Outline

• Purpose of PEMC

• GE motivation

• Current status of PEMC & Schedule

Acknowledgements; Thanks for “borrowed” slides from:

Brian Sapp, SUNY Polytechnic Institute (Semicon West 2017)

Ljubisa Stevanovic, GE Global Research (APEC 2017)

Peter Sandvik, GE Global Research (Semicon West 2016)

Status:

First full lots in process, out in August

MOSCAPS for oxide verification

MOSFET Development is the integrationof unit step validation

First lots for AECQ101 due in October