ASSY, 150MM CASSETTE HANDLER

1779 0020-05601 BRACKET, PHOTOHELIC GAUGE, GP

1780 0020-39908 BRKT, UPPER SLD

1781 0020-31663 BRKT, SYMMETRICAL COIL, LOWER

1782 0040-02938 GAS MANIFOLD REPAIR

1783 0021-04341 BLOCK GAS SPRING LID 200MM

1784 0020-39903 SIDE PANEL SLD

1785 0020-39904 SLD BLK VLV ENCLOSURE

1786 0020-13740 SHLDR SCREW 5/16-18*1L SLIT VALVE

1787 0020-40159 BRACKET, LOAD LOCK

1788 0020-34679 PANEL A, TOP, EXHAUST

1789 0020-21832 BRACKET RIGHT

1790 0020-22127 CATCH, SCREW LOCK

1791 0020-75678 PANEL TOP COVER CENTURA

1792 3810-01123 LONG SHAFT

1793 0020-27942 BRACKET CABLE VHP COVER LIFT

1794 0020-70588 SHIELD, FUSES SHUNT TRIP

1795 0020-29410 BUFFER CRYOPUMP LIGHT BLOCKING

1796 0040-18215 BRACKET, MTG, SEG 1 GAS LINES

1797 0021-11476 COVER CHMBR SET SERIPLEX INTERCONNECT

1798 0040-39720 FORELINE 2.3 W/CONVECTRON ADPTER

1799 0020-28315 SENSOR BRACKET SHUTTER

1800 0020-40779 LOAD LOCK DOOR CYLINDER BLOCK

1801 0040-21713 PANEL LIFTING FIXTURE RIGHT CVD

1802 0040-21714 PANEL LIFTING FIXTURE RIGHT CVD

1803 0040-21715 BRACKET, LIFT SUPPORT

1804 0020-37802 GAS BOX SIDE COVER

1805 0020-31595 INSULATOR, HINGE, UNIBODY COVER

1806 0020-05713 SPACER 1.0, FLN MAIN FRAME

1807 0020-07200 RACK PC COVER

1808 0020-22124 PLATE, HINGE MOUNTING

1809 0020-76833 COVER, PROT SMALL GEN RACK

1810 0020-70537 COVER PROTECTIVE, RF POWER SUPPORT

1811 0040-23466 BLANKOFF DC CONNECTOR VOR IMP

1812 0040-77232 PVC BRACKET

1813 0040-21335 SUB PANEL 3RD MONITOR PCB

1814 0040-06255 PANEL FRONT UPPER MANUAL W/LIGHT

1815 0020-17113 COVER, MOD, CATHODE BASE,

1816 0021-78970 BRACKET, ANGLE, CHASSIS

1817 0021-79251 CHASSIS SUPPORT, PS

1818 0021-20007 STUD, CORNER, AMPULE LIFTER CVD

1819 0040-03731 MNTG PANEL, 15 VALVES, MCE GP

1820 0020-75858 BLANK-OFF CENT. OTF, UPPER

1821 0020-10086 ENCLOSURE BOTTOM COVER

1822 0020-36603 COVER TOP LEFT REM AC BOX

1823 0020-36194 COVER 400A CB UPPER

1824 0021-76314 COVER, TOP RIGHT REMOTE AC

1825 0021-79492 BRACKET 2 KI FLOW VALVE PAD

1826 0021-10585 TC PLATE ASP

1827 0040-86872 HDLBAR, 1ODX5L, 3/8-16 2-END SS

1828 0020-18621 PLATE, TTF CENTER REAR, ULTIMA

1829 0040-54102 LID CHAMBER PRODUCER 200MM

1830 0020-18405 GAS PANEL REPAIR

1831 0020-42323 BRACKET, PNEUMATIC MANIFOLD COVER,

1832 0020-36132 PANEL COVER REMOTES DIST

1833 0040-04289 PVD GAS HEATER REPAIR

1834 0040-37594 SHAFT, PLUG, DXZ+ TOOL FOR

1835 0040-43698 SIDE DOOR

1836 0040-13219 COVER EMO, 480&208V CENTURA

1837 0040-13162 COVER DRVR SIDE, LOWER

1838 0040-13161 COVER, DRVR SIDE, UPPER

1839 0021-01769 BRACKET LOCKOUT VALVES(12)

1840 0020-78512 MOUNTING PLATE KI RECIRC SPRAY

1841 0020-78849 HOLDER SPRAY GUN KI WATER

1842 0020-18657 BRKT 1 FINAL VALVE FUJIKIN

1843 0040-32773 PALLET, SIDE, PROD S, SPLIT

1844 0021-76777 BRACKET, FUJIKIN BV1 VALVE

1845 0021-26980 BRACKET O3 DIVERT STICK SUPPORT

1846 0020-39603 BRACKET FUJIKIN BV3 MANIFOLD

1847 0021-13303 BAR, SIDE PALLET MTG SPCR, GAS

1848 0021-01918 BRACKET, LOCKOUT VALVE, GP

1849 0020-26321 INSULATOR, MAGNETIC SWITCH LIGHT

1850 0040-02198 PANEL, FLOOR, DPS CHBR POS A, MCE

1851 0015-35482 ENCLOSURE REMOTE A/C II,

1852 0040-22360 BRACKET, ISO AMP MODULE

1853 0040-39642 SIDE PAMEL REPAIR

1854 0021-01716 FRONT PANEL (LOWER)

1855 0260-46600 ULTEM CHAMBER RING SUPPORT

1856 0021-76017 PANEL SIDE COVER FRONT COMMON

1857 0021-64518 PIN, RESTRAINT, HTESC

1858 0022-77194 BASE PLATE INTERLOCK SLURRY

1859 0040-38576 PLATE, BLANKOFF INTERFACE

1860 0020-26191 RING 4 DUAL ROBOT

1861 0021-35822 CLAMP ASP

1862 3780-01106 SCREW HOLD POLISHING SPRING

1863 0020-20794 COVER, A/C DISTRIBUTION

1864 0020-29028 BUSS BARS, K1 LINE, RIGHT, 600A

1865 0020-29026 BUSS BARS, K1 LINE, LEFT, 600A

1866 0020-29027 BUSS BARS, K1 LINE, CENTER, 600A

1867 0020-29126 SCREW STUD REDUCER

1868 0700-01029 COIL WATER COOLING KIT SEIKO

1869 0020-10004 COVER, THROTTLE DRIVE

1870 0020-75448 PROTECTIVE COVER FRONT DRIVE

1871 0020-20232 LANGE, EXHAUST FAN

1872 0021-04572 GAS PANEL SIDE COVER

1873 0020-29975 RF CONNECTOR BAR

1874 0020-36472 PANEL BLANK 19 X 8.72

1875 0020-75998 BRACKET, SUPPORT, WBLL FASTER

1876 0270-77036 SHIPPING RESTRAINT MIRRA

1877 0040-22259 TOP COVER

1878 0020-76217 BRACKET BREAKER PANEL SUPPORT

1879 0021-10588 PLATE, INTERNAL PUMPIGN CHNL

1880 3480-01104 MOUNT LUL FT STUD 2.5DIA 5/8

1881 0270-01143 FICTURE FORK TUBE 200MM CLEANER

1882 0020-27408 SIDE COVER

1883 0021-79624 LEFT WALL MEGASONIC MESA 200MM

1884 0020-06029 BRACKET, ETI EMO SWITCH, TOP&BOTTOM

1885 0040-34937 PANEL, FLOOR, XFER, EXHAUST

1886 0020-79478 NUT PLATE, SLURRY VALVE CMP

1887 0020-79473 STAND SLURRY PUMP

1888 0021-19681 CMP COVER PLATE LIGHTED PROCESS

1889 0020-78127 PFA MANIFOLD(CMP)

1890 0020-78126 PFA MANIFOLD(CMP)

1891 0010-19457 COVER

1892 0040-09624 COVER, FRONT BRUSH MOTOR, MESA

1893 0020-20036 COVER, CHAMBER INTERCONNECT

1894 0020-77943 GASKET PAD CONDITIONER MOUNT

1895 0020-77457 BRACKET, BELT TENSIONER

1896 0040-75174 COVER, DRIVERS, LOWER

1897 0021-36716 BLOCK, MOUNTING, GASLINE, NYLON

1898 0021-35776 BRACKET, MOUNTING, PID CONTROLL

1899 0020-31478 VDS TEFRON RING

1900 0021-04658 PLATE VDS ASP PALLET

1901 0021-76932 COVER, BACK SLOT, 31 ENCLOSURE

1902 0020-12560 BRACKET, HORIZONTAL V-BLOCK,

1903 0021-04653 BRACKET 4 POSITION, ASP PALLET

1904 0040-09771 COVER, CHAMBER BODY, RIGHT, POS C, ASP

1905 0040-09772 COVER, CHAMBER BODY, LEFT, POS D, ASP

1906 0040-09632 COVER, LID, RIGHT, POSN C, ASP

1907 0040-09631 COVER, LID, LEFT, POSN C, ASP

1908 0040-09629 COVER KID, LEFT, POSN D, ASP

1909 0040-09681 COVER, CHAMBER BODY, LEFT, POSN

1910 0040-09630 COVER LID, RIGHT, POSN D, ASP

1911 0040-09684 COVER, CHAMBER BODY, RIGHT,

1912 0021-79631 COVER, SEC ENCL TOP

1913 0240-13076 KIT, VHP TRANSFER DRIVERS

1914 0040-06377 BRACKET, MAINFRAME HEATED GASLINE

1915 0040-01134 MOUNT RING

1916 0010-93010 ASS'Y, FAST COOL DOWN CHBR

1917 0020-30707 COVER, ELECTRICAL, H20 VDSII

1918 0021-03940 CLAMP, DOME, 200MM DPS E-DTCU

1919 0021-08118 WATER COVER, COOLDOWN, DPS 200

1920 0040-47496 PAN, INPUT UPPER DRIP PAN, 200MM

1921 0040-40602 DRAIN WETQUEUE TANK MESA SYSTEM

1922 0040-09537 COVER, ENCLOSURE, H20 VDSII

1923 0020-02221 CLAMP, VALVE, SHUTOFF, MDPS+

1924 0040-36872 GP DOOR INTERLOCK SWITCH BRACKET

1925 0050-31457 WATER LINE,LOWER CHAMBER,DPS

1926 0040-32136 CHAMBER BODY, ASP+

1927 0040-09558 LID, TOP, ASP

1928 0020-31554 ASP INTERFACE B/D COVER

1929 0020-31260 ASP ATM SWITCH BRACKET

1930 0021-10582 SPACER, TC ASP

1931 0020-34986 COVER, BELT, MOTOR DRIVE, THROTTLE

1932 0020-70604 PANEL BOTTOM RF GEN CABINET

1933 3300-03852 FTG ELBOW 90DEG MITERED 1"OD X 1.88L

1934 0021-37079 PANEL,FLOOR,DPS CHBR,POS"B",PH-II FAC

1935 0090-09171 ELECTRICAL ASSY, CATHODE MAINT., BACK

1936 0050-39339 PERISCOPE 1.50 BOTTOM DPS CHAMBER

1937 0040-09577 COVER,SAFETY,WAVEGUIDE, ASP

1938 0021-70282 COVER,BACK,CHMBR COOLING,DPS POLY

1939 0021-36242 SPACER, FRLN MNFRM

1940 0040-09525 ASP PUMPING PORT

1941 0050-10033 FTG 90DEG 7/16-20 TO # 1/4VCR ASP

1942 0040-09115 FEED THROUGH

1943 0020-31519 PLUNGER, INTERLOCK SWITCH ASP

1944 0050-10047 WELDMENT, 2 MANOMETER, ASP

1945 0020-10187 CLAMP RING Q WINDOW 200MM

1946 0020-31763 BRACKET SOLENOID MOUNTING ASP

1947 0020-31480 SPACER, MTG. HANDLE, ASP

1948 0040-09439 PLATE, FRAME, PRSP3

1949 0040-35483 BRK, CLAMP TOP LID, MXP CENTURA

1950 0040-09661 ENCLOSURE LAMP, COVER, POSN.D

1951 0021-10589 PLATE INTERNAL, PUMPING CHNL,

1952 0021-70281 COVER, FRONT, CHMBR COOLING

1953 0040-09401 SUBPLATE MTG, PREFIRE PWR SUP,

1954 0021-35823 FLANGE2 ASP

1955 0021-10854 ASP LIFT AMP BRACKET

1956 0021-36730 BRACKET, MAIN FACILITIES, DPS

1957 0040-09434 FRAME, CHAMBER I/F, PRSP3

1958 0021-36748 COVER, THROTTLE, 5 PHASE, DPS

1959 0050-75079 FORELINE 316L SST XFER CHAMBER

1960 0020-13126 COVER DC, LOWER G12, FLAME RETARDANT

1961 0010-01648 CLEAR LID ASSY, 200MM PRODUCER

1962 0050-75080 FORELINE 316L SST SHORT XFER CHAMBER SPO

1963 0021-36241 BRACKET, SUPPORT, GAS LN

1964 0050-76038 VACCUM LINE LLC B DIFF LOWER

1965 0020-31268 STANDOFF, CHAMBER, ASP

1966 0040-20031 ADAPTOR, ION GAUGE

1967 0021-03882 BRACKET FORELINE SUPPORT, PRODUCER

1968 0020-13652 CLAMP, VIEWPORT DETECTOR

1969 0020-75093 L/L VIEW PORT, WINDOW

1970 0020-40852 BRACKET

1971 0020-22066 COVER NEW BUSS-SYS AC

1972 0021-36632 PANEL,LOWER FLOOR,DPS CHBR,POS"C",

1973 0021-36634 PANEL,LOWER FLOOR,DPS CHBR,POS"D",PH-II

1974 0021-38019 PANEL, UPPER FLOOR, ASP CHBR, POS C,

1975 0021-38020 PANEL, UPPER FLOOR, ASP CHBR, POS D, PH-

1976 0040-76532 COVER ANALOG SYNC PWA, FAST WAFER MAPPIN

1977 0020-38183 COVER, PID CONTROLLER-R2 CHAMBER

1978 0020-38184 HEATSINK, SSR-PID CONTROLLER

1979 0040-35519 HOUSING, PID CNTRLR-R2 CHMBR

1980 0270-18038 BLANKOFF, REMOTE PLASMA PORT

1981 0020-18368 INSULATOR, RF POST, BIAS, HDP-CVD

1982 0020-18369 CONNECTOR, RF POST, BIAS, HDP-CVD

1983 0020-18370 INSULATOR, FEEDER, BIAS, HDP-CVD

1984 0020-18506 INSULATOR, BIAS RF MATCH ADAPTOR

1985 3690-04613 SCR SHLDR 5/16-18X.375ODX2.25L

1986 0020-18483 CLAMP, IR SENSOR STANDOFF

1987 0020-40691 SPACER, HINGE

1988 0020-18402 STANDOFF, LATCH KEEPER, HDP-CVD

1989 0020-18459 INSULATOR, TOP COIL, B2 MK2

1990 0020-18359 FLAG, SENSOR, LIFT, HDP-CVD

1991 0020-18360 FLAG, SENSOR, LIFT, HDP-CVD

1992 0040-02606 BRKT, CHAMBER PNEUM, MOUNTING

1993 0020-18499 CLAMP IV SENSOR/TOP COIL IN

1994 0020-18371 RF FEEDER, BIAS, HDP-CVD

1995 0040-39061 WELDMENT, BARATRON MANIFOLD

1996 0040-42755 PLATE, RPS MOUNT, ULTIMA+

1997 0020-18373 INSULATOR, PLUG, HDP-CVD

1998 0020-18306 SPRING BASE, REV. 3.2 RF QUICK

1999 0020-05656 MODIFIED FASTENER GND SHLD

2000 0020-18352 BOLT,MODIFIED, CATHODE, HDP-CVD

2001 0020-18353 BRACKET, LIFT, HDPCVD

2002 0020-18361 SCREW, SHOULDER, HDP-CVD

2003 0020-18363 SCREW, MODIFIED SHOULDER, HDP-CVD

2004 0020-40240 INSERT CHAMBER/FINGER THRU

2005 3060-01630 BRGBALL .253FT .625ODX.196W SST

2006 0020-18294 SCREW, MODIFIED , 1/4-20*.37

2007 0020-18544 STRIP2 SIDE COIL, UPPER CHAMBER

2008 0040-40173 HINGE RIGHT END

2009 0020-01926 BAND GROUND, TOP COIL, ULTIMA

2010 0020-18267 HALF RING THROTTLE VALVE HDP-CVD

2011 0020-18265 COVER, SHAFT THRU HDP-CVD

2012 0020-10703 SPACER, BRG THROTTLE VALVE TEOS

2013 0020-31531 SPACER WHSR THROTTLE VALVE

2014 0020-29959 PIN DOWEL .375 DIA 3.0 LG SST

2015 0200-18107 RF INSULATOR QUICK CONNECT, ULTIMA

2016 0020-18517 EXTENDER, SWITCH, LID INTERLOCK

2017 0020-61800 BRACKET, ACTUATOR, HDP-CVD

2018 0020-07515 COVER DRIVE THV ULTIMA HDP-CVD

2019 0020-33405 PLATE, MOUNTING THROTTLE VALVE

2020 0020-18380 HE BLOCK,D/F CATHODE, HDP-CVD

2021 0020-12753 STUD BLOCK CLEAN GAS FEED

2022 3040-01033 BALLPRCN5 / 16DI ASST

2023 0020-18759 COVER CURRENT TRANSFORMER

2024 0020-20524 HUB LEFT, CORNER COVER LAMP

2025 0040-40928 BRACKET ASSY, PROGRAMMABLE

2026 0020-13601 TRACKING, MOUNTING, FLOWETER

2027 0020-13605 BRACKET, MTG REGULATOR, NON TOXIC GASES

2028 0021-70165 BRACKET, TALL MANIFOLD CENTURA

2029 0021-09508 BULKHEAD, WATER, LOWER CHAMBER, COMMON, DPS

2030 0021-09614 PLATE, MOUNT, FLTNG JNT, MAIN CYL, DPS

2031 0020-34476 CLAMP, TOP, CYLINDER, DPS

2032 0021-09565 PLATE, END, CYLINDER, MAIN LIFT, DPS

2033 0021-36725 BULKHEAD, CATHODE, WATER, DPS

2034 0020-39930 SLD LEFT, RIGHT COVER

2035 0020-39906 BOTTOM PANEL SLD

2036 0020-37936 DIVIDER, ENCLOSUREGECO

2037 0020-39913 SLD DOOR

2038 0020-04193 CAPTIVE SCREW 1/4-20X1.25LG

2039 0020-31230 PLATE, MTG INTERCONNECT, PCB, H20 VDSII

2040 0020-31232 PIN, REGISTRATION, BLOCK, MFC HEATER, H20 VDSII

2041 0020-31233 WINDOW, FRONT SHELL, H20 VDSII

2042 0020-31234 WINDOW, COVER ENCLOSURE, H20 VDSII

2043 0020-31251 PLATE, MTG, NUPRO VALVES, H20 VDSII]

2044 0020-31262 PLATE, VESSEL SUPORT H20 VDSII

2045 0020-31277 PLATE, BASE, MFC HEATER BLOCK, H20 VDSII

2046 0020-31278 BLOCK, MFC HEATER, H20 VDSII

2047 0020-31481 SPACER, H20 VDSII

2048 0040-09473 BRKT, VESSEL-VAPOR OUT, H20 VDSII

2049 0040-09476 CLAMP, TC, VAPOR LINE, H20 VDSII

2050 0040-09481 BOX, ELECTRICAL, H20 VDSII

2051 0040-09511 SHELL, FRONT, VESSEL, H20 VDSII

2052 0040-09512 SHELL, REAR, VESSEL, H20 VDSII

2053 3690-02566 SCR CAPTIVE PANEL 8-32X7/16L SLOTTED FIL HD SST

2054 0021-09598 BRACKET, NUPRO VALVES, DPS

2055 0021-09599 BRACKET, MOUNTING, NEEDLE VLAVES, DPS

2056 0021-36719 BULKHEAD, WATER, LOWER CHAMBER, MAIN, DPS

2057 0040-32201 WELDMENT, SUPPORT, CHAMBER, DPS

2058 0020-40085 MOUNT, BRAKE INDEXER

2059 0020-40708 FLAG, Z DIR, INDEXER

2060 0020-31857 STANDOFF, CHAMBER, 1.50 X #10-32, ASP

2061 0021-38028 COVER, SHROUD, FR PANEL 29" GAS PANEL

2062 0020-09413 GUIDE-NUT, LIMT SWITCH

2063 0021-13223 BRACKET 4 BLOCK VALVES

2064 0021-36626 CLAMP, VIEWPORT, LOWER CHAMBER, DPS

2065 0021-36718 BRACKET, NUPRO, HE DUMP, DPS

2066 0021-36732 SHROUD, PINCH POINT, FRONT, DPS

2067 0021-09568 PLATE, RESTRANT, MAIN LIFT, DPS

2068 0021-09580 BLOCK, BRACKET, MAIN, LOWER CHAMBER, DPS

2069 0020-38363 SPINDLE, LIFT DPS CHAMBER SUPPORT

2070 0021-09586 BRACKET, INTERLOCK, SIDE DOOR, DPS

2071 0021-09597 BLOCK, NUPRO BRACKET, DPS

2072 0021-36144 SCREEN, VIEWPORT, LOWER CHAMBER, DPS

2073 0020-33779 HOUSING, BUSHING, HOOP LIFT, DPS

2074 0020-31122 PLATE, PRSP3

2075 0040-09584 CLAMP, TOP LID, ASP

2076 0040-35400 RAIL, MTG, GAS BOX, UPPER FRAME

2077 0040-00637 PANEL, CONNECTOR CENTURA CMF VR2

2078 0020-39912 SOLID SLD COVER TOP/BOTTOM FEED

2079 0020-70647 PLATE, MFC-STEC LINE, N2 PURGE

2080 0020-31770 STANDOFF, COVER, 1.02 X 1/4-20 ASP

2081 0040-70116 SIDE PANEL, CONTR/GENERATOR CABINETS

2082 0040-76288 SIDE PANEL, CONTROLLER/AC

2083 0021-03731 BRACKET, VALVE SUPPORT, CENTURA

2084 0021-09526 BLOCK, MOUNTING, WATER LIFT, DPS

2085 0041-04164 BRACKET, MTG, MAGNETRON, ASP, MXP

2086 0021-76326 PANEL, BOTTOM FEED AC, PHASE I, CENTURA

2087 0020-33565 HOUSING, BEARING, THROTTLE, DPS

2088 0020-34987 PLATE, MOUNTING, MOTOR, THROTTLE, DPS

2089 0021-09516 PULLY, 1/5 PITCH, 15 GROVE, 37WIDE BELT, 5PHASE

2090 0021-09581 BRIDGE, STRUT, DPS CHBR, POS "A"

2091 0021-01424 KEY, DOME CLAMP, ADAPTER, R1 DOME FOR RO

2092 0021-06063 END PLATE-AUTO HANDLER, 200MM UNIV

2093 0020-05142 GENERATOR RACK COVER 1

2094 0020-67683 GENERATOR RACK COVER 2

2095 0020-20775 COVER, CABLE BRIDGE

2096 0020-76785 GENERATOR RACK COVER 3

2097 0020-20418 GENERATOR RACK COVER 4

2098 0020-13963 WBLL BRKT, LED BOARD MOUNT, FAST WAFER M

2099 0020-10038 BRACKET SWITCH

2100 0021-09540 ACTUATOR, INTERLOCK, CATHODE

2101 0021-76320 COVER, MJ7 BRACKET, MAINFRAME

2102 0040-13605 BRACKET, DIFFERENTIAL TRANSMITTER

2103 0021-35560 BRACKET, INERT GAS POST, ETCH, COMM

2104 0021-37155 SPACER, TERMINAL BLOCK

2105 0040-13273 SIDE COVER, CHAMBER TRAY AC, CENTURA

2106 0020-76392 BRACKET, TERMINAL BLOCK AC ENCLOSURE

2107 0020-76393 PLATE, BLANKOFF, CENTURA CHAMBER FAC

2108 0020-76390 ENCLOSURE, AC, CENTURA CHAMBER FAC

2109 0021-04509 RECEIVER 200MM CASSATTE FOR PA200-8MHEI

2110 0040-03985 BRACKET, MTG, ENI RF GEN, ACG-6B

2111 0021-35571 PANEL, FLOOR, BLANK, FRONT, POS C/D

2112 0021-38017 PANEL, FLOOR, REAR DPS CHBR,POS A/C,PH-I

2113 0040-13250 COVER, FRONT DOOR, N.B. LLC, COND

2114 0021-09582 BRIDGE, STRUT, DPS CHBR, POS "B"

2115 0020-13282 PLATE, 120VAC, RECEPT, MOUNTING, CENTURA

2116 0040-46257 RECEPT, BOX, 120VAC MOUNTING, CENTURA

2117 0040-76367 CLAMP #2, SHROUD RACEWAY, HEATED PROCESS LN

2118 0020-22126 COVER LIFT PVD

2119 0020-52776 PLATE, HX. SUP. - RET. VALVE, CII, MMF

2120 0040-76368 MANIFOLD SHORT

2121 0021-09615 BUTTON, MOUNTING, HV FILTER

2122 0020-39489 CLAMP, CLUTCH, LID HINGE, DXZ PLUMPING

2123 0020-34317 SPACER, LEVELING PLTAE

2124 0021-02365 C-CLAMP, SACVD

2125 0020-33572 BOLT CAPTIVE 5/16-18X1.25L

2126 0021-70283 BULKHEAD, WATER, LWR CHMBR, DPS POLY

2127 0021-09604 SHROUD, PINCH POINT, BACK, DPS

2128 0021-76535 PANEL, A/C FR, B/D FR COVER SIDE EQ, MF

2129 0021-76309 COVER, DET. ADJUST ASSY, FAST WAFER

2130 0021-37078 PANEL, FLOOR, DPS CHBR, POS"A", PH-II FAC

2131 0021-01021 FLOOR COVER REAR MIDDLE, .19 THICK

2132 0021-35561 PANEL, FLOOR, XFER, EXHAUST

2133 0021-38018 PANEL, FLOOR, REAR DPS CHBR, POS A/C, PH-II FAC

2134 0021-35563 PANEL, FLOOR, XFER, N2 PURGE

2135 0010-30575 SIMPLIFIED LID ASSEMBLY, GIGA-FILL

2136 0021-09735 CHAMBER BODY, DXZ

2137 0021-06452 COVER, REAR PANEL, GPLIS II ENC

2138 0021-09613 BLOCK, MOUNTM MAIN LIFT CYLINDER, DPS1

2139 0021-36724 BRACKET, MOUNTING, PONTOON, FACILITIES, DPS

2140 0040-01246 TRAY, MCE CHAMBER

2141 0040-09472 BRACKET, N2/MID-FILL VALVES REMOTE

2142 0020-34477 CLAMP, BOTTOM, CYLINDER, DPS

2143 0021-36729 SLIDE, FACILITIES BRACKET, DPS

2144 0020-31162 SCR PAN HD 8-32X1/4 ALUM VENTED SLOT

2145 0020-40008 CLAMP, SHAFT BEARING

2146 0020-40084 HOLDER, WIPER INDEXER

2147 0020-40301 SHAFT, CAM FOLLOWER DOOR MECH

2148 0020-40359 RETAINER SPRING DOOR MECH

2149 0020-40360 LINKAGE CARRIAGE DOOR MECH

2150 0020-40716 CARRIAGE, LHS

2151 0020-40717 CARRIAGE, RHS

2152 0020-40729 STOP BEARING MOUNT LLC DOOR

2153 0020-40888 SUPPORT, CARRIAGE, LLC

2154 0020-41193 PLATE, SIDE, LHS DOOR ME

2155 0020-70558 TRACK LOAD LOCK DOOR MECHA NISM

2156 0030-40008 BRACKET, TRAVELING

2157 0021-35726 6GAS PANEL VALVE PLATE #1

2158 0020-37481 GAS PANEL VALVE PLATE #2

2159 0021-09515 PLATE, MOUNT, MOTOR, THROTTLE, 5 PHASE DPS

2160 0020-75037 STOP LL DOOR

2161 0040-75227 WB DOOR CYL SW MT BRACKET

2162 0020-13965 COVER WAFER MAP LED, FAST WAFER MAPPING

2163 0021-09503 CLAMP RING, DOME, DPS

2164 3690-03983 SCR CAP SKT HD 5/16-18X1-5/8L HEX SKT SST SP

2165 0021-09506 MOUNTING RING, DOME, DPS

2166 0021-37886 LOCK, BALL-END LEVELING STUD

2167 0021-34288 BRKT MTG PLATE DISK DRIVE

2168 0021-34289 PNL FRONT DISK DRIVE

2169 3060-01076 BRG BALL 1/2ODX1/4IDX3/16W 1ROW FLGD

2170 0020-38813 PLATE IDENTIFIER EV#2

2171 0021-70046 YOKE, LEFT, ENP CENTURA LID LIFT D.E ROBOT

2172 0021-70047 YOKE, RIGHT, ENP CENTURA LID LIFT D.E ROBOT

2173 0020-37483 BRKT, #11, GAS BOX, MXP CENTURA

2174 0020-26912 BRACKET CABLE MOUNTING ENDURA LID

2175 0040-09536 ENCLOSURE, DRIP PAN, H20 VDSII

2176 0020-33991 CHASSIS, TOP COVER, P/C END POINT 19 RACK MNT

2177 0020-01925 BAND TOP COIL/IV SENSOR, ULTIMA

2178 0020-01927 CLAMP TOP COIL, UPPER CHAMBER, ULTIMA

2179 0020-01928 CLAMP PLATE UPPER CHAMBER, ULTIMA

2180 0040-01330 LL BLKHD COVER BRKT

2181 0010-93287 ASSY, FAST COOLDOWN CHAMBER, CENTURA

2182 0040-04738 LID, TRANSFER CHAMBER W/RELIEF, VHP

2183 0190-10673 ASSEMBLY, SIGNAL TOWER WITH BUZZER

2184 0040-02569 PANEL, FLOOR, DPS CHBR POS C #1, MCE

2185 0040-02568 PANEL, FLOOR, DPS CHBR POS B, MCE

2186 0021-38022 PANEL, UPPER FLOOR, DPS CHBR, POS D, PH-II FAC

2187 0040-02570 PANEL, FLOOR, DPS CHBR POS D, MCE

2188 0020-13063 EMC COMP., PANEL REMOTES DIST

2189 0020-11625 SCREW, PIVOT, BARRIER SLIT VALVE

2190 0021-36722 ENCLOSURE CATH MAIN BACK LEFT DPS

2191 0020-15683 PLATE, THROTTLE VALVE, BLANK-OFF, METAL

2192 0150-09099 HARNESS ASSY LIMIT SW

2193 0040-01110 MOUNT DOOR TRANSFER SLIT VALVE

2194 0040-01143 BRK, AC BOX SUPPORT CENTER, MCECHMB

2195 0040-01572 BRK, AC BOX SUPPORT SIDE, MCE

2196 0020-35057 INSERT, LLA & LLB SLIT V

2197 0020-20672 PLUG, CHAMBER, MONOLITH INTERFACE

2198 0020-22551 COLLIMATOR, BRACKET GUIDE SOURCE

2199 0040-00889 PIVOT SLIT VALVE

2200 0020-13968 BRACKET, CONN WFR SENSE VHP ROBOT

2201 0040-34938 PANEL, FLOOR, CABLE M/F

2202 0040-04750 CHBR LID, CLEAR, COOLDOWN, DPS 200MM

2203 3690-03579 SCRCAP SKT HD M10X65MML SST SLVR PLT

2204 0020-06461 COVER, FLOOR REAR L, CH A,C,B, AND/OR

2205 0020-18776 COVER, FLOOR L/L A, BACK, UNIV, CENTURA

2206 0020-18579 COVER FLOOR, FLOOR D POS, OUTER, ULTIMA

2207 0020-18779 COVER, FLOOR, D POS, OUTER, ULTIMA

2208 0020-25631 COVER CLEAR POS A/B

2209 0021-10474 BRACKET ENDPOINT/PYROMETER

2210 0040-03730 COVER, U-SHAPE, 15 GAS SLD BOX, MCE

2211 3780-02253 SPR GAS 8 STROKE 300LBS #14

2212 0020-23643 SUPP MIRROR SUPPORT

2213 0020-23644 MNT SENSOR MOUNT

2214 0020-23645 CLMP MIRROR CLAMP

2215 0020-23646 HOLD WINDOW HOLDER

2216 0020-23804 PLTE PLATE BACKING MIRROR

2217 0020-29001 CLIP, RETAINER W/TANGS, MIRROR

2218 0015-35236 STRIKE, LATCH, DOME, DPS

2219 0021-04276 COVER

2220 0020-05888 PLATE, AC BOX SPLASH GUARD, CENTURA II

2221 0040-03713 RING, MOUNTING, DOME, ES DTCU, POLY DPS

2222 0021-36728 BRACKET, BULKHEAD, CATHODE WATER, DPS

2223 0040-13013 FLANGE 316SST XFER CHB FORELINE LINE, CE

2224 0020-40117 PLATE, BLOCK OFF 1/40 DIA TRANSFER CHAMBER

2225 0020-31771 STANDOFF, COVER 1.00X10-32, ASP

2226 0020-45220 INSERT, DETECTOR VIEWPORT

2227 0020-75733 BRACKET, SENSOR MOUNT

2228 0020-75732 COVER, SENSOR BRACKET

2229 0040-13624 PANEL ASSY, SIDE COVER W/DOOR CMF RIGHT SIDE

2230 0021-76399 PANEL ASSY, SIDE COVER MIDDLE CMF, LEFT SIDE

2231 0040-13625 PANEL ASSY, SIDE COVER W/DOOR CMF LEFT SIDE

2232 0021-76398 PAENL ASSY, SIDE COVER MIDDLE CMF, RIGHT SIDE

2233 0021-76322 PANEL, SIDE COVER, REAR COMMON MF

2234 0021-39241 COVER TOP SHROUD GAS PANEL

2235 0010-20334 ASSS NARROW BODY LL DOOR COVER

2236 0020-13964 COVER WAFER MAP LED-NB, FAST WAFER

2237 0020-76912 NBLL BEKT LED BOARD MOUNT FAST WAFER MAPPING

2238 0021-09499 CLIP, INTERLOCK, SIDE DOOR, DPS

2239 0021-39160 STATOR UPPER DTCU DPS

2240 0020-33782 HOOP, 8 INCH, WAFER LIFT, DPS

2241 0040-13691 PANEL, CONVENIENCE OUTLETS, CENTURA MAINFRAME

2242 0040-13269 AC ENCLOSURE, FACILITIES TRAY, CENTURA

2243 0020-05941 BRACKETBIASGENLEFT,MCEDPS

2244 0040-02526 BRACKETFACEPLATE,RFGENRACKDPSPLUS

2245 0020-75202 BLANKOFF, CH TRAY INTERCONNECT PCA COVER

2246 0020-33329 BLOCK, CLAMP

2247 0020-37221 BAR GROUND POSITION, CHAMBER TRAY

2248 0020-20774 COVER, ACCESS RF GEN CABINET

2249 0020-20771 COVER, LOWER BOX CIRCUIT BREAKER

2250 0020-20498 COVER, BOX, CIRCUIT BREAKER - 250 AMP

2251 0021-04632 SHELF, EQUIPMENT, MCEGENERATORRACK

2252 0020-54896 BRKT, RF HARMONIC FILTER, DPS CHAMBER

2253 0020-37993 BKT LOCKOUT VALVES 5200

2254 0040-02396 COVER, THV DRIVE, ULTIMA HDPCVD

2255 0040-01093 BRACKET, MJ7 PC BOARD, CENTURA MMF

2256 0020-13518 FLAG, Z HOME, W/ DUMMY CASSETTE

2257 0040-38403 DOOR, LEFT, 31 GAS PANEL

2258 0040-38404 DOOR, RIGHT, 31 ENCLOSURE

2259 0020-18879 SCREW, PIVOT, BARRIER SLIT VALVE, ULTIMA HDP-CVD

2260 0040-61297 WELDMENT, HEAT EXCHG ASSY, HR DTCU, DPS

2261 0020-04788 SHROUD, FACILITIES & I/O, CENTURA MMF

2262 0040-39539 BRACKET, COMMON INTERLOCK PCB

2263 0020-21886 FLAG, Z HOME

2264 0020-28316 INSULATOR SHUTTER SENSOR BRACKET

2265 0020-24779 FLAG SENSORS SHUTTER LINKAGE

2266 0010-21100 LLA DOOR COVER ASSEMBLY

2267 0010-21101 LLB DOOR COVER ASSEMBLY

2268 0020-24514 TOP COVER , FRONT, LOADER INTER CONNECT PCB

2269 0020-20900 TOP COVER PNEUMATIC

2270 0020-10111 TOP COVER CONVECTTON GAUGE

2271 0020-24515 TOP COVER, REAR, LOADER INTERCONNECT PCB

2272 0020-20034 TOP COVER, SYSTEM POWER DISTRIBUTION

2273 0040-13527 OBS, CHAMBER ORIENTER DEGAS NO BLANKOFF

2274 0020-23479 PLATE MNTG PNEUM CYL/MTR LFT

2275 0020-23639 STUD MOUNTING MOTORIZED LIFT

2276 0040-40854 COVER CHAMBER TOP HDP-CVD ULTIMA 1.5

2277 0040-38460 DUCT EXHAUST GP

2278 0040-42260 STAND OFF, SHORT TOP AE

2279 0040-42261 STAND OFF, TOP AE, 200 ULTIMA PLUS HDP-C

2280 0040-96317 ADAPTER BRACKET, TECO PLC

2281 0190-07662 ROLLER PLATE ASY SMIF INTERFACE CENTURA

2282 0020-10162 DIFFUSER 200MM

2283 0020-25693 CLAMP HEATER 1.18 DIA SFT PNEU/MTR LIFT

2284 0020-76430 SIDE PLATE UPPER FRAME CENTURA 5200ST

2285 0040-22202 SPACER, PILLOW BLOCK, VECTRA IMP

2286 0021-37167 MANIFOLD , UPPER, DPA

2287 0021-10429 MANIFOLD, LOWER, DPA-SHRINK

2288 0040-20136 MANIFOLD, SOURCE SWIVEL WATER

2289 0040-22487 FINGER EXTENDED LIFT HOOP 8" B101

2290 0020-29328 BLOCK, MAGNET HOLDER, RH-1, RH-2

2291 0020-20274 CLAMP HOLDER, SOURCE

2292 0021-13892 ADAPTER, THIN,.031, ORIENTER, NARROW HOOP

2293 0040-06542 SEIKO SEIKI CONTROLLER PLATE, ULTIMA

2294 0200-28867 SHUTTER DISK

2295 0020-22950 ADAPTER, COLLIMATOR SOURCE 13

2296 0021-35824 BRKT, ASP

2297 0040-32135 ASSY, HOUSING, ASP

2298 0020-34225 PLATE IDENTIFER EV#1

2299 0020-34454 MANIFOLD BRACKET

2300 0040-35428 ENCLOSURE, UPPER, SLD, METCH

2301 0242-28552 KIT, SIGNAL TOWER, WITH BUZZER AND RED LIGHT

2302 0040-32203 HOUSING, OUTER, CATHODE BULKHEAD, DPS

2303 0021-09448 ADAPTOR, BULKHEAD, 3/4-20

2304 0021-09451 CLAMP, GROUND, TOP, CATHODE, BULKHEAD, DPS

2305 0021-09547 RETAINING RING, CABLE, CATHODE, DPS

2306 0021-09591 PLATE, GROUND, TOP, CATHODE BULKHEAD, DPS

2307 0021-09630 SHIELD, GROUND, 200MM CATHODE, DPS

2308 0021-09612 BOX, CONDUIT HOUSING, DPS

2309 0021-09620 COVER, CONDUIT HOUSING BOX, DPS

2310 0021-09621 INSULATOR, CONNECTOR OUTPUT, DPS

2311 3870-02561 VALVE GATE HEATED & SHIELDED 208VAC 300W

2312 0020-24727 PLATE, SPACER 101%

2313 0020-19150 CLAMP, LEFT, INTGR GAS LINES, DPS 2

2314 0040-09635 EPD BRACKET

2315 0040-44182 LID PLATE, STD LLB SWLL, CENTURA AP

2316 0021-09511 INSULATOR, CATHODE BASE, 200MM, DPS

2317 0020-97663 SCR FLAT HAED,10-24 X .50L,25L THD,ANODIZED ALUM

2318 0190-16073 SIGNAL TOWER

2319 0010-10558 P/C END POINT MODULE COVER ASSY -19" RACK MNT

2320 0040-35475 PLATE LOCKOUT SWITCH OPENING CENTURA

2321 0242-12097 KIT, RIGHT STEP, CHAMBER FRAME,DPS-II

2322 0040-75853 BRACKET PC BOARD SMIF INTERCONNECT

2323 0040-75860 COVER PC BOARD SMIF INTERCONNECT

2324 0040-00905 COVER, BOTTOM MODULE, NITRIDE550

2325 0040-00902 HOUSING, BOTTOM MODULE, NITRIDE550

2326 0090-36228 JUMPER ASSY

2327 0020-33773 HOUSING, BUSHING, CATHODE, DPS GECO

2328 0020-38790 HOUSING, BOTTOM CONNECTOR

2329 0020-38792 STRAIN RELIEF COVER

2330 0040-61947 BRACKET, CATHODE PNEUMATIC

2331 0021-38035 TUNNEL, LOWER, GAS PANEL 31" 1

2332 0021-38036 COVER, SHROUD, FR PANEL 31 GAS PANEL

2333 0020-76000 FLAP, THROTTLE

2334 0021-70086 COVER KICK PLATE SMIF STD CENTURA I/F

2335 0040-76394 PANEL, MF CONVENIENCE OUTLETS CENTURA

2336 0020-31423 CLAMP, SWITCH, ETCH UNIBO

2337 0020-35472 VME BOARD BLACK COVER

2338 0020-70095 WINDOW A, LID, 29 POSN STOR ELEV

2339 0040-09548 COVER, WINDOW, SIDE SHIELD, UPPER, UNIVERSAL

2340 0040-09560 COVER, WINDOW, SIDE SHIELD, LOWER, UNIVERSAL

2341 0020-37736 CLAMP, CLAW SERVICABLE, GATE VALVE

2342 0040-38864 BELLOW HOUSING, N SK THROTTLE VALVE, DPS

2343 0040-35375 WBLL FRONT PANEL

2344 0021-76390 BRACKET LOWER, SHORT MAN. MOD CMF

2345 0020-05653 TOP MOUNT, UPPER VENT SUPPORT, 1 OF 2

2346 0020-05654 LOWER MOUNT, UPPER VENT SUPPORT, 1 OF

2347 0040-31954 ADAPTER, GV, BOTTOM CHAMBER, POLY, DPS-A3

2348 0020-17365 HEATSINK BUSHING

2349 0270-00289 TOOL ZERO POSITION DUAL BLADE ROBOT

2350 0021-36726 INSULATOR, BULKHEAD, CATHODE WATER, DPS

2351 0021-36727 COVER, BULKHEAD, CATHODE WATER, DPS

2352 0021-02450 BRACKET, MTG CABLE CONNECTOR ASP+

2353 0040-09574 BRACKET, MTG DISPLAY BOARD ASP

2354 0040-02831 H-12 COIL, ES DTCU, DPS

2355 3780-02423 SPR CPRSN 1.000L X .42OD X .048 WIRE-DIA SST

2356 0010-76700 SUB-ASSEMBLY, ASP HINGE

2357 0040-45770 HOLDER, LASER DIODE

2358 3300-02263 FTG RLF VALVE VENT APTR CRYOPUMP AL

2359 0040-01334 BRKT, PRESSURE SWITCH

2360 0040-01060 ENCLOSURE, I/ODIST BOARD, VME2GPCONT

2361 0020-22979 PLATE CONTACKET DC RIGHT TIN 8" WAFER

2362 0020-29079 GROUND STRIP

2363 0015-01644 POLE, 90 DEGREE ELBOW

2364 0020-40044 CLAMP,BASE 150MM/200MM

2365 0020-76993 COVER DC, LOWER, FLAME RETARDANT

2366 0190-01189 0190-01189 SENSOR FITTING SET

2367 0040-02544 CHAMBER, UPPER, FULL A-COAT, SEALED ON ANODIZE

2368 0040-35419 ENCLOSURE, GAS BOX, MXP CENTURA

2369 0021-02162 BLANKOFF, BACK SLOT, 31" GAS BOX, CENTURA

2370 0020-05008 PLATE TTF SHROUD PANEL, CENTURA MMF

2371 0040-79252 DOOR, LEFT, 31" GAS PANEL

2372 0040-79253 DOOR, RIGHT, 31" ENCLOSURE

2373 0020-05068 PLATE, HX. SUP. - RET. VALVE. CII, MMF

2374 0020-76522 PIN, DOWEL FRAME ALIGNMENT

2375 0240-75812 8" ORIENTER/DEGAS COLLIMATOR

2376 0040-00738 CLAMP, DTCU LIFT

2377 0040-02750 CLAMP, DTCU LIFT (Metal)

2378 0040-02945 COVER, IO BOX, DPS E-DTCU

2379 0200-10296 INSULATOR,BULKHEAD,CATHODE,DPS

2380 0020-34482 INSULATOR, FEED, BULKHEAD, CATHODE, DPS

2381 0020-38923 ENDPOINT PLUG, DPS

2382 0020-32929 COVER, OVERTEMP MONITOR, ASP

2383 0040-09396 BRACKET, MOUNTING HINGE, PRSP

2384 0040-09397 HINGE, CHAMBER, ASP

2385 0020-09263 COVER, REAR

2386 0021-39395 COVER BOX 1-CONNECTOR, C-HX CABLE

2387 0021-02748 BRACKET SWITCH

2388 0040-75851 KICK PLATE SMIF STNDARD CENTURA INTERFACE

2389 0021-36239 BRACKET, CATHODE, MAINT, DPS CENTURA

2390 0020-31772 STANDOFF, COVER 1.88*1/4-20, ASP

2391 0020-36418 NUT, CLAMP TRASNFER CHAMBER

2392 0020-36419 CLAMP TRANSFER CHAMBER

2393 0010-39869 ASSY, ACTUATOR COVER, SLIT LINER DOOR

2394 0040-75661 SUPPORT, SMIF INTERFACE, CENTURA MF

2395 0021-09546 LUG, GROUND, CATHODE, DPS

2396 0040-32437 WELDMENT, GAS PANEL EXHAUST

2397 0040-76420 ENCLOSURE, FLOW METERS

2398 0021-35564 PANEL, FLOOR, CABLE M/F(0040-34938동일)

2399 0040-76557 PLATE BASE PLATFORM WBLL CMF CENTURA

2400 0020-21827 TOP DETECTOR HOUSING

2401 0020-21828 BOTTOM DETECTOR HOUSING

2402 0020-21831 BRACKET LEFT

2403 0040-01487 BRKT 8 POSITION, TB MOUNT CENTURA

2404 0021-35567 COVER, GAGES, CDA

2405 3940-01044 RACK FRONT COVER

2406 0270-35134 ASSEMBLY, VIEW LID, TXZ

2407 0015-20035 SCREW INSULATOR

2408 0020-28952 MOUNTING BRACKET 9RIGHT, LIGHT)

2409 0020-20676 COVER PRECLEAN/COOL DOWN MONOLITH

2410 0020-22910 BELLOWS (TC) TYPE

2411 0021-20369 LIFT SHAFT (TC)

2412 0040-22746 BLOCK MOUNTING 1.18" DIA SHAFT MOTER LIF

2413 0020-22361 TC BOX PLATE

2414 0690-01580 CLIP RETAINING 13MM

2415 0020-25342 HTHU 6 HOOP

2416 0020-26900 HEAT SHIELD HTHU HEATER RIGHT

2417 0020-24839 SPACER, HTHU LOWER LIFT

2418 0020-25227 ADAPTER, HTHU LIFT

2419 0010-21393 ASSY, SHUTTER ROTATION, LINKAGE

2420 0020-21675 ARM LIFTER DEGAS/ ORIENTER

2421 0020-21708 CHUCK 8" SEE

2422 0020-21707 ORIENT CH# LIFTER 8

2423 0040-32213 Bracket 6

2424 0021-09587 COVER, CHANNEL, PONTOON, FACILITIES, DPS

2425 0040-32214 Bracket 7

2426 0040-75414 SADDLE, TRANS, LAMP TEST, RTP

2427 0020-75360 PLUG, BUSHING, LASER

2428 0030-20012 COVER PLATE LASER

2429 3300-03893 FTG TBG CONN BLKHD 1/2T 3/4-16 MALE W/

2430 0020-31017 BUSHING TERMINAL BWCVD

2431 3580-01021 Hex Plug

2432 0020-34430 COVER,BACK,CHAMBER COOLING,DPS MEC

2433 0020-34429 COVER,FRONT,CHAMBER COOLING,DPS MEC

2434 0015-09405 PULLEY,MOD,.313 BORE,WXZ

2435 0020-13283 Phase 2 M/F 110V AC Box

2436 0020-23971 Hoist Controll Panel

2437 0020-21735 COVER PRECLEAN

2438 3300-02260 FTG TEE 2.75 CONFLAT SST 2.75 X 2.46

2439 0040-20033 ADAPTOR TURBO/PRECLEAN INTERFACE

2440 3940-01045 PNL FRONT 19" RACK 1.72 H ANODIZED

2441 0010-39202 MULTI-SLOT COOLDOWN CHAMBER 8"

2442 0021-35922 CHAMBER BODY, TXZ MCVD

2443 0040-37668 GAS BOX, TXZ ENH COOLING

2444 0021-03811 INPUT MANIFOLD TXZ 200MM CIP

2445 0021-39915 MANIFOLD WATER DXZ/TXZ

2446 0020-33341 RF Cap

2447 0021-39883 OUTPUT MANIFOLD, TXZ CIP

2448 0040-39566 LIFT PLATE

2449 0021-39894 LID STRAP, RP

2450 0020-76362 Turbo CNTRL Bracket

2451 0020-34616 STOP,ACME NUT DXZ

2452 0040-09829 ASP Lid Cover

2453 0021-09554 COVER,CONNECTOR,INTLK,OUTPUT,DPS

2454 0021-35897 ENCLOSURE, INTLK, TC AMP, TXZ MCVD

2455 0020-23160 BRKT WAFER SENSOR SM312CV2 MONOLITH COVE

2456 0021-08062 Gas Line Hdder

2457 0040-35736 GAS BOX BRACKET PALLET

2458 0020-29342 NUT RF FEEDTHRU .250 WIDE VECTRA IMP

2459 0010-70271 101 WAFER LIFT ASSY

2460 0020-37482 BRACKET,DUAL V-BLOCK,UNIVERSAL ETCH CENT

2461 0020-20433 VIEWPORT CLAMP, ORIENTER CHAMBER

2462 0020-22939 BRACKET,GAGE SOURCE WATER LINE

2463 0020-29303 BRACKET, SOURCE GUIDE, VECTRA IMP

2464 0020-27135 Actuator Shutter

2465 0021-20444 MOUNTING LEFT BRACKE

2466 0021-20445 MOUNTING RIGHT BRACKE

2467 0020-21232 CATCH BAR

2468 0021-09571 DPS Teflon Insulator

2469 0020-28673 Gas Box Both Side Cover

2470 0021-36744 SHIELD GROUND 150MM CATHODE DPS

2471 0020-34972 HOOP 6 INCH WAFER LIFT DPS

2472 0010-76322 ASSY., COOL DOWN CHAMBER, NON-ENP

2473 3300-02884 Lower chamber water block end-cap screw

2474 0020-13975 L/L Wafer Present&Slid Sensor Braket_B(Wide)

2475 0020-13973 L/L Wafer Present&Slid Sensor Braket_A(Wide)

2476 0010-20292 Wafer Detector Module (Not include board)

2477 single slot Fast cooldown chamber assy

2478 0020-40017 Load Lock Door Sensor Cover

2479 0020-20566 COVER, TRANSFER CHAMBER, MONOLITH

2480 0090-09170 ELECT.ASSY,CATH.MAIN.,BACK RIGHT,DPS

2481 0010-36325 DPS 208VAC Distribution BOX

2482 0040-20006 ARM,WELDMENT SOURCE STD OBSOLETE

2483 0021-35920 HOUSING,RF ADAPTER,TxZ MCVD

2484 0040-21253 ENDURA NSK DRIVER BOX

2485 0045-20002 Actuator Shutter Clamp

2486 0020-24771 COUPLER 4 BAR LINKAGE SHUTTER LINKAGE

2487 0045-20003 CLAMP MAGNETIC COUPLING SHUTTER LINKAGE

2488 0020-24776 PIN PIVOT SHUTTER LINKAGE

2489 0020-24778 MOUNTING BRACKET SENSORS SHUTTER LINKAGE

2490 0020-25370 CLAMP OPTO SENSORS

2491 0020-28255 Shutter Enclosure

2492 0020-24781 Actulator Shutter Support

2493 0020-75293 bracket(transformer cover2)

2494 0020-76181 COVER, COOLDOWN CHAMBER, NON-ENP

2495 0020-35982 box(ac filter box)

2496 0040-09663 COVER,PREFIRE POWER SUPPLY, ASP

2497 0020-31288 ADAPTER, TOP LID, 25MM PRSP3

2498 0020-76403 ENCLOSURE, 208V OUTLET BOX, CENTURA

2499 0010-05955 ASSY, POST CHAMBER

2500 0040-09404 M-Lamp power supply box bracket

2501 0040-09583 BRKT,CLAMP TOP LID, ASP.

2502 0040-09396 ASP Lid Hinge Set

2503 0040-09574 ASP LED Display BD Box

2504 0021-35820 ASP Wafer Lifter Hoop

2505 0021-10589 ASP CH# Pumping Plate

2506 0010-76471 Left Handler Reflector Cassette

2507 0020-09723 TC AMP BD Block Plate

2508 0040-22812 RF ENCLOSURE CABLE INTERLOCK COVER

2509 0021-37094 R1-DTCU TOP RING

2510 0021-37086 R1-DTCU COIL SUPPORT KIT

2511 0227-25150 BLANK-OFF,POSITION E & F,LEXAN,CLEAR

2512 0020-36131 Connector Plate

2513 0020-34453 CARD CAGE ENCLOSURE

2514 0020-33811 COVER,SIDE,LOWER CHAMBER,DPS MEC

2515 0020-75740 Load Lock Out Of Wafer Sensor

2516 0020-22739 CASSETTE SUPPORT

2517 0090-00147 Centura II AC Box Set

2518 0020-22839 PIN, PRECLEAN LIFT

2519 0040-22982 SUS ADAPTOR(TI)

2520 0200-35224 WINDOW, VIEWPORT

2521 0020-21467 ADAPTER SOURCE 11.30"

2522 0040-20313 HOOP LIFT 6" WELDMENT

2523 0020-23635 LIFT HOOP 6" 101% W/B CH

2524 0020-29029 BLADE 6" 101 SHUTTER

2525 0020-53244 CHAMBER SPACER TXZ

2526 0020-20688 CONNECTOR BRACKET

2527 0040-00684 GATE VALVE ADAPTOR PLATE

2528 0021-35919 HOUSING COVER

2529 0021-35875 NUT,ROD LOCK,RF ADAPTER,TxZ MCVD

2530 0021-35876 CONNECTING ROD, RF ADAPTER,TxZ MCVD

2531 0021-35877 HOUSING,ROD,RF ADAPTER,TxZ MCVD

2532 0010-03706 ASSEMBLY, DC BIAS HTHU

2533 0040-01333 BRACKET, PNEUMATIC ASSY

2534 0040-02268 ENCLOSURE, SAFETY INTERLOCK

2535 0021-03977 COVER, SAFETY INTERLOCK

2536 0040-75195 CHASSIS, 2-PHASE DRIVER, MOTOR LIFT

2537 0010-01888 ASSY, V-ELECTRODE, DOME W/O IEP, POLY DP

2538 0020-20662 HEAT SHIELD 8", DEGAS

2539 0021-70093 PANEL,ADAPTER LOWER,IPS HYBRID

2540 0040-61050 SUPPORT,FAST LIFT

2541 0021-39885 LID CLAMP ISOLATOR, TXZ

2542 0020-76188 BRACKET

2543 0020-76527 WB AC COVER

2544 0050-26065 GAS LINE CONN PRESSURE CONTROL

2545 0050-26291 ADAPTER, BYPASS GAS LINE, TXZ

2546 0021-22266 PANEL GAS MODULE TXZ

2547 0021-76708 PEDESTAL CD/PT WAFER 150 MM

2548 0040-38943 PLATE ADAPTER MOD MFA MOUNTING PRODUCER

2549 0020-20716 FINGER HOOP CD/PT 125/150 MM

2550 0040-23909 COVER TOP, REAR

2551 0020-48701 CENTERING SCREW, LONG, PURGE HEATER 200M

2552 0021-02156 RING, MIDDLE, ISOLATOR

2553 0020-06338 DUMMY TARGET, SOURCE

2554 0020-22351 PANEL, HOUSING POSITION D PVD

2555 0040-76554 ARM, WLDMT SOURCE HTHU PVD

2556 0040-76308 WELDMENT 8" HOOP PVD W/B

2557 0021-36605 BRACKET,COIL,REAR BOTTOM,R2

2558 0020-13978 CLAMP, RELIEF, STRAIN WBLL

2559 0021-03980 OUTER SHIELD W/O WINDOW, TXZ

2560 0021-20437 DISK 8" B101 TI SHUTTER

2561 0020-75862 DUMMY TARGET

2562 0020-26852 COVER, END, ADAPTER, WATER COVER, COH

2563 0020-21153 BUSS BAR, GND 8POS

2564 0021-22442 COVER, AC CONNECTION, SMIF KICK

2565 0040-24255 ENCLOSURE, AC CONNECTION

2566 0020-76795 BRACKET(PRECLEAN CH)

2567 0020-20499 WINDOW, PROTECTIVE

2568 0040-21245 BRACKET MOUNTING CIR CONNECTOR

2569 0020-25838 COVER, TRANSFER CHAMBER

2570 0020-25112 SIDE COVER, END CAP

2571 0020-76258 INSERT, SLIT VALVE, ALUMINUM

2572 0021-02469 INSERT LINER EXHAUST TXZ 200MM

2573 0040-20321 HOOP LIFT 8" WELDMENT

2574 0020-13976 BLOCK, MOUNTING BOTTOM

2575 0020-70126 BRKT ENCODER I/F PCBA MOUNTING

2576 0020-21104 CAP 8" BUFFER FROG LEG

2577 0020-21105 CLAMP 8 INCHBUFFERFROG LEG

2578 0010-76992 ASSY, 8 REFLECTOR CASSETTE HANDLER LEFT

2579 0010-76993 ASSY, 8 REFLECTOR CASSETTE HANDLER RIGH

2580 0021-08511 HOUSING QUARTZ TUBE 200MM HP TXZ ISIC

2581 0040-77214 SILL MOUNT CUP SIDE SHORT

2582 0040-77216 SILL MOUNT SIDE REAR

2583 0021-35987 RF STRAP TxZ MCVD

2584 0021-21505 COVER,ELECTRICAL,8" ENHANCED ORIENTER

2585 0021-21504 SHIELD,HEATER,8 ENHANCED ORIENTER DEGAS

2586 0021-07977 COLLIMATOR, 8 HIGH UNIFORMITY CLOSED, 6

2587 0040-21013 ARM LEFT DUAL BLADE ROBOT

2588 0040-21014 ARM RIGHT DUAL BLADE ROBOT

2589 0040-84406 WELDMENT, 8 HOOP, MODIFIED, PVD WB CHAM

2590 0021-22485 BLADE, 8" BUFFER HP+, HTHU, RCF COMPATIB

2591 0020-21028 BLADE 8" TRANSFER FROG LEG

2592 0020-20653 BASE HEATER 8", DEGAS

2593 0020-20654 REFLECTOR HEATER,8" DEGAS

2594 0020-20658 SOCKET RETAINER, 8" DEGAS

2595 0020-20659 COVER ELECTRICAL, 8" DEGAS

2596 0040-76838 LID PLATE, TXZ CIP, UF

2597 0010-21336 BAR ASSY, LINKAGE SHUTTER

2598 0020-24185 SHAFT WING DUAL BLADE ROBOT

2599 0020-42112 CYLINDER, LIFT, AL, 200MM, CERAMIC

2600 0040-02938 SxS MANIFOLD OUTPUT 200MM TXZ CIP

2601 0040-89620-001 BUFFER ROBOT BLADE

2602 0040-01042 LOAD LOCK TRAY

2603 0040-86625 SHAFT CLAMP HEATER 200MM PRODUCER

2604 0040-61519 AMAT ROBOT ASS'Y

2605 0020-48305 COVER RING WITH CLEANCOAT

2606 0020-60810 INNER SHIELD WITH CLEANCOAT

2607 0020-45231 DISK, SHUTTER, ENCORE TAN, CENTER PIN, R

2608 0020-48304 SST CLAMP RING LOWER SHIELD W/CLE

2609 0020-48303 SST LOWER SHIELD W/CLEANCOAT

2610 0020-35294 QUARTZ LOWER CHAMBER

2611 0040-88845 PLATE,ETCH CHAMBER TOP COVER

2612 0020-33666 GAS DISTRIBUTION PLATE INSERT MTG

2613 0020-79378 MIRRA CROSS END SHIELD

2614 0020-31488 GAS DISTRIBUTION PLATE,13 HOLES

2615 0020-32075 HOUSING,OUTER,HRTV

2616 0040-31911 BASE, INNER HV, POLYSI, ESC

2617 0040-01618 MANIFOLD

2618 0040-02817 MANIFOLD, OUTPUT, 1 HOLE, RIGHT, PRODUCE

2619 0021-26274 SCREEN(POLY)

2620 0021-31804 DOOR, ACP ANODIZED SLIT VALVE

2621 0040-83331 LINER, CATHODE, DIRECT-COOLED, BAFFLE, E

2622 0050-08047 WELDMENT,LOWER,HELIUM FEEDTHRU W/SHIELD

2623 0020-14773 VAT LOCKING RING

2624 0020-14774 VAT PENDULUM PLATE

2625 0040-89773 SGD UPPER

2626 0040-46907 COVER, BASEPLATE, EXHAUST BOTTOM

2627 0040-46908 COVER, BASEPLATE, EXHAUST TOP

2628 0040-76683 COVER, BASEPLATE, INJECT TOP

2629 0040-76884 COVER BASE PLATE INJECT BOTTOM

2630 0040-36347 CAP,EXHAUST,W/O COOLING

2631 0040-09920 GAS FEED THRU TUBE

2632 0040-32001 EXTENDED TUBE

2633 0021-00571 INSERT, CHAMBER EXHAUST, EPI 200MM SST

2634 0040-35140 RING, UPPER CLAMP, ATM- EPI

2635 0040-35161 DUCT 6 INCH DEPOSITION CHAMBER

2636 0050-32387 WELDMENT DUAL BARATRON DXZ

2637 0050-31074 WELDMENT ASSY,DUAL BARATRON,VCO

2638 0021-09731 LID PUMPING PLATE TEOS DXZ

2639 0040-35049 CLAMP RING, LOWER

2640 0040-35316 CAP INJECT MACHINED(NON COOLED)

2641 0040-79272 MANIFOLD INPUT DXZ

2642 0040-79273 MANIFOLD OUTPUT DXZ

2643 0040-02936 WATER BOX, TXZ 200MM C I P

2644 0040-02937 WATER MANIFOLD

2645 0040-05294 INPUT MANIFOLD

2646 0020-35624 RING, CLAMP

2647 0020-66635 L1 DIFFUSER

2648 0020-79088 CARRIER PLATE

2649 0021-06243 ESC BODY(VESPEL PIN)

2650 0040-32574 TUBE, LIFT, Ti-xZ

2651 0040-52662 RE-FURB UPPER CHAMBER, DPS, 200MM

2652 0021-35008 PLATE, REFLECTOR, 200MM, MOD II

2653 0040-79925 SLIT DOOR LINER

2654 0021-10666 BLOCK,GAS/WTR,CHAMBER LID,GIGA-FILL SACV

2655 0040-02818 BLOCK, MIXING, LID GIGA-FILL SACVD

2656 0020-28622 ROBOT BLADE 8" HTHU TRANSFER

2657 0020-70285 BLADE 8 INCH, BUFFER, FROG LEG

2658 0021-34196 CATHODE SLEEVE YTTRIUM OXIDE PRODUCER ET

2659 0041-12166 CHAMBER LINER LEFT

2660 0041-12146 CHAMBER LINER RIGHT

2661 0021-27883 COVER SLIT

2662 0020-32073 GAS BOX

2663 0040-06477 CLAMP RING UPPER, RP

2664 0020-05204 VAL RING

2665 0040-02329 CHAMBER LL, RHS

2666 0021-00041 FACEPLATE, SIN, XG, DXZ DCVD

2667 0020-34775 BLOCKER, PERF,SILOX 8",UNIV CH,NON-STEPP

2668 0041-47020 UPPER LINER

2669 0021-96271 PLASMA SCREEN

2670 0200-01118 200mm WINDOW QUICK RELEASE ENDPOINT WINDOW

2671 3700-02366 200mm ORING ID 5.859 CSD .145 VITON 75 DURO BR

2672 3700-01232 ORING ID 9.734 CSD .139 VITON75 DURO

2673 3700-02109 Chamber Body Oring (CHEMRAZ SC513)

2674 3700-02105 ORING ID 10.484 CSD .139 CHEMRAZ SC513 W

2675 3700-02065 ESC Back Side O-RING

2676 3700-01757 200mm ORING ID1.112CSD.103FFKM (CHEMRAZ 513) 8

2677 3700-01823 200mm ORING ID .237 CSD .103 CHEMRAZ SC513 80

2678 3700-02327 200mm ORING ID 9.734 CSD .139 CHEMRAZ 80

2679 3700-02064 200mm ORING ID 8.734 CSD .139 CHEMRAZ SC513

2680 3700-02396 200mm ORING ID 1.171 CSD .139 CHEMRAZ SC513

2681 3700-01136 200mm Centura load loack door O RING (big)

2682 3700-01537 200mm ORING ID 2.359 CSD .139 KALREZ 2037 80 D

2683 3700-01654 200mm ORING ID 5.484 CSD .139 CHEMREZ 80 DURO

2684 3700-01058 200mm O-RING, ID.468 CSD.078

2685 3700-01642 200mm ORING ID 14.00 CSD .139 VITON 2-280 BLK

2686 0200-09444 200mm CAP, TOP, QTZ,25MM TUBE PRSP3

2687 0200-09201 200mm PLATE GAS DIST,LOWER QTZ 8"

2688 0200-09478 200mm PLATE, GAS DIST, UPPER, 200MM ASP PRSP3

2689 0200-36680 200mm LINER, QUARTZ, UPPER, GAS DIST, GROUND,

2690 0200-36682 200mm LINER, QUARTZ, LOWER, GAS DIST, GROUND,

2691 0200-05376 200mm Quartz Tube

2692 3700-02743 ORING ID 13.984 CSD .139 VITON 75DURO BR

2693 3700-02755 ORING ID 14.984 CSD .139 VITON 75DURO

2694 3700-02756 ORING ID 16.955 CSD .139 VITON 75DURO

2695 3700-02744 ORING ID 12.984 CSD .139 VITON 75DURO BR

2696 3700-01426 ORING ID 28.0 CSD .210 VITON 75DURO BRN

2697 3700-01208 ORING ID 12.984 CSD .139 VITON 75DURO BL

2698 3700-01173 O RING VIT 16.955IDX.210

2699 0020-48891 BLOCKER,APF, PRODUCER

2700 0020-51923 FACEPLATE,SILANENIT,PRODUCER

2701 0021-12790 BLOCKER,SILANE,RPS II, PRODUCER

2702 0021-18725 BLOCKER,LOW K, GASBOX ,PRODUCER

2703 0021-18844 FACEPLATE,BLOCK,LOWK,PRODUCER

2704 0040-40553 FACEPLATE,CTRHOLE23,SACVD

2705 0021-16781 UPPER SHIELD

2706 0020-26374 MIDDLE CLAMP

2707 0020-02348 LOWER CLAMP

2708 0040-76651 SHOWERHEAD,UPPER,SGD,.328RA

2709 0040-76652 SHOWERHEAD,LOWER,SGD,.328RA

2710 0020-23555 COVER,SOLID,SHIELD PRECLEAN

2711 0020-27309 COVER,RING 8" Ti 101 COVERAGE

2712 0020-33538 PERF,PLATE 200mm ,OX

2713 0020-34445 BLOCKER PLATE, DxZ

2714 0020-34606 BLOCKER PLATE, 100 EH

2715 0020-39369 PERF, PLATE, OX 200mm

2716 0021-00042 FACEPLATE,TEOS,DxZ DCVD

2717 0021-01569 BLOCKER PLATE ,N2,Tin ,GIGA-FILL,SACVD

2718 0021-01570 BLOCKER PLATE ,HE,Tin ,GIGA-FILL,SACVD

2719 0021-03489 FACEPLATE,GIGA-FILL SACVD

2720 0021-09759 OBS,FACEPLATE,DxZ DCVD

2721 0021-20042 DISK,8" B101,SST,SHUTTER

2722 0021-20399 CLAMP RING 8" HOT,SNNF

2723 0020-34040 LIFT PIN

2724 0020-34041 LIFT PIN

2725 0020-42285 BLOCKER PLATE 8" EC WxZ

2726 0020-42287 PERF, PLATE 8" ,EC WxZ

2727 0021-03739 PUPING CHANNEL

2728 0021-08015 FACEPLATE,(SACVD),200mm

2729 0020-25279 CLAMP RING 8" SIX "FEET"

2730 0020-27944 CLAMP RING, 6"

2731 0020-30447 BOCKER PLATE 6","SX" TEOS OXIDE

2732 0020-24913 PEDESTAL  8" ,101,COVERAGE

2733 0021-35749 RING,ISOLATOR,TxZ,200mm,SNNF

2734 0020-09933 GAS DISTRIBUTION PLATE,SPUTTER

2735 0020-24840 BLADE,6" HTHU XFER

2736 0020-31147 INSERT BASE,ALUM,150/200mm,flat

2737 0020-32312 SLIT V/V DOOR

2738 0021-02747 INSERT,SLIT V/V-BUFFER

2739 0020-20112 CLAMP RING, 8",SNNF,SST 3.378,AL

2740 0020-24406 CLAMP RING, 8" HOT,SNNF,AL

2741 0021-06097 CLAMP RING, 8",SEMI NOTCH,

2742 0021-06101 CLAMP RING, 8",SNNF,TiN

2743 0021-21320 CLAMP RING, 8",SNNF,CU, E/E 2.5

2744 0021-21936 CLAMP RING 8" SNNF, SST

2745 0021-22028 PEDESTAL  8" ,101,COVERAGE

2746 0021-22602 COVER,RING 8" B101 Ti,10.5

2747 0021-06148 CLAMP RING, 8",SEMI NOTCH,(Ti)

2748 0020-30673 GAS BOX PLATE

2749 0021-23550 INPUT MANIFOLD

2750 0190-09263 PUMPING PLATE ASS,Y ,(PTEOS)

2751 0040-21705 ADAPTOR,Hi-POWER,TTN,WB,H2O

2752 0020-41026 LIFTER 6" ORIENTER

2753 0020-20171 COVER,INSULATOR SOURCE 13"

2754 0020-23316 FRAME SOURCE G3/G4, FLAT TARGET

2755 0020-23437 HEATER MOUNTING BLOCK

2756 0020-28392 DISK 6" ADV 101 SHUTTER

2757 0020-27702 CLAMP RING, 8",SNNF,Ti,3.404

2758 0021-35008 PLATE,REFLECTOR,200mm,XE,CHAM

2759 0200-10169 PLATE,EDGE COVER 

2760 0020-10192 RING WAFER LIFT 200mm

2761 0020-31633 LIFT PIN

2762 0020-39119 FLANGE, ADAPTOR Z-DRIVE COOLD

2763 0020-30059 PUPING PLATE 8", SILANE

2764 0020-08817 PUMPING PORT RING PRODUCER

2765 0020-22242 LIFTER HOOP 8"

2766 0020-20430 COOLIMATOR 8"

2767 0020-23387 LIFTER 8" (TC)

2768 0020-30784 SUSCEPTOR 200mm 

2769 0020-30754 SUSCEPTOR 150mm 

2770 0040-34339 CENTER,GAS FEED BLK,TOP CLE,,ULTIMA

2771 0020-27808 FRAME SOURCE G3, W/SIDE COOL'G

2772 0021-35867 LID PLATE,TxZ

2773 0020-19708 COVER,RING 200mm SLIP Ta(N),Ti

2774 0021-23332 SHIELD,UPPER,STRAIGHT SIP II 200mm

2775 0040-20292 SHORT FEED, LAMP

2776 0190-13035 LAMP, BAKEOUT WITH LUGS

2777 4020-01160 FLTRIN-LINE GAS 3750PSIG 1/4VCR-MM 5SLM

2778 4020-01040 FLTR IN-LN GAS 3000PSIG 1/4-GSKT SEAL M

2779 3310-01071 GAUGE TC 1-1000 MTORR METALTUBE 1/8"IPS

2780 0010-09292 ASSY, TC AMP HOUSING GENERIC

2781 1310-01047 TC PROBE K-TYPE 7/16-20 TEF INSUL

2782 0190-35221 SWITCH ATM 7/16-20 SAI/MS CLOSE DECREASI

2783 3030-04879 SNSR FLOW INSERTION SST

2784 3870-01669 VALVE CHECK 2PSID 1/4VCR 7RA MAX

2785 3310-01055 GAUGE CONVECTRON TUBE 1/4 FVCR

2786 3870-01245 VALVE PNEU BLWS 2 WAY MINI NC-11

2787 0150-39369 CABLE ASSY, TC GAUGE, POS 'C' CENTURA

2788 1080-01131 GEAR BOX REDUCTION 7.5:1 1/2" DIA. OUTPU

2789 0010-09672 PLASMA SENSOR ASSY,PRSP

2790 3870-01644 VALVE CHECK INLINE 1/4"VCR F/M SST CW SE

2791 1400-01047 SNSR SMOKE DETECTOR SENSING HEAD

2792 0090-03860 CENTURA INDEXER BRAKE ASSY - ENDURA

2793 0090-03861 INDEXER BRE\AKE LOADLOCK

2794 3700-03163 SEAL ASSY 1.218ID 1.436OD .254X.218CS

2795 3700-03162 SEAL ASSY FLANGED 1.218ID 1.853OD .250X

2796 0020-10193 PLUG SHANK THRTL VLVE

2797 3870-01515 VALVE FINE MTR 1/4 VCR VERNIER HDL

2798 3300-04298 FTG TBG CONN 9/16-18MP X 11/16-16

2799 0020-24236 CLIP SPRING PC II ANTENNA DOWELL

2800 3870-01310 VALVE PURGE PUSHBUTTON

2801 0140-10103 AUTOTUNER LOWER W/ISOLATOR INTERLOCK

2802 0150-05104 CABLE ASSEMBLY, IGNITION NETWORK

2803 0015-20124 SCR 1/4 - 20 X 1 TITANIUM VENTED FLAT HE

2804 0090-20020 SENSOR ASSY, HALL EFFECT

2805 0020-20810 CLAMP RF CONNECTOR

2806 0100-35192 ASSEMBLY, PCB, DPS MAINTENANCE CONTROL

2807 3510-01103 ORF RSTR FLOW 5SLM N2 30PSI 1/4VCR-M/F

2808 3510-01053 ORF RSTR FLOW 20SCCM NZ @20PSI 1/4VCR-

2809 3870-02659 VALVE CHECK INLINE 2PSIG 1/2VCR-M/M SST

2810 0140-13083 HARNESS ASSY WAFER LIFT

2811 0020-21404 INSULATOR RF CONNECTOR DC BIAS

2812 0690-01843 CLAMP TGL FLG SST 100LBS LONG HDL W/VINY

2813 3300-02063 FTG TBG CONN 1/4MVCR X 7/16-20MSAE VIT

2814 3300-02905 FTG PLUG HEX STR THD SAE 7/16-20 SST

2815 0030-70084 HOLDOWN RING,VIEWPORT

2816 0100-20065 PCBA, ROTATION MOTOR CONTROL

2817 0010-20138 ASSY TC AMP HSNG

2818 0010-20248 Slit Valve ass'y

2819 0010-39306 TXZ HEATER LIFT

2820 0010-20705 RF RESONATOR ASS'Y PCII (OEM)

2821 0190-30355 LIGHT PEN

2822 0010-13149 ASSY.4" WAFER SENSOR LOW PROFILE

2823 0020-76885 COVER ROBOT MTR ACCESS

2824 0020-76886 BRKT MOTOR CASS INDEXER

2825 0020-22412 UPPER COVER, SLIT VALVE BELLOWS

2826 0020-22413 LOWER COVER, SLIT VALVE BELLOWS

2827 0020-20342 PIVOT TRANSFER SLIT VALVE

2828 0020-25225 CAP 8" ZX HEATER

2829 0020-27455 DISK 8" ADVANCED 101 SHUTTER

2830 0200-20216 PIN, COVER RF SCREW, VECTRA IMP

2831 0020-29334 CLAMP, INSERT INSULATOR

2832 0021-36081 CLAMP,PERF PLATE TxZ

2833 0021-36164 RF ISOLATOR CLAMP TxZ

2834 0020-24231 HOOP BELLOWS ADAPTER PRECLEAN 2

2835 0020-24265 PLATE STOP WAFER LIFT PRECLEAN 2

2836 0010-08185 ORIENTER 650NM LASER OPTICS.

2837 0020-22295 BRACKET MTG WADER ORIENTATION PCB

2838 0040-13659 BLOCK MTG HEATER 1.18 DIA SFT MTR LIFT H

2839 0020-22879 ENCLOSURE, SHUTTER

2840 0020-75980 COLLAR, 1.18' SHAFT, HTESC HTR ISOLATOR

2841 0020-13974 BLOCK, MOUNTING, BOTTOM SENSOR LLKA, WBL

2842 0020-21043 COVER, SWITCH W/ CONNECTOR

2843 0020-22922 BRKT MN/FRM SMOKE SENSOR MTG

2844 0020-21691 PLATE 8" CCD VACUUM SEAL

2845 0020-70052 WINDOW, CLEAR , LOWER

2846 0020-21693 BLOCK LASER

2847 0020-05065 PERF PLATE, CONFORMAL SILANE, LC

2848 0020-20462 VIEWPORT COVER TRANSFER CHAMBER

2849 0020-29206 BUSHING COIL SUPPORT, VECTRA IMP

2850 0040-23670 BRACKET, WATER FLOW

2851 0020-76690 MOUNT DOOR TRANSFER SLIT VALVE

2852 0040-20198 ELBOW 2XKF 25 ,VCR 1/4 MALE

2853 3300-02155 FTGTBG TEE UNION FLANGE NW25KF SST304

2854 0020-23195 Preclean -2 Body

2855 0010-09301 CVD THROTTLE VALVE

2856 0010-10556 Monocromator Module ASS'Y ENDPNT 19"

2857 0021-21221 HOOP CD 200MM

2858 0020-20691 PEDESTAL CD/PT

2859 0020-20296 Source Frame 12.9

2860 0021-35622 TXZ CHAMBER BODY

2861 4020-01285 USE 4020-01285 FLTR GAS 1000PSIG 1/4MVCR

2862 0020-20343 CYLINDER ADAPTER TRANSFER SLIT VALVE

2863 0010-36524 ASSY,RF ADAPTER,TXZ CHAMBER, MCVD

2864 0010-70264 ASSY HP ROBOT DRIVER UPPER/LOWER

2865 0010-70265 ASSY HP TRANSFER ROBOT

2866 0010-75172 ASSY, SLIT VALVE ACTUATOR, NON-ENP

2867 0010-21844 MAGNET

2868 3030-05392 CNTRL FLOW MON SIGNAL PROCESSOR 1 CHAN

2869 3800-00130 RGLTR PRESS SQ2 MICRO 0-30PSIG 2PORT 1/4;

2870 0200-01688 FILTER, 670NM, 1.2DIA., .1THICK

2871 0100-35054 PCB ASSY,CHMBR INTERFACE

2872 0100-35279 PCB ASSY, LOAD LOCK BEEPER

2873 0100-76280 PCB ASSY SMIF INTERCONNECT BOARD

2874 0100-35083 PCB ASSY CHAMBER INTCNCT B&D CENTURA MXP

2875 0100-09381 ASSEMBLY, PCB CHAMBER,INTERCONNECT ASP

2876 0660-01699 CARD CONVECTRON MODULE 5-CH RFI SUPPR

2877 0100-09222 CHAMBER INTERFACE BOARD ASP

2878 0100-35049 ASSEMBLY PCB SYS RESET/ INTLK SEL BD

2879 0100-20012 PCB ASSY, ISOLATION AMPLIFIER

2880 0190-76050 PCB VIDEO CONTROLLER VGA

2881 0100-00975 ASSY PCB STEPPER CONTROLLER2

2882 0100-20004 wPCB ASSY, CHAMBER INTERCONNECT

2883 0100-02016 PCB ASSY, ANALOG SYNC DETECT

2884 0190-75084 VGA VIDEO CONTROLLER, MODIFIED

2885 0100-35013 ASSY,PCB,VACUUM PUMP INTRCNT

2886 0100-76259 ASSY PCB WAFER ORIENTER CONTROLLER BD

2887 0190-70103 PCB ASSY ANALOG MONITOR LIGHT PEN

2888 0190-35262 CONN ASSY,CUSTOMER FAC SW JUMPER,

2889 0040-46403 Shield Outer

2890 0021-22065 Shield LOWER

2891 0021-25296 ENDURA ALPS, SHUTTER DISK

2892 0021-26609 SHUTTER

2893 0040-55456 BELL JAR

2894 0020-09035 Pin Wafer Lift 6" (ETCH)

2895 0200-09002 View Port Shield (ETCH)

2896 0200-09021 ceramic150mm (ETCH)

2897 0200-09158 Heater Window collar SI (ETCH)

2898 0200-09626 OX/MLR/NIT 150mm flat (ETCH)

2899 0200-09636 DC-Plug (ETCH)

2900 0200-09670 Ring, clamp, cer, flat, Al 150mm (ETCH)

2901 0200-09735 Cover Clamp Ring ring, clamp, flat, Al 150mm (ETCH)

2902 0200-09757 150mm, 95HT finger (ETCH)

2903 0200-09759 150mm Shield Ring (ETCH)

2904 0200-09782 Pipe Insulating (ETCH)

2905 0200-09850 Insert ring 150mm (ETCH)

2906 0200-10073 150mm Insulator (ETCH)

2907 0200-10243 150mm Shadow Ring (ETCH)

2908 0200-20060 150mm Insulator (ETCH)

2909 0200-35623 150mm Insert Ring (ETCH)

2910 0200-39347 150mm Shadow Ring (ETCH)

2911 0200-76068 150mm Shadow Ring (ETCH)

2912 0020-20114 Isolator DC Bias 200mm Endura

2913 0020-20126 STAND-OFF, CERAMIC DC BIAS 200mm

2914 0020-21664 Isolator Adapt / Insulator Source 13" Endura TiN

2915 0020-22975 Insulator TiN 8" Preclean

2916 0020-24018 Mono Si Attena Endura Preclean

2917 0020-25917 Insulator 8" Endura

2918 0020-28907 Isolator

2919 0040-21178 Bell Jar 8" Endura Preclean

2920 0200-00137 Focus Ring 8" DPS METAL

2921 0200-00149 Plasma Tube 8"

2922 0200-00218 Cover Top Quartz 8" Endura Preclean

2923 0200-00221 Quartz Insulator 8" Endura Preclean

2924 0200-00234 Lid Isolator

2925 0200-00247 Capture Ring 8" DPS METAL

2926 0200-00299 Insulator coil support 8" Endura IMP

2927 0200-00316 Ring,Middle,200mm Producer

2928 0200-00317 Isolator Pumping Ring Producer

2929 0200-00332 Qtz single ring 8" DPS POLY

2930 0200-00353 Pin Ceramic 8" WxZ

2931 0200-00354 Purge Ring 8" Endura WxZ

2932 0200-00402 Isolator Pumping Ring, TOP,200mm Producer

2933 0200-00406 Bushing 8"

2934 0200-00410 GDP 8" Super E Etch

2935 0200-00602 Single Ring 8"

2936 0200-00622 Outer Ring 8" Endura WxZ

2937 0200-00624 Purge Ring 8" Endura WxZ

2938 0200-00632 Shadow Ring 8" Endura WxZ

2939 0200-00639 Insert Ring 8" Emax

2940 0200-00690 Lid Liner 8"

2941 0200-00796 Lift Pin , φ.139 8"

2942 0200-00849 Shandow Ring 8" Emax

2943 0200-00863 Insulator 8" DT Heart

2944 0200-00902 Insulator 8"

2945 0200-00925 Top Cover Ring 8" Emax

2946 0200-01119 Shadow Ring 8" Super E oxide

2947 0200-01216 Shadow Ring 8" Super E

2948 0200-01463 Shandow Ring 8" Emax

2949 0200-01509 N.M insert ring 8"

2950 0200-01511 Top ring 8" Super E oxide

2951 0200-01612 Injector 8" Emax

2952 0200-01622 Wide dimple cover plate 8" DxZ all

2953 0200-01798 LIFT PIN

2954 0200-01820 Insert Ring 8" Emax

2955 0200-01992 Shandow Ring 8" DT Heart

2956 0200-02041 L-shape Cover Ring 8"

2957 0200-02124 63RA,200mm eMAX 8" Emax

2958 0200-02385 Insert ring,NM, l SHAPE 1.5MM NOTCH, 8" EMAX

2959 0200-02619 Top Cover Ring 8" Emax

2960 0200-02916 Depo Ring 8"

2961 0200-09071 Lift Pin 200mm 8" P5000

2962 0200-09072 CERAMIC SHIELD, 200MM 8" Endura WxZ

2963 0200-09074 WSI(SL) Window 8" P5000

2964 0200-09129 Isolator 8" Endura WxZ

2965 0200-09147 Pin Wafer Lift 8"

2966 0200-09319 Out Shadow Ring

2967 0200-09450 Gas Feed Tube Plate, Gas 8" Endura

2968 0200-09603 Insulating Pipe

2969 0200-09605 Plug BIAS Quartz ESC 8" MxP+

2970 0200-09606 Cover 200mm

2971 0200-09657 Recessed Window 8" Etch

2972 0200-09716 Pin Lift Heater WxZ 8" Endura WxZ

2973 0200-09785 Cap Quartz 8" Etch

2974 0200-09787 Focus Ring 8" MxP

2975 0200-09911 Cover Ring

2976 0200-09955 Window Front AlN

2977 0200-09974 Pumping Insert Ceramic , 8" DxZ TEOS

2978 0200-10133 Endpoint Widow 8" MxP+

2979 0200-10143 Chamber Insert Ceramic 8" DxZ Silane/TEOS

2980 0200-10144 Isolator Ring Ceramic 8" DxZ Silane

2981 0200-10157 Liner Junction SiN DxZ 8" DxZ Silane

2982 0200-10158 Sleeve Junction 8" DxZ Silane

2983 0200-10160 Liner Ceramic DxZ 8" DxZ Silane

2984 0200-10163 Isolator 8" DxZ Silane

2985 0200-10164 Pumping Insert Ceramic 8" DxZ Silane

2986 0200-10176 Shadow Ring 8" MxP+

2987 0200-10284 Lift Pin Ceramic 8" DxZ ALL

2988 0200-10377 Single Ring Ceramic Poly 8" DPS POLY

2989 0200-10378 Single Ring Ceramic 8" DPS Poly

2990 0200-10445 Shadow Ring 8" eMxP

2991 0200-10446 Insert Ring 8" Super E

2992 0200-18053 Guide lift pin 8" HDP

2993 0200-18062 Dome 14 ID HDPCVD 8" HDP

2994 0200-18078 Collar,200mm SNNF Ultima 8" HDP

2995 0200-18081 COVER LOW PROFILE HDP-CVD, ULT 8" HDP

2996 0200-18082 Central Nozzle 8" HDP

2997 0200-18093 Long Side Nozzle 8" HDP

2998 0200-18095 COLLAR MIN CONTACT 200MM SNNF

2999 0200-18109 COLLAR 200MM SNNF SML FLT ULTI HDP

3000 0200-20055 Insulator 8" Endura Preclean

3001 0200-20170 Cap coil support rigid 8" Endura IMP

3002 0200-20175 Laybrinth, rigid coil support 8" Endura IMP

3003 0200-20217 Laybrinth, Feedthru coil support vectra Imp 8" Endura IMP

3004 0200-20246 Insulator 8"

3005 0200-20285 Pedestal Cover Upper 8" Endura IMP

3006 0200-20315 Rest Button 8" Endura IMP

3007 0200-20331 Cover Ring 8"

3008 0200-20426 Insulator Pinless 8" Endura Preclean

3009 0200-21664 Isolator Ring

3010 0200-26254 Ceramic Insulator 8" Endura

3011 0200-35004 Blade Robot 8" RTP

3012 0200-35145 RTP-Window 8" RTP

3013 0200-35222 Window Lamp Housing ATM 8" RTP

3014 0200-35265 RTP-Window 8" RTP

3015 0200-35267 DOME, Ceramic DPS METAL 8" DPS METAL

3016 0200-35290 Housing, Gas Feed, DPS MEC Chamber 8" DPS METAL

3017 0200-35291 Plug, Inner, Gas Feed Assy 8" DPS METAL

3018 0200-35292 Window Endpoint DPS MEC 8" DPS

3019 0200-35293 Window Manometer Port DPS MEC 8" DPS

3020 0200-35294 Quartz Lower Chamber VPRT 8" DPS

3021 0200-35295 Housing, Gas Feed, 8" DPS Poly

3022 0200-35296 Plug, Inner, Gas Feed Assy 8" DPS POLY

3023 0200-35323 195mm SEMI NOTCH 8" DPS METAL

3024 0200-35324 Ring, Single 195mm SEMI NOTCH 8" DPS POLY

3025 0200-35326 Ring, Focus, 195mm SEMI NOTCH 8" DPS METAL

3026 0200-35486 Wafer Lift Pin Chamber MODII 8" RTP

3027 0200-35525 CERAMIC RESISTOR 8" Endura

3028 0200-35573 Susceptor Support 8" HTF

3029 0200-35596 Window Slit 8"

3030 0200-35611 Screw Lid Liner TxZ 8" Endura TxZ

3031 0200-35783 Shadow Ring 8" MxP

3032 0200-35801 Endpoint Window 8" Etch

3033 0200-35828 Single Ring Ceramic 8" DPS

3034 0200-35956 Dome, Ceramic, 2.75DIA Window DPS 8" DPS POLY

3035 0200-35957 Window 2.75 DIA Sapphire DPS 8" DPS METAL

3036 0200-36105 Chamber Insert

3037 0200-36373 Producer Lift pin OD 0.149 8" Producer

3038 0200-36415 C-Shaped Ceramic Ring 8" DxZ SABP

3039 0200-36416 Pumping Ring (Two Rised Lands) 8" DxZ SABP

3040 0200-36417 Pumping Ring (One Rised Lands) 8" DxZ SABP

3041 0200-36418 Ceramic Cover 8" DxZ SABP

3042 0200-36609 Isolator , Lid 8"

3043 0200-36630 Cover Plate 8" DxZ all

3044 0200-36631 Cover Plate 8" DxZ

3045 0200-36666 Ceramic Isolator, Producer 200mm Producer

3046 0200-36685 Ring Single Ceramic 8"

3047 0200-36696 Shadow Ring 8" Super E

3048 0200-36697 Top Ring 8" Super E

3049 0200-39135 Windo Manometer 8" DPS

3050 0200-39137 Dome Ceramic DPS Chamber 8" DPS POLY

3051 0200-39140 Ring, Focus, 195mm SEMI NOTCH 8" DPS METAL

3052 0200-39152 Single Ring Ceramic 8" DPS

3053 0200-39289 Isolator TEOS Pumping Ring 8" Producer

3054 0200-39296 Aperture Ceramic Cover 8" DPS

3055 0200-39297 Cover Ring 8" MxP+

3056 0200-39324 Chamber Insert Ceramic 8" DxZ

3057 0200-39361 Isolator Silane Pumping Ring 8" Producer

3058 0200-40126 THIN ROBOT W/O POCK 8" HDP

3059 0200-40156 PIN LIFT CERAMIC LONG HDP 8" HDP

3060 715-130081-008 HOLDER WAFER 8"

3061 714-330982-001 E2-CMP

3062 715-018991-208B CATHODE (E) 8"

3063 810-424110-2 BAFFLE A 8K

3064 32005S-42713 WINDOW PORT

3065 715-140125-001-B FACING ELECTRODE

3066 715-140124-001-D (BAFFLE 4528 UPPER TPL SET) FACING SEALPLATE

3067 715-011912-083 PLATE UPPER BAFFLE

3068 715-011913-083 PLATE LOWER BAFFLE

3069 715-130080-008 HOLDER WAFER 8"(ELL)

3070 714-495015-001 E4 REAR CHAMBER LINER

3071 715-011746-161 H BOTTOM WAFER CLAMP

3072 715-030136-004 POLY EDGE RING

3073 715-030329-002 POLY CHAMBER LINER

3074 6X1376Y-70621 GAP SPACER

3075 715-330236-001-1 6" SPLIT CHAMBER

3076 715-028405-001 HOUSING REACTION CHAMBER

3077 715-4405470-01 MAIN CHAMBER BODY WALL

3078 715-330135-1-D GAS INJECTION RING

3079 715-011535-001 RING CLAMP UPPER ELECTRODE

3080 715-330928-002 LINER PUMP PORT O-SHAPE

3081 714-495015-001 REAR CHAMBER LINER

3082 15045AA-59515 SHIELD DEPO

3083 S5SD-007 SHIELD DEPO(VESPEL TYPE)

3084 715-030136-003 HOT EDGE RING

3085 715-140286-001 FOCUS RING

3086 60-00193-00 MVC0057_switch vacuum atmospher

3087 3331R-068 FOCUS RING 6" (F3)

3088 3341R-011 FOCUS RING

3089 3341C-012 AL CLAMP RING 6"

3090 3341A-005 ANODE

3091 3300C-190 METAL SPIDER

3092 3331l-004 CHAMBER LINER ESC(M)

3093 4302G-008 G.D.P AL

3094 3341R-012 AL FOCUS RING

3095 4305F-007 GAS INJECTION(P)

3096 3233S-005 SPOON, SHUTTLE

3097 7310-0694-01A TOP PLATE

3098 7310-0693-03C BOTTOM PLATE

3099 D127045 CLAMP RING

3100 12754200 STARSHIP

3101 4305P-001 PLUNGER 1/4 SET

3102 430803-042 BAFFLE SET

3103 4308C-004 COOLING PLATE

3104 715-018991-208B CATHODE (E) 8"

3105 4305R-022 GAS INJECTION(ESC,E-3)(P)

3106 4304E-008 END EFFECT

3107 4305L-001 CH LINER ESC

3108 3421A-006 ELEVATOR ARM

3109 3341D-002 DOOR PLATE

3110 4301P-021 PEDESTALL

3111 4101T-006 PEDESTAL TABLE

3112 4102R-023 CHAMBER

3113 4304E-005 DOME ELECTRODE

3114 713-11203-1 ENTRANCE LOAD LOCK COVER PLATE

3115 714-220096-001 SHUTTLE COVER (Small)

3116 714-220096-003 SHUTTLE COVER (Large)

3117 718-092326-082 ELECTRODE ANODE

3118 715-011531-014 ELETRODE UPPER 4428

3119 715-331218-001 PTX COLLAR

3120 715-028552-001 UPPER CLAMP RING

3121 715-330825-006 CHAMBER LINER

3122 715-140287-002 UPPER CLAMP RING

3123 715-801021-012 CHAMBER LINER

3124 715-030860-001 CHAMBER LINER

3125 715-443178-300 RING PLATE

3126 715-801021-839 CHAMBER LINER

3127 714-801511-002 CHAMBER LINER-B

3128 715-801021-838 CHAMBER LINER

3129 715-801021-801 WELDMENT LINER

3130 715-801916-008 AL GDP(METAL)

3131 715-042721-809 WELDMENT LINER 2

3132 715-802381-104 PLATE ROCKER BARRIER

3133 715-802381-002 PLATE ROCKER BARRIER

3134 715-045264-242 R,GND EXT,AL,SLOTTED

3135 716-402452-001 CLAMP RING-(8")

3136 715-018991-208 CATHODE(E) 8"

3137 715-330236-001-E1 6" SPLIT CHAMBER

3138 715-028306-001 PLUNGER

3139 715-12101-008 ARM HOLDER (XLL)

3140 715-130080-008 HOLDER WAFER 8"(ELL)

3141 715-12110-001 ARM SHAFT COVER LOWER

3142 715-28552-001-1 UPPER ELECRODE CLAMP

3143 715-012171-003 ARM COVER LOWER

3144 715-12205-002 BELLOWS HOUSING

3145 715-12165-8 HOLDER WAFER 8"(ELL)

3146 715-011622-001 LIFTER WAFER 4 PIN

3147 0603-0115-12 PLATE, LOWER BAFFLE 8"

3148 0603-0166-12 PLATE, UPPER BAFFLE 8"

3149 CK950731 (S)FILLER ORIFFICE W/C

3150 0603-0214-12 FOCUS RING 8"

3151 0603-0084-13 BOTTOM ELECTRODE 8"

3152 716-140069-001 PLT Upper Insultr 6" esc

3153 839-011906-001 Electrode Silicon 6"

3154 716-028123-002 RING FILLER CERAMIC

3155 839-011907-902 ELECTRODE, SILICON,HI TEMP,POLISH,8INCH

3156 839-440462-306 ASSY CAP ELECTD ESC 6"

3157 853-347147-008 Assembly, Heated, Paddle, PLSH & PLTD, HDWR, 8"

3158 718-094756-081 ELCTD, UPR, 8" ESC, NOTCHED

3159 716-330504-081 RING, FOC, 8" FLATTED, GD R, ESC

3160 716-330121-001 WDO,RF SHPD CER,FXD GAPN

3161 716-330122-003 PL, Top, CER F/G

3162 716-011427-001 PL, Top, CER F/G

3163 716-021323-001 Funnel, Quartz, 8” Stripper

3164 716-011493-001 Spacer, Quartz, Module

3165 718-094523-281 OEM P/N(Notch Type)

3166 716-028454-012 QUARTZ DISK

3167 716-331088-001 EDGE RING 8"

3168 716-030135-001 RING, FOC, 8" ESC

3169 716-330915-001 SLV INSUL,ESC LOW CAP

3170 716-331089-001 R,EDGE,8",ES,BOT,CER

3171 716-443090-202 SIC UPPER RING

3172 716-011624-010 RING INSULATOR LOWER

3173 716-443090-002 UPPER QUARTZ RING

3174 716-016394-001 One piece confinement ring

3175 713-028487-001 Ring Confinemnt(Vespel)

3176 716-028028-004 Ring Electrode Clamp 6" 12 Bolt

3177 715-028626-001 Plate Upper Baffle 6"

3178 715-028627-002 Plate LWR Baffle 6" MED Edge

3179 716-140163-001 RING,HOT EDGE,15deg,ESC,STD 6"

3180 716-140068-001 RING,FOCUS,ESC,6"

3181 716-140118-001 RING, FOC, ESC 8"

3182 716-331157-014 DISK INTERFEROMETER TOP GAS

3183 839-017612-010 IEP Tube (Collimator)

3184 716-331142-001 RING, EDGE TOP WIDE

3185 716-443179-001 R EDGE BASE

3186 715-330825-001 LNR,CHMBR,AL,EXTND,ALLI

3187 716-443129-001 FOCUS RING ESC INNE 8"

3188 716-443086-408 EXELAN Hot Edge Ring

3189 716-443234-002 HP FOCUS RING

3190 716-140469-002 CPLG HP ESC 8" RING

3191 716-007136-002 HPT UPPER RING

3192 716-008645-001 HP COVER RING

3193 839-443215-544 LAM EXELAN HPT SI Electrode

3194 716-443086-405 EXELAN HPT Hot Edge Ring

3195 839-440462-518 LAM EXELAN HPT ESC

3196 716-140125-100 BAF, LWR OF THREE SIC CON

3197 715-140126-001 BAF 4528 MOD TPL SET

3198 715-007567-00 BAF, UPR, HP TRIPLE SET

3199 720-443208-010 SCR,SLTD,FH 6-32 UNC,PEEK

3200 720-016278-114 SCR,PNH,SLTD, 250-20 PEEK

3201 715-330981-001 LINER WINDOW SIDE TCP 9600

3202 715-12233-002 INNER GATE PLATE

3203 715-330135-002 BOT GAS FEED RING

3204 715-330445-600 PL ADATER UPPER MATCH

3205 715-330135-001 GAS INJECTION RING

3206 715-330825-007 LIR,CHMBR,AL,ALLI BSR 9600

3207 715-495014-001 E7 LIN,CHABER,TRASN,MANF,ADPTR

3208 715-330889-002 AL GROUND RING

3209 839-495013-001 E3 EXTENTION CHAMBER WALL LINER-II

3210 715-330394-010 BRACKET,CHAMBER,LINER,9600

3211 715-330984-001 GAS INJECTION RING (R)

3212 715-331211-002 LINER,CHAMBER,9600 (P)

3213 715-330394-001 Q'Z INNER BRACKET

3214 715-028554-002 PLATE UPPER SEAL 8"

3215 716-030136-001 FOCUS RING

3216 715-31522 REV.001 SELEX SLIT LINER

3217 715-11035-002 MAIN CHAMBER BASE

3218 715-11002-00 XLL CHAMBER

3219 1810-223289-13 EXHAUST SLIT

3220 715-28532-002-1 ESC COVER

3221 715-011219-001 FILLER L/L CHAMBER -LEFT

3222 715-330987-001 S-GAS INJECTION

3223 715-031507-001E HOUSING REACTION CHAMBER

3224 715-007469-002 LOWER ELECTRODE(6")

3225 715-330987-001 RING

3226 715-330746-002 PLUNGER

3227 715-L011753-001 PLATE , UPPER BAFFLE

3228 715-L011913-005 PLATE , LOWER BAFFLE SIN

3229 715-S037760-001 AL ELECTRODE UPPER 8"

3230 715-028606-162 PLATE WC 6"

3231 715-18991-236 ALUMINUM ELECTRODE

3232 715-330984-300 B GAS INJECTION RING

3233 715-011753-001-D PLATE UPPER BAFFLE

3234 715-25106-001-1 PLATE,LOWER BAFFLE

3235 715-330825-005 WALL LINER

3236 715-045264-200 GROUND RING

3237 715-045263-130 AL GROND BASE RING

3238 715-031986-008 HOUSING LOWER REACTION CHAMBER

3239 715-078385-200 COVER KITS

3240 715-013639-007 GROUND STRAP_3X

3241 715-032012-003 PLATE, WINDOW, CHAMBER LGR

3242 715-027638-014 4 * 2 GDP

3243 715-007567-004 FACING BAFFLE

3244 888-107103-002 SHAFT CYLINDER SCREW

3245 715-012165-008 HOLDER WAFER8",TIGHT POKET

3246 715-130092-006 HOLDER WAFER6" ARM EXIT

3247 715-030319-001 COVER SCREW BSR

3248 715-012165-006 WAFER HOLDER TIGHT POKET6"

3249 715-495013-001 PENDULUM V/V WALL LINER

3250 715-330133-001 RING UPPER CHAMBER FXD CAP2

3251 715-011531-015 AL ELECTRODE

3252 715-011051-001 FRAME CHAMBER WINDOW

3253 715-011039-001 RETAINER UNIVERSAL WINDOW

3254 715-098591-001 PENDULUM V/V PLATE

3255 715-098592-001 ISO V/V COVER

3256 715-12233-003 GATE,INR HD ANDZ

3257 715-032012-004 CAHBER BODY SIDE PLATE EPD

3258 724-071981-002 BLADE(150mm)

3259 715-360268-001 PL,CHAMBER,TO V/V

3260 839-331158-003 WELDMT,TOP GAS LINE

3261 715-130080-005 WAFER HOLDER TIGHT POKET5"

3262 715-25106-001 PLATE,LOWER BAFFLE

3263 715-011202-001 ELL CHAMBER

3264 715-011532-006 PLATE UPPER SEAL 6"

3265 715-11901-006 LOWER BAFFLE DOMED 6"

3266 715-11900-001 UPPER BAFFLE DOMED 6"

3267 715-074069-004 BASE PLATE

3268 715-11492-006 EXIT ARM 6"

3269 715-330834-001 HOUSING,LOWER REACTION

3270 715-011640-006 POCUS RING

3271 715-011531-008 RAIBOOW CATHODE

3272 715-018991-006 AL CATHODE 8"

3273 715-018991-206 AL ELECTRODE

3274 715-015169-011 LINER,TMP SHILD,TOP GAS ANODIZED

3275 715-443178-001 R,EDGE,HOT

3276 715-441352-001 CHAMBER, HIFLOW TCP

3277 715-370861-010 ORF,SYL,55HOLES DIA,052

3278 715-031454-001 CHAMBER WINDOW COVER

3279 720-098325-001 PLATE SOCKET SCREW

3280 724-074076-005 SEAL PLATE

3281 715-443223-002 HPT OUT FOCUS RING

3282 856-004863-003 BRACKET

3283 713-018296-003 INJECTOR SPACER

3284 720-092464-008 MOUNTING SCREW

3285 714-801511-002 MOUNTING PLATE LINER

3286 716-008608-001 SAPPHIRE WINDOW

3287 715-042721-810 LINER, SYM, HI FLOW, 2300 (Chamber Liner)

3288 714-045744-008 LINER, CANTILVR, OUTR LNR (Liner Door)

3289 839-045710-807 ASSY, SYM DOOR, 2300 (Shutter)

3290 714-045709-002 BLK, FLOW, SIM CANTILVR, 23 (Liner or Shutter)

3291 714-045743-809 LINER, FIXED OUTR, ACME, 23 (ACME Liner out 31

3292 716-012639-117 INJ, DUAL, IEP, FLM POL, QTZ

3293 716-012640-012 WDO, GAS INJ, FACE SEAL, QR

3294 716-026652-902 RING, EDGE, BOT

3295 734-007524-294 CHAMBER WALL O RING

3296 734-007524-295 ORING

3297 839-802923-006 VIEW PORT ASSEMBLY

3298 716-012640-011 Star Quartz Window

3299 716-331142-305 EDGE RING

3300 716-800951-311 BASE RING

3301 716-012639-024 GAS INJECTOR

3302 716-031257-309 EDGE RING

3303 716-026652-002 KIYO BASE RING

3304 716-077262-004 TOP EDGE RING

3305 716-026652-911 BASE RING

3306 713-034964-001 THICK WASHER

3307 839-039317-003 CAP

3308 713-037072-007 HANGER

3309 713-034965-001 THIN WASHER

3310 713-027299-002 PEEK ADAPTOR

3311 857-072806-005 Flex45 Talon Graphite Shim on AL Plate

3312 857-073299-001 Flex45 Talon Top Plate Graphite Shim

3313 713-069935-003 Flex45 Talon AL Plate Edge Kapton Shim

3314 713-072792-003 Flex45 Talon Outer UEL Edge Kapton Shim

3315 715-075954-003 Inner UEL Clamp Hex Washer

3316 716-038612-003 Flex45Talon DC Bias Detected Si PIN

3317 716-022030-004 Flex45Talon DCBias Detect PIN Quartz Cap

3318 790-008220-002 BONDED CHEMRAZ SLOT VALVE DOOR

3319 734-046356-277 ORING

3320 734-057609-276 276 O-RING, DC156，10.984ID*0.139W

3321 734-092561-212 ORING,.139DIA C/S,FSI

3322 734-026120-001 ORING,SILICON,DIA.21.215

3323 734-061280-265 ORING,VITON 2-265

3324 734-092561-283 ORING 16.95ID*.139

3325 734-057609-016 016 O-RING,DC156，0.614ID*0.070W

3326 734-061280-266 O-RING,VITON,7.984ID,.139C/S

3327 734-092561-222 O-RING,1.484 ID X .139 C/S,FSI;O-RING

3328 734-092561-242 O-RING,3.984 ID X .139 C/S,FSI

3329 734--092561-178 O-RING,9.737 IDX.103 C/S,FSI

3330 734-092561-281 281 O-RING,14.984 ID X .139C/S,FSI

3331 734-092561-277 277 O-RING, 11.48 ID X .139 C/S,FSI

3332 734-092561-275 Viton Pendulum Valve O-Ring flex45,275

3333 734-026120-003 003 O-RING,FLOUROSILICONE

3334 734-057609-602 602 O-RING,DC-156,11.160D X070W

3335 734-057609-601 601 O-RING,DC-156,9.550ID X.070W

3336 734-092561-280 280 O-RING,13.984 20X1/8CS,FSI

3337 734-092561-253 253 O-RING,5.359 ID X .139 C/S,FSI

3338 839-011907-111 Excelan top electrode

3339 839-440462-508 Lam exelan HP ESC

3340 716-443086-301 HOT EDGE RING(301)

3341 716-004655-001 UPPER QUARTZ RING

3342 716-443083-004 TOP CONFINEMENT RING

3343 716-443084-003 BOTTOM CONFINEMENT RING

3344 839-443215-101 HP UP ELEC

3345 716-000941-001 QUARTZ BAFFLE

3346 715-011622-221 4 PIN

3347 16-137686-00 DOOR GATE

3348 16-126663-01 SHIELD STAGE ESC SPRAYED

3349 17-123793-02 ADAPTER SHIELD HCM

3350 16-137688-00 SHIELD BTM CLAMPLESS SPRAYED

3351 17-157344-00 L BRACKET

3352 16-122744-00 ASSY ANODE HCM ESC

3353 16-033931-01 SHOWER HEAD

3354 16-033932-00 SHOWER HEAD

3355 16-271392-00 SHOWER HEAD

3356 02-111903-00 RF FEEDTHROUGH ASS'Y

3357 15-149329-00 PLATE,RF

3358 15-149328-00 SEAL PLATE ASS'Y

3359 16-148815-00 SEAL PLATE ASS'Y

3360 15-169667-00 INJECTOR TUBE SHORT

3361 15-053271-02 TUBE INJECTOR

3362 15-149982-00 RING

3363 15-150002-00 RING GUARD LTM HDP300

3364 15-335327-00 SHOWER HEAD CRF

3365 02-300478-00 ASSY,PED,BRAZED,IXT PVD HEATER

3366 02-109622-00 ALTUS ACTUATOR ASSY,LIFT PIN

3367 02-159137-00 ASSY, COOL PED.(K-0344)

3368 02-160858-00 ASSY, COOL PED.(K-0345)

3369 02-252432-00 ASSY,SPINDLE,INDEX 270, K-0500

3370 02-255281-00 ASSY, COOL PED LIFT, LDLK, V

3371 17-192026-00 GAS BOX SHUTTER PLATE

3372 15-00399-03 Screw Top Spindle

3373 15-108307-00 Clamp RF Strap

3374 20-00212-00 Nut,8-32UNC-2B,Alum

3375 15-118061-00 Ring Manifold Adjustable

3376 15-033874-00 Plug,Injector,Manifold

3377 15-00309-01 Hanger,Nozzle,1.50"(200MM)

3378 15-00685-00 Feed Thru Inner

3379 15-00229-00 Nut Feed Through 1/2-20UNC*.25

3380 15-00027-02 Guide,Nozzle,Adjuster

3381 27-050054-20 Zig,Turbo Pump Speed

3382 15-00410-00 Filer UV Lean

3383 60-281680-00 Screw,RPC Clamp

3384 60-281681-00 Clamp Plate,RPC

3385 60-281682-00 Center Ring,RPC Clamp

3386 60-281683-00 Ferrule,1/8 ALL Set

3387 60-281684-00 Manifold 3-Way,RPC

3388 60-281685-00 Nut,Manifold RPC

3389 60-281686-00 Endcap,RPC Manifold

3390 15-11188-00 Window,Hatch

3391 21-250660-00 Insert Plate Screw

3392 15-00686-00 Washer,Feedthru,1/2 ID,Alum

3393 26-82317-00 HANDLER(AME)

3394 15-00457-00 HEATER STRAP-SCREW

3395 15-00385-00 NUT

3396 15-103913-01 FEEDTHRU COPPER

3397 15-103987-00 STRAP ,RF

3398 15-103913-02 CLAMP STRAP FEEDTHRU

3399 15-00935-00 SCREW #10-32*0.50L

3400 15-108307-05 CLAMP RF STRAP

3401 15-114331-00 SCREW 1/4-20*0.5L

3402 15-108174-00 CUP SCREW COVER

3403 15-00700-00 FORK BOTTOM PLATE

3404 15-00702-00 FORK TOP PLATE

3405 05-50028-00 SHOWERHEAD 6"

3406 15-00730-00 FLANGE KEYED

3407 15-00401-00 SHAFT SPINDLE

3408 15-00931-00 PLATE RING LIFT EXCL OPTION

3409 15-052614-001 INDEXER 150mm W/Ni PINS

3410 15-00216-00 SINGLE GROUND STRAP

3411 15-00654-00 CLAMP

3412 15-00399-04 SCREW 1.02 LG TOP SPINDLE

3413 15-00399-05 SCREW 1.12 LG TOP SPINDLE

3414 15-00698-00 SCREW ,FORK

3415 15-00721-00 WASHER

3416 15-00386-00 WASHER

3417 15-00951-00 CUP SCREW COVER

3418 15-00701-00 FORK BOTTOM PLATE 6"

3419 15-00703-00 FORK TOP PLATE 8"

3420 03-00258-00 SHOWERHEAD 8"(W)

3421 03-00255-00 SHOWERHEAD 6"(W)

3422 15-024881-00 FORK TOP AL COVER

3423 15-164412-00 INSERT ,SPLIT, OUTER,C2

3424 15-164413-00 INSERT ,SPLIT, INNER,C2

3425 15-101482-00 FORK TOP PLATE-A

3426 15-101482-01 FORK TOP PLATE-B

3427 15-101482-02 FORK TOP PLATE-C

3428 17-101596-00 FORK RETAINER

3429 15-00729-00 CLAMP PLATE

3430 15-032631-00 FLANGE KEYED

3431 15-258837-00 CLAMP RF STRAP

3432 15-171466-00 WAFER LIFTER ASS,Y

3433 15-00653-00 CLAMP HOUSING

3434 1D10-201429-15 UPPER ELECTRODE

3435 1D10-101475-12 TAPER BAFFLE PLATE

3436 1D10-303124-14 SHIELD DEPO 85-2

3437 1D10-200733-11 RING SHIELD

3438 1D10-202204-12 UPPER ELECTRODE

3439 1D10-100854-15 BAFFLE PLATE

3440 ID10-303124-21 SHIELD DEPO 85-2

3441 1D10-201588-12 UPPER ELECTRODE

3442 1D10-202177-12 UPPER ELECTRODE

3443 1D10-300188-12 COVER BELLOWS A-6

3444 1D10-102430-13 PLATE BAFFLE M-3 (Y2-Y)

3445 1D10-203551-13 UPPER ELECTRODE P-Y

3446 1D10-313213-11 SHIELD DEPO 85-M2 (Y2-Y)

3447 1810-121989-11 COOLING PLATE

3448 1D10-308540-12 SUPPORT SHILD DEPO CE-Y

3449 3D10-101152-13 SHUTTER BTM TYPE SE

3450 3D10-100844-11 RING,BTM SHIELD SE

3451 3D10-100845-11 PLATE EXHAUST SE

3452 3D10-101195-11 SHIELD DEPO

3453 3D10-302734-12 WINDOW PLATE(DEPO SHILD)

3454 1D10-101680-13 UPPER ELECTRODE P-3

3455 1810-221024-14 UPPER COOLING PLATE

3456 1D10-090060-TM BELLOWS COVER TOP

3457 1D10-303124-21 SHIELD DEPO 85-2

3458 1D10-311417-12 SHUTTER INNER

3459 1D10-100907-12 BOTTOM COVER

3460 1D10-302209-15 FOCUS RING 8"

3461 1D10-103201-11 BAFFLE PLATE

3462 1D10-101398-12 BAFFLE PLATE

3463 1D10-202988-11 COVER BELLOWS A-4

3464 1D10-302586-12 COVER BELLOWS B

3465 1810-224912-11 COOLING PLATE

3466 1810-221584-12 UPPER COOLING PLATE

3467 1805-320140-11 COVER RING INNER

3468 1805-220177-22 RING SHIELD

3469 3D10-101194-12 SHIELD DEPO

3470 3D10-101187-13 SHIELD PLATE

3471 1D10-309697-11 WINDOW PLATE(DEPO SHILD)

3472 1810-325569-13 EXHAUST PLATE (UP)

3473 1810-220952-14 COOLING PLATE

3474 1810-224220-12 COOLING PLATE (HOLE Modify)

3475 1010-201588-12 UPPER ELECTRODE

3476 1810-121366-11 AL DEPO SHILD RING(P/C1)

3477 1810-121367-11 AL DEPO SHILD RING(P/C2)

3478 1810-326593-15 SCREW COVER A-C

3479 1010-101475-11 PLATE BAFFLE

3480 1810-121857-12 PLATE BLOCK

3481 1810-121786-12 PLATE RF

3482 1810-121692-12 SHIELD DEPO UPPER-AL P2

3483 1810-224473-13 RING,OUT

3484 1810-328284-12 COVER SCREW A-AL CHAMB

3485 1810-121677-12 PLATE EXHAUST T6 EXH S850DI

3486 1810-431128-11 SCREW

3487 1810-224611-11 SLIT PLATE EXH W1.6 P3

3488 1810-328318-11 AL WALL CHAM(UP) (GND) (STEMP)

3489 1810-328319-11 AL WALL CHAM(LOW) (GND) (STEMP)

3490 1810-328321-11 AL WALL CHAM (L) (GND) (STEMP)

3491 1810-328320-11 AL WALL CHAM (R) (GND) (STEMP)

3492 1810-224951-11 RING, CENTERING TYPE-1

3493 1810-121899-12 PLATE EXHAUST T6 AN

3494 1810-121591-14 LINER A EXH,AN

3495 1810-327572-14 LINER B EXH

3496 1810-329303-11 COVER, BELLOWS A (AD),AN

3497 1810-329022-13 LINER ADAPTER (AL) TYPE 2

3498 1810-224953-12 LINER C GATE CHAMB, AN

3499 1810-329078-11 COVER SCREW A-AL AN

3500 1810-329079-11 COVER SCREW B-AL AN

3501 1810-121903-11 SHIELD DEPO UPPER P1,AN

3502 1810-121898-11 SHIELD DEPO LOWER ,AN

3503 1810-329064-12 WINDOW , AL-3, AN