FPA (focal plane array) Optical Sectioning

Optical sectioning was performed on FPA to extract the topography of FPA side walls

using Acto-S confocal microscope

FPA

FPA side wall image FPA side wall profile achieved through optical sectioning

FPA Optical Sectioning Details

• FPA (focal plane array; real sample) optical sectioning

was achieved through confocal reflection imaging using

Acto-S confocal microscope

• Images were taken with blue laser 405nm, single mode

fiber P-1-405A-FC-5 on laser side and P-1-460A-FC-5

on detection side with 100x objective

• Images were take over the valley between 4 pixels at

every 250nm slice from top to bottom of the pixel over

8 to 10um range in Z (Z is the depth along sectioning

was performed)

• Images were 18X18um and 512X512px

FPA Optical Sectioning Experiment Setup

Acto-S Confocal Microscope

Acto-S

FPA Optical Sectioning Experiment Location

Pixel top .25µm

Data

.75µm.5µm

1.75µm1.5µm1.25µm1µm

2.5µm2.25µm

3µm

2.75µm2µm

3.5µm3.25µm

4µm

3.75µm

4.75µm4.5µm4.25µm

5µm

6µm

5.75µm5.5µm5.25µm

6µm

7.25µm

6.75µm6.25µm

7µm

6.5µm

7.75µm7.5µm

8.75µm8.5µm8.25µm8µm

The data was acquired using CP research system piezo scanner. Scanner performed raster scan from one corner to the other (diagonal corner) of the image and then came back to the startingposition in next scan. During this scanner had shifted so the two consecutive images wereslightly displaced (same features have different pixel numbers). Every odd and even numberimages have same pixel positions. To construct 3D image the features had to be crosscorrelatedwith pixel numbers in all the images.

Pixel top (1) .5µm (3) 1.5µm (7)1µm (5)

.25µm (2) .75µm (4) 1.75µm (8)1.25µm (6)

Images with similar shift (odd and even number)

FPA 3D image produced by the slices

Intersection: Line profiles along X-axis

Line profile (I vs X) at every micron (odd number data set)

Line profile (I vs X) at every .5 micron (odd number data sets)

Line profile (I vs X) at every micron detailed view

Intensity I(X,Z) vs X every data set corresponds to different Z slice, each slice is

half micron apart in Z

Pixel topPixel top.5um

1um

1.5um

2um

2.5um

3.5um

3um

4um

5um4.5um

5.5um

FPA pixel side wall I(Z) vs X (correspond the data points to slide 10)

X

Intersection: Line profiles along Y-axis

Line profile (I vs Y) at every 1 micron (odd number data set)

Line profile (I vs Y) at every .5 micron (odd number data sets)

Line profile (I vs Y) at every 1 micron detailed view

Intensity I(X,Z) vs Y every data set corresponds to different Z slice, each slice is

half micron apart in Z

Pixel top

Pixel top

.5um

1um

1.5um

2um

2.5um 3um 5.5um

Y

Pixel top

Pixel top

.5um

1um

1.5um

2um

2.5um 3um 5.5um

(correspond the intensities in slide 24)

Pixel Pixel

~1µm

~4.5µm

Wall

FPA pixel side wall I(Z) vs Y

(correspond the data points to slide 35)

Pixel Pixel

~1µm

~4.5µm

Wall

FPA pixel side wall I(Z) vs Y

Making of FPA pixel side wall I(Z) vs Y (slide 37)

Steps

1. Select the slope change point on the first line

profile2. Note down the pixel

number3. Put down the slope on

the next line profile and note down the pixel number of the endpoint of slope

4. Do the same for the next consecutive line profiles

5. Do this for all lines on both sides of the profiles

6. Plot pixel numbers with line profile depths (depth at which the profile was acquired)

7. Plot depth vs pixel number

Slope

FPA Multimedia files

Software used: Lab VIEW V 2009 and 2011

Confocal Image Confocal Image processing softwareVI

FPA line profile (I vs X) extraction softwareVI

FPA side wall (I(X,Z) vs X) profile softwareVI