div class=trans-pagebuttonPage 1button div class=trans-image amp-img class=trans-thumb alt=Page 1: PII: 0167-93179390080-Ochouwebpublications46 Fischer_RIE High · PB Fischer and SY Chou trenches in silicon and silicon-germanium 0167-93179 The Si wafers are p-type with src=https:reader033fdocumentsnetreader033viewer20220421015e7e381f87012e723f742c29html5thumbnails1jpg width=142 height=106 layout=responsive amp-img divdivdiv class=trans-pagebuttonPage 2button div class=trans-image amp-img class=trans-thumb alt=Page 2: PII: 0167-93179390080-Ochouwebpublications46 Fischer_RIE High · PB Fischer and SY Chou trenches in silicon and silicon-germanium 0167-93179 The Si wafers are p-type with src=https:reader033fdocumentsnetreader033viewer20220421015e7e381f87012e723f742c29html5thumbnails2jpg width=142 height=106 layout=responsive amp-img divdivdiv class=trans-pagebuttonPage 3button div class=trans-image amp-img class=trans-thumb alt=Page 3: PII: 0167-93179390080-Ochouwebpublications46 Fischer_RIE High · PB Fischer and SY Chou trenches in silicon and silicon-germanium 0167-93179 The Si wafers are p-type with src=https:reader033fdocumentsnetreader033viewer20220421015e7e381f87012e723f742c29html5thumbnails3jpg width=142 height=106 layout=responsive amp-img divdivdiv class=trans-pagebuttonPage 4button div class=trans-image amp-img class=trans-thumb alt=Page 4: PII: 0167-93179390080-Ochouwebpublications46 Fischer_RIE High · PB Fischer and SY Chou trenches in silicon and silicon-germanium 0167-93179 The Si wafers are p-type with src=https:reader033fdocumentsnetreader033viewer20220421015e7e381f87012e723f742c29html5thumbnails4jpg width=142 height=106 layout=responsive amp-img divdiv