© 2010 Eric Pop, UIUCECE 598EP: Hot Chips 1 Recap (so far) Ohm’s & Fourier’s LawsOhm’s &...

© 2010 Eric Pop, UIUC ECE 598EP: Hot Chips 1

Recap (so far)

•Ohm’s & Fourier’s Laws

•Mobility & Thermal Conductivity

•Heat Capacity

•Wiedemann-Franz Relationship

•Size Effects and Breakdown of Classical Laws


Low-Dimensional & Boundary Effects

•Energy Transport in Thin Films, Nanowires, Nanotubes

•Landauer Transport−Quantum of Electrical and Thermal Conductance

•Electrical and Thermal Contacts

•Materials Thermometry

•Guest Lecture: Prof. David Cahill (MSE)

© 2010 Eric Pop, UIUC ECE 598EP: Hot Chips

L ~ 200 nm

Si

D

Si

Ox

• Size and Non-Equilibrium Effects− optical-acoustic− small heat source− impurity scattering− boundary scattering− boundary resistance

• Macroscale (D >> L)

• Nanoscale (D < L)

QTkt

TC ss

Qee

evt

e

phon

eq

“Sub-Continuum” Energy Transport

Ox Me

tsi


Thermal Simulation Hierarchy

defect

lattice wave

phononE

D

D ~ L

Waves & Atoms

ContinuumFourier’s Law, FE

Phonon TransportBTE & Monte Carlo

Waves & AtomsMD & QMD

D ~ l

MFP ~ 200 nm at 300 K in Si

q

qqqq

q nnnv

t

n

.

Tkq �

"

Wavelength


Thermal and Electrical SimulationAtomistic

Ph

on

on

s

Diffusion

BTE or Monte Carlo

BTE withWave models

much work

Wachutka

(1994)

Shur (1990)

Apanovich (1995)

Sverdru

p, Ju,

Goodson (2000)

Lai, Majumdar

(1995)

Dri

ft D

iffu

sio

n

BT

EM

om

en

ts

Mo

nte

Ca

rlo

& B

TE

Mo

nte

Ca

rlo

wit

h Q

uan

tum

Mo

del

s

Stratto

n (1962)

Bloetekjaer (1970)

Baccarani (1985)

Rudan (1986)

Jacoboni (1983)

Fischetti (1988)

Electrons

Fu

ll Q

uan

tum

Lundstrom

Datta (1

995)

Winstead (2003)

Isothermal

~1 nm~5 nml

~100 nm~5 nmMFP

phononselectrons


Nanowire Formation: “Bottom-Up”

• Vapor-Liquid-Solid (VLS) growth

• Need gas reactant as Si source (e.g. silane, SiH4)

• Generated through– Chemical vapor deposition (CVD)– Laser ablation or MBE (solid target)

Lu & Lieber, J. Phys. D (2006)


• “Top-down” = through conventional lithography

• “Guided” growth = through porous templates (anodic Al2O3)– Vapor or electrochemical

deposition

Suspended nanowire (Tilke ‘03)

“Top-Down” and Templated Nanowires


Semimetal-Semiconductor Transition

• Bi (bismuth) has semimetal-semiconductor transition at wire D ~ 50 nm due to quantum confinement effects

Source: M. Dresselhaus (MIT)


When to Worry About Confinement

d

2-D Electrons 2-D Phonons

22 2

n n y z

nvk v k k

d

22

*2n

nE

m d

d


Nanowire Applications

• Transistors

• Interconnects

• Thermoelectrics

• Heterostructures

• Single-electron devices


Nanowire Thermal Conductivity

Li, Appl. Phys. Lett. 83, 3187 (2003)

Nanowire diameter


Interconnects = Top-Down Nanowires

SEM of AMD’s “Hammer” microprocessor in 130 nm CMOS with 9 copper layers

Intel 65 nm

Cross-section8 metal levels + ILD

TransistorM1 pitch


Cu Resistivity Increase <100 nm Lines

• Size Matters

• Why?

• Remember Matthiessen’s Rule


Cu Interconnect Delays Increase Too

Source: ITRS http://www.itrs.net

http://www.itrs.net/


Industry Acknowledged Challenges

Source: ITRS http://www.itrs.net

http://www.itrs.net/


Cu Resistivity and Line Width

Steinhögl et al., Phys. Rev. B66 (2002)


Modeling Cu Line Resistivity



Model Applications


Plombon et al., Appl. Phys. Lett 89 (2006)


Resistivity Temperature Dependence


Other Material Resistivity and MFP

• Greater MFP (λ) means greater impact of “size effects”• Will Aluminum get a second chance?!


Same Effect for Thermal Conductivity!

• Material with longer (bulk, phonon-limited) MFP λ suffers a stronger % decrease in conductivity in thin films or nanowires (when d ≤ λ)

• Nanowire (NW) data by Li (2003), model Pop (2004)

0

10

20

30

40

50

60

70

80

0 50 100 150d (nm)

k (W

/m/K

) Thin Si

SiGe NW

Si NW

Thin Ge

Recall:• bulk Si kth ~ 150 W/m/K

• bulk Ge kth ~ 60 W/m/K

Approximate bulk MFP’s:• λSi ~ 100 nm

• λGe ~ 60 nm

(at room temperature)


Back-of-Envelope Estimates

0

10

20

30

40

50

60

70

80

0 50 100 150d (nm)

k (W

/m/K

) Thin Si

SiGe NW

Si NW

Thin Ge

1( )

3k d Cv

C(MJm-3K-1)

λb

(nm)

vL

(m/s)vT

(m/s)kb

(Wm-1K-1)

Si 1.66 ~100 9000 5330 150

Ge 1.73 ~60 5000 3550 60

1 1 1 1

b Gd D

(at room temperature)


More Sophisticated Analytic Models

δ = d/λ < 1 S = (1 – δ2)1/2

Flik and Tien, J. Heat Transfer (1990) Goodson, Annu. Rev. Mater. Sci. (1999)


A Few Other Scenarios

Goodson, Annu. Rev. Mater. Sci. (1999)

anisotropy


Onto Nanotubes…

• Nanowires:– “Shrunk-down” 3D cylinders of a larger solid (large surface area

to volume ratio)– Diameter d typically < {electron, phonon} bulk MFP Λ: surface

roughness and grain boundary scattering important– Quantum confinement does not play a role unless d < {electron,

phonon} wavelength λ ~ 1-5 nm (rarely!)

• Nanotubes:– “Rolled-up” sheets of a 2D atomic plane– There is “no” volume, everything is a surface*– Diameter 1-3 nm (single-wall) comparable to wavelength λ so

nanotubes do have 1D characteristics

* people usually define “thickness” b ~ 0.34 nm

b


Single-Wall Carbon Nanotubes

• Carbon nanotube = rolled up graphene sheet

• Great electrical properties– Semiconducting Transistors

– Metallic Interconnects

– Electrical Conductivity σ ≈ 100 x σCu

– Thermal Conductivity k ≈ kdiamond ≈ 5 x kCu

HfO2

S (Pd) D (Pd)SiO2

top gate (Al) CNT

d ~ 1-3 nm

• Nanotube challenges:– Reproducible growth

– Control of electrical and thermal properties

– Going “from one to a billion”


CVD Growth at ~900 oC


Fe Nanoparticle-Assisted Nanotube Growth

• Particle size corresponds to nanotube diameter• Catalytic particles (“active end”) remain stuck to substrate• The other end is dome-closed• Base growth


Water-Assisted CVD and Breakdown

• People can also grow “macroscopic” nanotube-based structures

• Nanotubes break down at ~600 oC in O2, 1000 oC in N2

Hata et al., Science (2004)

in N2

in O2


Graphite Electronic Structure

b ~ 3.4 Å

aCC ~ 1.42 Å

|a1| = |a2| = √3aCC

http://www.photon.t.u-tokyo.ac.jp/~maruyama/kataura/discussions.html

http://www.photon.t.u-tokyo.ac.jp/~maruyama/kataura/discussions.html

© 2010 Eric Pop, UIUC ECE 598EP: Hot Chips

Nanotube Electronic Structure

31

EG > 0

EG = 0

EG > 0

EG = 0

Colli

ns

and

Avouri

s, S

cienti

fic

Am

eri

can

(2

000)


Band Gap Variation with Diameter• Red: metallic• Black: semiconducting

http://www.photon.t.u-tokyo.ac.jp/~maruyama/kataura/kataura.html

E11,M

E11,M

E22,M

E22,S

E11,S = EG

≈ 0.8/d

Charlier, Rev. Mod. Phys. (2007)

“Kataura plot”

http://www.photon.t.u-tokyo.ac.jp/~maruyama/kataura/kataura.html


Nanotube Current Density ~ 109 A/cm2

• Nanotubes are nearly ballistic conductors up to room temperature

• Electron mean free path ~ 100-1000 nm

S (Pd) D (Pd)SiO2

CNT

G (Si)

Javey et al., Phys. Rev. Lett. (2004)

L = 60 nmVDS = 1 mV


Transport in Suspended NanotubesE. Pop et al., Phys. Rev. Lett. 95, 155505 (2005)

SiO2

Si3N4

nanotube Pt

Pt gate

2 μmnanotube on substrate suspended

over trench

• Observation: significant current degradation and negative differential conductance at high bias in suspended tubes

• Question: Why? Answer: Tube gets HOT (how?)


1

, ,

1 1 1eff

AC OP ems OP abs

Include OP absorption:

Transport Model Including Hot Phonons

),(

),(

4),(

2 TV

TVL

q

hRTVR

eff

effC

0( )OP AC ACT T T T Non-equilibrium OP:

T0

TAC = TL

TOP

RTH

ROP

I2(R-Rc)

0 0.2 0.4 0.6 0.8 1 1.2

300

400

500

600

700

800

900

1000

V (V)

Ph

on

on

Te

mp

era

ture

(K

)

oxidation T

Optical TOP

Acoustic TAC

I2(R-RC)

TOP

TAC = TL

2( ) ( ) / 0CA k T I R R L Heat transfer via AC:

Landauer electrical resistance

E. Pop et al., Phys. Rev. Lett. 95, 155505 (2005)


Extracting SWNT Thermal Conductivity

• Ask the “inverse” question: Can I extract thermal properties from electrical data?

• Numerical extraction of k from the high bias (V > 0.3 V) tail of I-V data

• Compare to data from 100-300 K of UT Austin group (C. Yu, NL Sep’05)

• Result: first “complete” picture of SWNT thermal conductivity from 100 – 800 K

E. Pop et al., Nano Letters 6, 96 (2006)

Yu et al. (NL’05)This work

~T

~1/T

© 2010 Eric Pop, UIUCECE 598EP: Hot Chips 1 Recap (so far) Ohm’s & Fourier’s LawsOhm’s &...

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