Two-modulator generalized ellipsometry:theory—erratum

Gerald E. Jellison, Jr. and Frank A. Modine

In a previous publication �Jellison and Modine, Appl. Opt. 36, 8190–8198 �1997��, three points ofinformation were presented inaccurately. These inaccuracies are corrected here. © 2003 OpticalSociety of America

OCIS codes: 120.2310, 120.6200, 230.5440, 260.1180, 260.2130, 260.5430.

The signs in the Eqs. �16�, �21�, and �23� of Ref. 1needed to be corrected. This results in the followingequations.

1. Change the sign of the IY0X1 term in Eqs.�16a�–�16d�.

Case I: �m0 � �45° and �m1 � �45°

M � �Idc �0sIY0 � IX0

�1sIY1 �0s1sIY0Y1 � �1sIX0Y1

� � � �

IX1 �0sIY0X1 � IX0X1

� . (16a)

Case II: �m0 � �45° and �m1 � 0°, 90°

M � �Idc �0sIY0 � IX0

� � � �

�1cIY1 �0s1cIY0Y1 � �1cIX0Y1

IX1 �0sIY0X1 � IX0X1

� . (16b)

Case III: �m0 � 0°, 90°; �m1 � �45°

M � �Idc � �0cIY0 IX0

�1sIY1 � �0c1sIY0Y1 �1sIX0Y1

� � � �

IX1 � �0cIY0X1 IX0X1

� . (16c)

The authors are with Condensed Matter Sciences Division, OakRidge National Laboratory, Building 3025, MS 6030, P.O. Box2008, Oak Ridge, Tennessee 37831-6030. G. E. Jellison’s e-mailaddress is jellisongejr@ornl.gov.

Received 6 March 2003.0003-6935�03�193765-01$15.00�0

© 2003 Optical Society of America

Case IV: �m0 � 0°, 90°; �m1 � 0°, 90°

M � �Idc � �0cIY0 IX0

� � � �

�1cIY1 � �0c1cIY0Y1 �1cIX0Y1

IX1 � �0cIY0X1 IX0X1

� . (16d)

2. Change the sign of the imaginary component ofthe matrix A �Eq. �21�� resulting in

A � �1 0 0 11 0 0 10 1 1 00 i i 0

� . (21)

3. Change the sign of 2 and �2 in Eqs. �23l� and�23n�, resulting in

2 � �D�2��CspSps � SspCps�, (23l)

�2 � �D�2��CSps � SCps�. (23n)

The authors thank R. W. Collins, Chi Chen, andIlsin An at Pennsylvania State University for bring-ing changes 2 and 3 to our attention.

Reference1. G. E. Jellison, Jr. and F. A. Modine, “Two-modulator general-

ized ellipsometry: theory,” Appl. Opt. 36, 8190–8198 �1997�.

1 July 2003 � Vol. 42, No. 19 � APPLIED OPTICS 3765