17 Fiber Based High Pwr Lasers-Galvanauskas

EUV Source Workshop, San Diego, November 10th, 2005

High Power Pulsed High Power Pulsed Fiber LasersFiber LasersAlmantas GalvanauskasAlmantas Galvanauskas

University of MichiganUniversity of Michigan


CoauthorsCoauthors

University of MichiganUniversity of MichiganAghapi Mordovanakis, KaiAghapi Mordovanakis, Kai--Chung Hou , Chung Hou , YuYu--Chung Chang, John Nees, Bixue Hou, Chung Chang, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard MourouAnatoly Maksimchuk, Gerard Mourou

University of Central FloridaUniversity of Central FloridaProf. Martin RichardsonProf. Martin Richardson


Fiber Laser Technology Fiber Laser Technology High Power Fiber Laser Sources:High Power Fiber Laser Sources:

Very high Very high cwcw powers already achieved:powers already achieved:SingleSingle--emitter singleemitter single--mode 3 kWmode 3 kW>20 kW from combined>20 kW from combined--fiber sourcefiber source

Practical technology:Practical technology:Robust and compactRobust and compactEfficient (20% Efficient (20% -- 40% electrical40% electrical--toto--optical)optical)ReliableReliableLow costLow cost

Pulsed Fiber laser LPP Sources•ns pulses Achievable intensities on target: 1010 - 1011 W/cm2

already demonstrated 1% CE EUV generation with FLPP


Fiber Laser Power RevolutionFiber Laser Power Revolution

0

500

1000

1500

2000

1992 1994 1996 1998 2000 2002 2004 2006

Year

Sing

le-m

ode

cw p

ower

, W

SDL IPGJena

SPIMichigan

SPI

IPG


Origin of Fiber Laser Power Origin of Fiber Laser Power Revolution Revolution -- Thermal Advantage:Thermal Advantage:High surfaceHigh surface--toto--volume volume ratio:ratio:

R

surfacevolume = 2/R

typically R ~ 200 - 400 μm

High Optical EfficiencyHigh Optical Efficiency

0

300

600

900

0 400 800 1200

Coupled pump power, W

Lase

r out

put,

W

Yb-fibers 70%-80%


Pulsed Fiber Laser Energy MapPulsed Fiber Laser Energy Map

0.001

0.01

0.1

1

10

100

0.001 0.01 0.1 1 10 100

Pulse duration, ns

Puls

e en

ergy

, mJ

100 W

1 kW10

kW100 k

W1 MW

3.7 MW –

Self-Focusing Lim

it

Southampton

IMRA

Jena

MichiganSingle ModeSingle Mode

Multi ModeMulti Mode

UofMUofM::2.4 MW MM 2.4 MW MM (4(4--ns)ns)82 82 mJmJ MM MM (500(500--ns)ns)

~1 MW SM ~1 MW SM (1(1--ns)ns)9 9 mJmJ SM SM (10(10--ns)ns)

AculightFiberTek

LPP requirements


Demonstration of Pulsed Fiber Laser EUV Demonstration of Pulsed Fiber Laser EUV Generation @ 13.5Generation @ 13.5--nmnm

2% bandwidth at 13.5nm

34nm22nm13.5nm10nm

Intensity on target ~10Intensity on target ~101010

W/cmW/cm22

Conversion Efficiency: 0.9 Conversion Efficiency: 0.9 % within 2% within 2ππ

Currently Currently -- up to 2x10up to 2x101111

W/cmW/cm22 on target on target →→conversion is only target conversion is only target limitedlimited

EUV Spectrum


nsns--Pulsed Single Fiber Laser EUV Pulsed Single Fiber Laser EUV DriverDriver

AOM

SM AmplifierSM Amplifier

980nmPump diode

Band-pass filter

50/350um Yb-doped MM Amplifier, 1.4m

115/350um Yb-dopedMM Amplifier, 2.7m

980nmPump diode

1064nm Seed diode

50Hz

Band-pass filter

200W915nmpumpdiode

50W980nmpumpdiodeProtection

end-cap


Flexibility of DiodeFlexibility of Diode--Seeded Fiber Seeded Fiber SystemSystem

Arbitrarily controllable pulse durationArbitrarily controllable pulse durationElectronically defined 1ns Electronically defined 1ns –– >100ns at the output>100ns at the output

Arbitrarily selectable repetition rateArbitrarily selectable repetition rateFrom < 1From < 1--kHz to > 1kHz to > 1--MHzMHz

Electronically controllable pulse shapeElectronically controllable pulse shape


Power Scaling Strategy for 10kWPower Scaling Strategy for 10kW--20kW Laser Source20kW Laser Source

λ1

λ2

λn

Single fiberIntegrated system0.5kW – 1kW

Spectrally combinedblock (SC)2.5kW – 5kW

Spatially mutliplexedSC blocks10kW – 20kW


Operational CharacteristicsOperational Characteristics

Single Emitter Spectrally-Combined (SC)

Spatially Multiplexed

Pulse energy 4mJ – 10mJ*4mJ

20mJ – 40mJ*20mJ

80mJ – 160mJ*80mJ

Pulse duration 5ns – 10ns*5ns

Repetition rate 1kHz - >1MHz*100kHz

Power 0.5kW – 1kW*0.5kW

2.5kW – 5kW*2.5kW

10kW – 20kW*10kW

Beam quality M2 = 1.1 – 10*1.1

M2 = 1.5 – 12*1.5

________


Pump diode costs (current and Pump diode costs (current and projected)projected)

Diode type/Diode type/

configurationconfiguration

Current priceCurrent price Projected priceProjected price**

Diode Bars:Diode Bars:

chipchip--onon--mountmount

fiber coupledfiber coupled

15 15 -- 25 $/W25 $/W

~100 $/W~100 $/W

5 5 –– 8 $/W8 $/W

15 15 –– 24 $/W24 $/W

Single emitters:Single emitters:

chipchip--onon--mountmount

fiber coupledfiber coupled

10 10 –– 20 $/W20 $/W

30 30 –– 60 $/W60 $/W

~2 $/W~2 $/W

~10 $/W~10 $/W

*Projection is based on expected radical changes in the industry:(a) full capacity operation of semiconductor foundries (compared to 10%-20% currently), and (b) automation of optical assembly and fiber pig-tailing processes.


Estimated High Power Fiber Laser Estimated High Power Fiber Laser CostCost

SingleSingle--emitter emitter diode diode pumping pumping costcost for 10for 10--kW kW laser:laser:

Current:Current:625k$625k$

Projected:Projected:125k$125k$

Individualpumps

Signal Signal

Total cost of 10kW – 20kW source:1M$ (10kW) - 2M$ (20kW)

Individual fiber amplifier stage


Efficiency and reliabilityEfficiency and reliability

SingleSingle--emitter diode lifetime >emitter diode lifetime >200.000 hours200.000 hours MTBF MTBF (best claim at present);(best claim at present);>40.000 hours>40.000 hours (conservative).(conservative).

Overall plugOverall plug--wall efficiency:wall efficiency:25% to 40%25% to 40%

Heat dissipation in the laser:Heat dissipation in the laser:<30%<30% (due to >70% optical efficiency)(due to >70% optical efficiency)


Commercial 20Commercial 20--kW kW cwcw multiplexedmultiplexed--fiber sources are available alreadyfiber sources are available already

Nominal laser power 20.0 kW(at the workpiece)

Maximum laser power 21.0 kW

Wavelength: 1070 nm

Fiber core: ø 200 µm

Fiber Length up to 50m

BPP 11mmxmrad

Foot Print 800 x 1.460 mm

Height 1.500 mm

Cooling capacity 64 kW

Wallplug Efficiency > 29%

Nominal laser power 20.0 kW(at the workpiece)

Maximum laser power 21.0 kW

Wavelength: 1070 nm

Fiber core: ø 200 µm

Fiber Length up to 50m

BPP 11mmxmrad

Foot Print 800 x 1.460 mm

Height 1.500 mm

Cooling capacity 64 kW

Wallplug Efficiency > 29%

YLR-20000

Model YLR-20000-P by IPG Photonics


Qualitative Comparison of Qualitative Comparison of Lasers for Material ProcessingLasers for Material Processing

Courtesy: S. Heinemann, Fraunhofer USA


Main challengesMain challenges

HighHigh--Power Fiber Laser Driven EUV Power Fiber Laser Driven EUV generation is needed!generation is needed!

Fiber laser + Practical Target (Fiber laser + Practical Target (SnSn droplet)droplet)~10W EUV in less than 1 year~10W EUV in less than 1 yearDemonstrate scalability into >100W EUV Demonstrate scalability into >100W EUV


SummarySummary

High power fiber lasers High power fiber lasers –– a new pathway to a new pathway to affordable high radiation power for EUV affordable high radiation power for EUV lithographylithography

10kW 10kW -- >20kW average powers>20kW average powersAffordable (1M$ Affordable (1M$ -- 2M$)2M$)Efficient (25%Efficient (25%--40% PWE and low heat dissipation)40% PWE and low heat dissipation)Small footprint (~10 Small footprint (~10 sqftsqft))

This work is partially supported by SRC through Task #1180.001.This work is partially supported by SRC through Task #1180.001.

17 Fiber Based High Pwr Lasers-Galvanauskas

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