九州大学 超顕微解析研究センター–°超高圧電子顕微鏡 New High Voltage TEM...

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The Ultramicroscopy Research Center 九州大学 超顕微解析研究センター Since 1975 Kyushu University

Transcript of 九州大学 超顕微解析研究センター–°超高圧電子顕微鏡 New High Voltage TEM...

The Ultramicroscopy Research Center

九州大学 超顕微解析研究センター Since 1975

Kyushu University

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Mission of The URC・・・・・・・・・・・・・・・・・・・・・・・・・・・・ P.30

Main equipment of The URC・・・・・・・・・・・・・・・・・・・ P.40

Flow-chart of Cooperative Utilization・・・・・・・・・・・・ P.10

Proposal/Application of Research Project・・・・・・・・・・・・・・・・・ P.11

Training Courses・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ P.12

Booking equipment・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ P.13

List of Charges for Use of Equipment・・・・・・・・・・・・・・・・・・・・ P.14

Submission of Records and Manuscripts・・・・・・・・・・・・・・・・・・ P.15

Collaborative use for researchers outside of KU・・ P.16

Map & Access ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ P.18

Staffs and Contact of the URC ・・・・・・・・・・・・・・・・・・ P.19

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• Sharing facilities to academic staff and students of Kyushu Univ.

• Also sharing to researches inside and outside Japan.

Offering Advanced Equipment and Techniques

• Publication of the research outcomes.

• Technical support and training courses for users.

Accelerating Edu. and Res. advancements in KU.

• Installation of latest model EMs.

• Cooperation in technique developments.

Development of advanced EMs and analytical techniques

4 JEM-3200FSK JEM-ARM200F JEM-ARM200CF JEM-2100HC JEM-2000EX

Tecnai-G20

Tecnai-G20F

JEM-1300NEF Micro-calorie meter SEM

Dual beam FIB

3D-tomography TEM Cs-corrected STEM/TEM Conventional TEM High Contrast TEM

High Voltage TEM (1.3MV)

Analytical TEM

Lorentz TEM

新超高圧電子顕微鏡

New High Voltage TEM

(JEM-1300NEF)

High voltage transmission electron microscope equipped with an

omega-type energy filter and a high solid angle SSD type X-ray

detector. Observation of chemical composition and bonding states

as well as magnified images are available. It is possible to observe

inorganic or metal specimens as thick as several μm and to

analyze 3 dimensional tomography.

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3次元観察用電子分光型電子顕微鏡

3D tomography TEM

(JEM-3200FSK)

An analytical electron microscope equipped with an Si(Li) type

X-ray detector and an omega-type energy filter. An asymmetric

magnetic pole-piece is adopted for its objective lens which

allows dark-field imaging without visual field cutting. A double tilt

(x and y axes) and rotation (z-axis) holder fits analysis of 3D

tomography. A heating stage and cooling stage are available.

広電圧超高感度原子分解能電子顕微鏡

Atomic Resolution Analytical TEM (JEM-ARM200CF)

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収差補正走査/透過電子顕微鏡

Cs-Corrected STEM/TEM

TEM(JEM-ARM200F)

Atom resolution analytical electron microscope equipped with

double Cs correctors operated at 60, 80, 120 and 200 kV. A high

efficiency SDD type X-ray detector ( solid angle of 0.8 sr) is

attached along with a GIF Quantum energy filter. Observation of

HAADF, BF or ABF-STEM images is available in addition to

atomic resolution elemental mapping and analysis of electron

energy state.

An advanced version of ARM200F equipped with a cold-field

emission electron source and two hexapole-type Cs correctors.

It also offers the latest GIF Quantum energy filter for EELS as

well as a high efficient dual XEDS system with a collection solid

angle close to 2 sr. The whole instrument is tuned for operation

at accelerating voltages of 30, 60, 80, 120 and 200 kV, allowing

a wider range of materials to be examined with atomic level

resolution.

ローレンツ電子顕微鏡

Lorenz TEM

(TECNAIG2-F20)

An analytical electron microscope with a Schottky type field

emission source. A Si(Li) X-ray detector is attached for EDS.

Observation of STEM images of BF or HAADF is available. The

STEM mode is suitable for elemental mapping and 3 dimensional

tomography of crystalline material. Lorentz microscopy is possible

for observation of magnetic material.

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デジタル電子顕微鏡

Digital TEM

(TECNAIG2-20)

A transmission electron microscope equipped with a Si(Li) type X-

ray detector. STEM mode is available. Elemental mapping and

3D tomography are possible in addition to conventional TEM

bright field or dark field imaging. A heating stage and cooling stage

(Liquid N2) are available.

マイクロカロリーメーター

高エネルギー分解能元素分析装置

Micro-Calorimeter FESEM

(SII TES+Zeiss-ULTRA55)

A micro-calorimeter X-ray detector is attached to a high resolution

Scanning Electron Microscope (SEM) along with a SDD type X-

ray detector. The micro-calorimeter uses the transition edge of

superconductor cooled below 0.1K by using a dilution refrigerator.

The energy resolution of X-rays are 10 eV at an acceleration

voltage of 6 kV. The machine is suitable for identification of

elements included in multicomponent bulk material.

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汎用電子顕微鏡

Conventional TEM

(JEM-2000EX, JEM-2100HC)

Conventional TEMs with an acceleration

voltage of 200kV. JEM-2100HC has a 16

mega pixel CMOS camera to capture

digital TEM images.

JEM-2000EX

Conventional TEM

JEM-2100HC

High Contrast TEM

Name of equipment Performance

DITABIS micron (Imaging Plate system) TEM image readout to digital data with a high dynamic range of 5 orders.

Name of software PC Performance

Mac Tempas X Mac Simulation of HREM image and diffraction pattern

Crystal Kit Mac Drawing of crystal models

jems Win Simulation of HREM image and diffraction pattern and CBED

Crystal Maker Win Drawing of crystal models and diffraction patterns

ICDD View 2014 Win Former JCPDS, Identification of crystal structure, International Data base of crystals

Temography Win Reconstruction of 3D structure from tilted series of images

Inspect3D Win Reconstruction of 3D structure from tilted series of images

Amira Win Reconstruction of 3D structure from tilted series of images

Software for analysis of image and diffraction

TEM image recording

Name of equipment Performance

FEI Quanta 3D 200i

(Dual beam FIB)

Focused Ga ion beam milling system is combined with a scanning electron

microscope. Cutting and slicing is possible by observing the SEM image of a

sample. Pin-point sampling of he desired region is possible with this system.

Gatan PIPS, JEOL IonSlicer

Fischione TEM Mill, Nano Mill Preparation of thin TEM specimens by Ar ion milling, Acceleration voltage, Ion

beam illuminating angle. Probe sizes are different from machine to machine.

We also have a DARKROOM for film development

TEM specimen preparation equipment 9

Flow-chart of Cooperative Utilization

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Proposal/Application of Research Project

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○Fill up a prescribed form

and submit it to the Office

of The URC.

○The project leader should

be an academic staff who

has a budget / fund for the

payment.

○A copy of the prescribed

form is available from the

WEB site, or at the Office

of The URC.

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Training Courses

○The URC offers training courses

for users. ○ Training courses consist of

(a) Introductory

(b) Elementary

(c) Middle

(1) HVEM, (2) Analytical TEM,

(3) High resolution TEM,

(4) Electron diffraction,

(5) Specimen preparation with FIB,

(6) TEM tomography

(7) Analytical SEM

○ Beginners should take

"Introductory" and "Elementary"

courses at least, in principle.

The training courses are offered by URC and HVEM-Forum, cooperatively. Information on the schedule of courses, etc., is available in the WEB site of The URC.

ふりがな 身 分

受講者氏名

所属部局・部門

(学生は指導教員名を

記入)

指導教員名*注1

九州大学超高圧電顕室

利用申請状況

該当の枠に✓を付けてください。

□ 利用申請済み

□ 後日利用申請予定

電話番号 所属連絡先 自宅(携帯)

ファックス

電子メール

※携帯メール不可

(受講日のお知らせは通常メールで行います。申請された方は必ずメールでの案内確認を行ってください。)

X線取扱講習 あり なし(超高圧電子顕微鏡の使用に際

しては必要となります)

受講希望日を別紙スケジュール表参照の上、第3希望までご記入下さい。

□ 第1希望

□ 第2希望

□ 第3希望

□ 第4希望以降(あればご記入下さい)

*注1 学生の方は、指導教員の承認を得た上で申請してください。

九州大学超高圧電子顕微鏡室利用者研修会参加申請書

九州大学

超高圧電子顕微鏡室講習会受付宛(E-mail添付 可)

13 Booking equipment

○ Booking reservation for equipments is

necessary. ○ Book from the request form on the WEB

site.

○ Always fill in your request date and time

up to the THIRD preference.

In case of same multiple requests or

sudden troubles of equipment, you

maybe asked to shift to another time or

day. ○ Submission of requests are due 9:00AM

of Friday of the preceding week of your

using.

○ Time table of the allocated reservations

will be noticed on the WEB site, uploaded

by the evening of Friday of the preceding

week.

○ When you have to cancel your reservation

inevitably, contact to the URC office AS

SOON AS POSSIBLE.

○ If you cancel without any notice, you will

be banned and will NEVER be able to

make further reservations.

WEB site http://www.hvem.kyushu-u.ac.jp/

Click here for booking

Equipment and Consumables Charge/Price

JPY / time-unit*

1 Old HVEM (JEM-1000) ¥ 8,400 .

2 New model of HVEM (JEM-1300NEF) ¥ 11,300 .

3 3D-tomography TEM (JEM-3200FSK) ¥ 10,000 .

4 Lorenz TEM (TECNAI-F20) ¥ 8,600 .

5 Digital TEM (TECNAI-20) ¥ 8,300 .

6 Dual-beam FIB/SEM (FEI Quanta 3D 200i) ¥ 6,200 .

7 Micro-calorimeter EDS FE-SEM

(Zeiss ULTRA55 + SII-nanotechnology) ¥ 6,800 .

8 Abberation corrected TEM (JEM-ARM200F) ¥ 9,100 .

9 Atomic Resolution Analytical TEM

(JEM-ARM200CF)

¥ 9,400 .

10 Conventional TEM (JEM-2100HC) ¥ 6,000 .

11 Conventional TEM (JEM-2000EX) ¥ 5,900 .

12 Negative films (Imaging plates) ¥ 260. / sheet

13 Liquid helium ¥ 551. / liter

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* 1 time-unit = 4 hours

List of Charges for Use of Equipments (as July, 2015)

Submission of Records and Manuscripts

○Published papers and presentations

Every project-leader should submit the following at the end of FY.

* Brief results of the research project

* List of publications and presentations related to the use of equipments of

The URC.

○Manuscripts for Annual Reports of The URC.

>Every user and project-leader are invited to submit a

manuscript for Annual Reports of The URC. >Every research project has an obligation to submit one

manuscript at least.

* 2 pages of A4-sheet

* English is recommended.

* The dead-line of submission is the middle of May.

* The manuscript is saved in a form of electronic

document, and uploaded to the Repository of KU.

* A report based on halfway results is also acceptable.

* It needs care when the provision for intellectual

property right and/or originality of article is concerned.

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Collaborative use for researchers outside of KU

Microstructural Characterization

Platform Project started in

early July 2012 commissioned

by the Ministry of Education,

Culture, Sports, Science and

Technology. Objectives and

roles of HVEM Lab. KU project

are to support “Research and

Development of nano-

material“ by opening our

facilities and “Know how” of

analysis to researchers outside

of KU.

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(1)文部科学省 ナノテクノロジープラットフォーム Nanotechnology Platform Project of the Ministry of Education, Culture, Sports, Science and Technology

Advanced Characterization Nanotechnology Platform

E-mail:[email protected] URL:http://nanoplat.hvem.kyushu-u.ac.jp

九州大学学術研究都市推進機構(Organization for Promotion Academic City by Kyushu University)

The Forum for High Voltage Electron Microscopy

HVEM Station Network project started in April

2011, supported by the Ministry of Education,

Culture, Sports, Science and Technology.

Objectives and roles of the project are to

establish collaboration network of the major

institutes for high voltage electron microscopy

in Japan , and to provide top-level unique

characterization. Core universities: Kyushu

Univ., Osaka Univ., Nagoya Univ. and

Hokkaido Univ.

17 (2)文部科学省 超高圧電子顕微鏡連携ステーション

Research Station for High Voltage Electron Microscopy

HVEM Forum is established in 2005 at the Organization for Promotion Academic

City by Kyushu University. The Forum aims at offering technology and

information services to researchers out side of KU. The technology services

consists of (a) Joint use of advanced instruments, (b) Assist and instruction for

observation and analysis, (c) Consulting or collaboration. Users should be a

member of the HVEM Forum.

(3)会員制研究支援組織「超高圧電子顕微鏡フォーラム」

●Members of The URC

Director : Prof. S. Matsumura

Chief manager:Assoc. Prof. K. Yasuda

Chair. Tech. Comm.:Prof. M. Nishida

Ito Campus : Prof. Y. Murakami

Chikushi Campus : Prof. S. Hata

Technician:H. Maeno

●Contact

TEL / FAX : 092-802-3292

E-mail: [email protected]

http://www.hvem.kyushu-u.ac.jp/

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