SURFACE ENGINEERING 3

Atomic Layer Deposition (ALD) Technology:Innovative Layer-by-Layer Design of New Materials,

State-of-the-Art Surface Engineering & Nanostructuring

Comparison of the coating processes

Principal scheme of ALD

Advantages of ALD (1)

Advantages of ALD (2)

Schematic representation of ALD reactor

Typical films

MLD (Molecular Layer Deposition)