[1.3] Display 제조기술 Overview

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TFT-LCD 제조중심

300 ㎛

Common Electrod One Pixel

Data Line

Pixel Electrod

Gate Line

)

) Color Filter Substrate

TFT Substrate

TFT-LCD Panel 구조

2

TFT Panel

Color Filter

Panel

R G B R G B

R G B R G B

R G B R G B

TFT LCD 제조 Process

① TFT Panel & CF Panel 제조

3

TFT Panel

Color Filter

Panel

액정주입

Assembly

R G B R G B

R G B R G B

R G B R G B

TFT LCD 제조 Process

① 액정주입

4

TFT LCD 제조 Process

③ PCB Attach

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④ TFT-LCD Module 공정 (Panel + PCB + Backlight + Frame)

BLU

Top Chassis

Backlight

LCD Module 6

Aging Electric Test Visual Test

⑤ Module Test

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1. LCD module consists of

TFT- Color filter - LC - Module(ic, PCB, Back light unit) assembly

2. TFT- LCD : semiconductor process + LC + module assembly

+ visual inspection

3. Material cost is very high > 60%

4. Assembly of PCB/Back light unit takes a large business

portion and occupies heavy material cost

The Nature of LCD Manufacturing Business

Uniqueness of LCD business

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반도체와 조립業의 성격을 보유

FPD 산업의 특성

기술측면 :이질적인 기술의 복합체

High Investment(FAB)

재료비 비중 60%

반도체 특징 조립업 특징

액정기술

반도체 기술

광학기술

Integration Technology

사업측면 : 양 사업의 특성을 모두 보유

Color Filter 액정 TFT

Lamp

■ Why we name ‘TFT’?

1.0. Introduction to a-Si TFT (Thin Film Transistor)

MOSFET vs (Metal Oxide Semiconductor Field Effect Transistor)

TFT (Thin Film Transistor)

Glass substrate P-type Si substrate

Gate insulator Gate Source Drain

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Yield=89.7%(35/39) Yield=96.2%(100/104)

Net Die: 39 Net Die: 104

Productivity of c-Si Semiconductor

Net Die: 224

Yield=96.8%(217/224)

Chip Shrink Larger Wafer

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Yield=50%

4 panel/glass

Yield=66.7%

6 panel/glass

Yield=83.3%

12 panel/glass

Productivity of TFT-LCD

Larger

Glass

Larger

Glass

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Manufacturing Cost Analysis

Total Manufacturing Cost = Materials cost

+

Equipment Depreciation

+

Labor

+

Expense

Total

Cost

Total

mfg.

Cost

Over head

Expense Labor

Depreciation

Material cost

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Module Cost Analysis (Material cost)

Total Module Cost = Materials cost > 60%

- Glass (3%)

- CF (15%)

- polarizer (2%)

- LC (2%)

- Back light (13%)

- Driver ic (15%)

+

fabrication cost (~ 30%)

Material cost

Glass

3% CF

17%

Pol

2%

LC

2%

Back light

13%

Driver

15%

PCB

2%

misc material

14%

Fabricaion cost

32%

[Source : ED Research 97]

Base 14.1 XGA

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Lamp Reflector

Lamp PCB

(Source)

Top Chassis

LCD Panel

Plastic Mold Frame

PCB

(Gate)

Gate TCP

(Flat Type)

Source TCP

(Bent Type)

BEF Diffuser LGP Reflector Sheet

Assembly structure of a TFT-LCD Module

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제조 (Manufacturing) vs 공정 (Process)

What is Display Manufacturing Technology?

• 제조기술 : 효율성, Speed, 수율, Cost, 라인 operation, Input Output 관리 개념을

포함하는 포괄적인 개념.

What is Display Process Technology?

• Thin Film Process, 미세 Pattern 공정을 통해서 Architecture를 결정하고

Panel 및 Module을 만드는 과정. (공정 + 검사기술)

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Panel Cost Down Approach

- Larger Glass Size

- Glass area utilization

- Improve Cost of Ownership

Shorten TAT (Turn Around Time)

Shorten Transportation distance

- Process Simplification

TFT Process reduction (7 5 4 mask step)

Automation : LC & Module line

- Reduce number of parts

- Material reduction

Spin coating slit coating

Recycling

Productivity

Cost saving

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Ex1) Mother Glass Size vs productivity

1 3

1.45 3.6

11.45

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Gen1

Gen 3 Gen 3.5

Gen 4

Gen 2

Gen 5

Gen 1 Gen 2 Gen 3 Gen 3.5 Gen 4 (Gen 5)

300x400 370x470 550x650 600x720 730x920 1000X1200 680x880 1100x1250 main product 10.4” 12.1”/15” 14.1” 14.1”/17” 15”/17” (x4) (x6) /(x4) (x6) (x9) / (x6) (x15)/(x12)

5.6

5.0

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Device

15.0 XGA

15.0 SXGA+

17.0 SXGA

730 x 920

68.4%

71.5%

87.7%

19.0 UXGA 65.3%

13.3 XGA

14.1 SXGA+

78.4%

86.9%

21.3 UXGA 89.3%

Substrate Utilization Rate in 730x920 Ex2)

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1.3.2. TFT-LCD 제조 Process Flow

Fab

Shipping Module Assembly

Test

Module Test Final Inspection

Repair

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LCD Fab 설비

LCD Clean Room

Glass handling Robot Arm

Glass 세정장비 Wet Stripper 장비

PECVD

Glass handling Robot Arm

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Clean Room

• Clean Room Class

TFT-LCD Fab environment

- Class 1000 ~ 1,000 particles/ft3 (0.5 um or larger)

* 머리카락 직경 ~ 100um

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① Fab 공정

TFT & CF Panel Fabrication

R G B R G B

R G B R G B

R G B R G B

② Panel Test & Repair

Timing Control ASIC

Panel Test Repair

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TFT Panel

Color Filter

Panel

액정주입

Assembly

R G B R G B

R G B R G B

R G B R G B

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③ 액정공정

④ Package (Attach Driver ic’s and PCB to Panel)

Timing Control ASIC

LVDS

Column Driver

ic

Control PCB

TFT/CF Panel

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Chassis

CCFL

LGP Reflector Diffuser Prism Sheets(BEF) PCF

Polarizer

C/F Glass

TFT Glass

⑤ TFT-LCD Module 공정 (Panel + PCB + Backlight + Frame)

BLU

Top Chassis

Backlight

LCD Module 31

Aging Electric Test Visual Test

⑥ Module Test

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Test & Inspection

Array Test - Cell test - Module Test - Final Test

Array test

Visual Inspection

Module test

Aging Test

Final Inspection st

TFT/CF panel defect detection by Optical & Electro-optical method

After LC fill; before drive ic attach

After drive ic & PCB attached; inspect w/ real driving circuit

Reliability & screening at high Temp. Accel. Test

Final test to check cosmetic & screen uniformity etc.

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Yield and It’s Effect on Loss

Cum Yield = Y(panel) x Y(LC) x Y (Module)

Array test

Module test

Final Test

Visual Inspection

-TFT panel

- CF panel

- TFT/CF/LC filled

- Assembled panel+ic+PCB+BL

- Assembled panel+ic+PCB+BL

Early detection of defects

& rejection of Panel

is cost saving way

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LCD 제조 경쟁력

• 생산성 (Mother Glass size 효율성)

• Cost (제조원가)

• 제조 Speed

• 수율

• 공정 단순화 (6 mask - 5Mask - 4 mask 공정)

• 재료선정 (배선 Metal line selection, Cu, Al..)

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2200

1250 1850

Gen-6

2X

3X

Gen-5 1100

1500

32”

32” 32”

32” 32”

32”

32”

32”

1870

40”

40”

40”

40”

Gen-7

40” 40”

40”

40”

- 가장 효율적인 Glass Size 선택

- 공정단순화 기술 집중

- 가장 효율적인 Glass Size 선택

- 공정단순화 기술 집중

LCD 의 생산성과 Mother Glass size

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삼성 Crystal Valley (아산 1단지)

Gen.10 LCD Plant

Sharp Sakai G10 Plant

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