CONTAC III! E! [J KSL

Post on 13-Feb-2017

219 views 0 download

Transcript of CONTAC III! E! [J KSL

US006862223B1

(12) United States Patent (10) Patent N0.: US 6,862,223 B1 Lee et al. (45) Date of Patent: Mar. 1, 2005

(54) MONOLITHIC, COMBO NONVOLATILE 6,307,781 B1 10/2001 Shum .................. .. 365/185.17 6,326,661 B1 12/2001 Dormans et a1. ......... .. 257/315

BLOCK WRITE WITH NO DISTURB AND 6,370,081 B1 4/2002 Sakui et a1. ........... .. 365/238.5 _ 6,400,603 B1 * 6/2002 Blyth et a1. 365/185.12

gglggligggggvgglgggggggggmn B2 .................. .. 6,618,789 B1 * 9/2003 Okaue et a1. 711/103

A 2001/0016040 A1 * 8/2001 Imura ....................... .. 379/354 DECODER AND LAYOUT

(75) Inventors: Peter W. Lee, Saratoga, CA (US); Fu-Chang Hsu, San Jose, CA (US); Hsing-Ya Tsao, San Jose, CA (US); Han-Rei Ma, Los Altos, CA (US); Koucheng Wu, San Jose, CA (US)

(73) Assignee: Aplus Flash Technology, Inc., San Jose, CA (US)

* Notice: Sub'ect to an disclaimer, the term of this J y patent is extended or adjusted under 35 USC 154(b) by 0 days.

(21) (22)

Appl. No.: 10/223,208

Filed: Aug. 19, 2002

Related US. Application Data Provisional application No. 60/394,202, ?led on Jul. 5, 2002.

Int. Cl.7 .............................................. .. G11C 16/04

US. Cl. .......................... .. 365/185.33; 365/185.05;

365/185.17 Field of Search ..................... .. 365/185.33, 185.05,

365/185.17, 185.18, 185.11, 185.12, 185.01, 63, 438/257

(60)

(51) (52)

(58)

(56) References Cited

U.S. PATENT DOCUMENTS

5,748,538 A 6,174,759 B1 6,212,102 B1 6,266,274 B1

5/1998 Lee et a1. ............ .. 365/185.06

1/2001 Verhaar et al. ........... .. 438/201

4/2001 Georgakos et a1. 365/185.18 7/2001 Pockrandt et a1. 365/185.17

OTHER PUBLICATIONS

U.S. Appl. No. 09/852,247 ?led May 9, 2001, “A Novel 3—Step Write Operation Nonvolatile Semiconductor One— Transistor, NOR—Type Flash EEPROM Memory Cell,” AP—01—001.1. U.S. Appl. No. 09/891,782 ?led Jun. 27, 2001, “A Novel 3—Step Write Operation Nonvolatile Semiconductor One— Transistor Flash EEPROM Memory,” AP 01—001.2.

* cited by examiner

Primary Examiner—Gene N. Auduong (74) Attorney, Agent, or F irm—George O. Saile; Stephen B. Ackerman; Rosemary L.S. Pike

(57) ABSTRACT

A novel FLASH-based EEPROM cell, decoder, and layout scheme are disclosed to eliminate the area-consuming divided triple-Well in cell array and alloWs byte-erase and byte-program for high P/E cycles. Furthermore, the process compatible FLASH cell for EEPROM part can be integrated With FLASH and ROM parts so that a superior combo, monolithic, nonvolatile memory is achieved. Unlike all previous arts, the novel combo nonvolatile memory of the present invention of ROM, EEPROM and FLASH or com bination of any tWo is made of one uni?ed, fully compatible, highly-scalable BN+cell and uni?ed process. In addition, its cell operation schemes have Zero array overhead and Zero disturbance during P/E operations. The novel combo non volatile memory is designed to meet the need in those markets requiring ?exible Write siZe in units of bytes, pages and blocks at a loWer cost.

28 Claims, 51 Drawing Sheets

BL

3G1

CONTACT III! E! [J KSL 1518+]

P WELL

N WELL

P SUB

U.S. Patent Mar. 1,2005 Sheet 1 0f51 US 6,862,223 B1

BL C(GNTACT SELECT TRANS l STOR BL \>—1 M

w H/ 50

56% TUNNEL ""'l/BN+ OX 1 DE

#1:": L _ _|

WL_‘F r G WL "

MEMORY CELL SL ‘ BN+

SL

FIG. 7A FIG. 7B P'rio?" A'rt P'r'zlov" ATi

BL

CONTACT [I]

E35] [36: KS, __L) K N

F’ SUB

FIG. 7C P’rio?" ATL‘

U.S. Patent Mar. 1,2005 Sheet 2 0f51 US 6,862,223 B1

BL CONTACT

SELEcT BL TRANSISTOR

SGT SGT

KFG I

WL1

M! MEMORY CELL 562

56%; SELECT TRANS l STORg ' 5L

SL

FIG. 2A FIG. 2B P'r'zlov" A’rt P'riov" A'rt

BL

é SGT WL 862

5 L% i C6 SZTTELTJ KR WLMMKM

R WELL

N WELL

R SUB

FIG. 2C PT’LO?" Art

US 6,862,223 B1

F61 f

F02

BL CONTACT

Sheet3 0f51

SE31

WL1

WL2

S62

SL

FIG. 3.8 Prior Art

BL

BL

SL

Mar. 1,2005

‘£362 C] KISL

2 M 11 2 ?rm.

U

WIJ // m [ PU

m

Sll f, F0<PZO0 Ill-L P WELL

N WELL

P SUB

3C PTQLOT A’T'i

U.S. Patent

MEMORY CELL 1

MEMORY GEL/L 2

FIG. 3A PTio'r A'rt

FIG.

U.S. Patent Mar. 1,2005 Sheet 4 0f51 US 6,862,223 B1

BL CONTACT

BL

MEMORY CELL

S6“ so I

SELECT / TRANS | STOR 4 5L

SL

FIG. 4A FIG. 4B P’r'io'r Art P’r'zlo'r ATt

BL

EWL SO; [3 [:3 KSL

F’ WELL

CONTACT (z;

N WELL

P SUB

FIG. 4C PT'LO?" A’rlf

U.S. Patent Mar. 1,2005 Sheet 5 0f51 US 6,862,223 B1

BL CONTACT

BL

MEMORY CELL

36% SG

SELECT ) WRANS | STOR

'SL 5L

FIG. 5A FIG. 5B PTio?" A'rt Prior A’rzf

BL

WL \f |

F W] KSL

P SUB

CONTACT 5' G)

FIG. 5C Prim" A’rt

U.S. Patent Mar. 1, 2005 Sheet 6 0f 51 US 6,862,223 B1

BL CONTACT

SELECT BL TRANSISTOR BL AND

+ BL+ POLY TéZ

f’OVERLA I

SGT—% SGT -

E3L+ EC

IF WL—-H vvLT :

MEMORY CELL BLL

S62 SC2 SELECT TRANS i SToR3l_ BM

S L g L ‘

EL

2, SGT fvvL S62 T— ‘ T | I I » 5 0, CI] 55 E 5L E3N+ BN+ BN+ BN+

P SUB

FIG.

U.S. Patent Mar. 1,2005 Sheet 7 0f51 US 6,862,223 B1

BL

5 S61 M SC2

< [:5 E5 |_ l

5 C3 [:3 U l BN+ lBN+| lBN+J BN+

P vvELL

N WELL

P SUB

BL CPNTACT Ll ST |

SELECT TRANSISTOF)? BM

SG1——{ S61 ~VBN+

Ff‘ If \)

vvL vvL '

SELECT TRANS 1 STOR BN+J*

7 MEMORY 562% CELLS S62 1

L SL Sl- BN+

FIG. 6E FIG. 6F

U.S. Patent Mar. 1,2005 Sheet 8 0f51 US 6,862,223 B1

BL CPNTACT 501 ST \ 1 1 | ST |

SELECT ~

TRANSISTOR S61

WL -

_J_ P6 —— if

\/\/L

MEMORY cELL

8G2

SELECT “L

TRANSISTOR 592

SL SL

U.S. Patent Mar. 1,2005 Sheet 9 0f51 US 6,862,223 B1

SL BL

| G

Tll

5 Jr

\

L

+Zm \ S

L

+Zm B

_.|| S

L W

L W

V] RL _ OL _ ME

EC M

FIG. 75 7A FIG.

WL (POLY 2)

ST! ST!

FIG. 7C

U.S. Patent Mar. 1,2005 Sheet 10 0f 51 US 6,862,223 B1

Bl. SL

WL

+ +

CO H]

MEMORY WL CELL

BL SL

F I G . 8A F f G . 8B

vvL (PO/LY 2)

BN+ BN+

P sue

FIG. 8C

U.S. Patent Mar. 1,2005 Sheet 11 0f51 US 6,862,223 B1

Vdd

PROGRAMMED DATA

0 OVA

\/'t

ERASED DATA

1

WEEEDZ D. _ m

FIG. 915’ FIG. 9A

Vdd

Vt

PROGRAMMED DATA

ERASED DATA

A

AA DV

055232 F _ m

Vdd

FIG. 9D FIG. 9C

U.S. Patent Mar. 1,2005 Sheet 12 0f 51 US 6,862,223 B1

PROGRAMMED DATA

0 MHl

Vt

‘ Ems?

FIG.

KmmEDZ F _ m

0

FIG. 70B 70A

JT E G P ET TL SO V

t V lllll mmmijz P _ m A A VWL1

V 0

FIG. 775 FIG. 17A

U.S. Patent Mar. 1,2005 Sheet 13 0f 51 US 6,862,223 B1

.1 \/ VWHI

T

ADATA DATA DATA DATA ||11|| llllOll IIO‘II IIOOII

VWLVt

WQQEDZ P _ m

V O

FZG. 77D FIG. 77C

DATA " 1 " DATA "0''

WQmEDZ A _ m

V 0

FIG. 72B FIG. 72A

MTZNN kowxdw w“ .UFE

Mar. 1, 2005 Sheet 15 0f 51 US 6,862,223 B1

1 41_m>> r 11mg 0 l3m>> N N w

0 0 0 O 0 0 O 0 o

|_m NOm

EIII

EIII

girl; 7 EA

o5 J 5m

11

1 mky/m P mw>m O mk>m

U.S. Patent

U.S. Patent Mar. 1,2005 Sheet 17 0f 51 US 6,862,223 B1

04%.

[D

CV

m

11 V25;

NEUW PEOm

irggia‘l Innrl 3

_ a“ m

:

P Pom

E5

1:1

Ed

POJ>>

ea 2:1

NOOW

U.S. Patent Mar. 1,2005 Sheet 18 0f 51 US 6,862,223 B1

A1352. A5052

A _, F52. A A V052

A A K m

A“ A8952. A0552

A0: m

.QNRN ONOW 010m 0 AOW AovoJm