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Ceramics

1st International Workshop on Smart Materials and Structures7-8 October, 2004Kiel, Germany

Dipl. Phys. Andreas Joseph Schmid

Argillon GmbHR & D PiezoproductsTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Overview on the Application of Piezoceramics Bending Actuators - Piezoceramics at Argillon

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Abstract

Overview on the Application of Piezoceramics Bending Actuators

Piezoeffect

Bending actuator structure techniques

Piezoproducts

Applications of piezoelectric bending actuators

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

PZT - Perovskite crystal structure

Pb(Zrx Ti1-x)O3

Lead (Pb)2+

Oxygen (O)2-

Zirconium (Zr)4+

or Titanium (Ti)4+

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoelectric effect - Curie temperaturePerovskite Crystal Structure

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoelectric effectPiezoelectric effect

Convertion of a mechanical stress into a electrical signal.

Inverse piezoelectric effect

Mechanical output produced by an electrical input.

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

TrimorphMonomorph Multimorph

Bimorph

Piezo-ceramic

Bending actuator structure techniques

inactiveLayer

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Bending actuator

Deflection of a trimorph bending actuator

Results in deflection of the bending actuator

Contraction of the ceramic by appling the operating voltage

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Bending actuatorDeflection of a trimorph bending actuator

Results in deflection of the bending actuator

Contraction of the ceramic by applying the operating voltage

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Bending actuator - force-deflection characteristic

possible operatingpoint

0

50

100

150

200

250

300

0 0,2 0,4 0,6 0,8 1 1,2 1,4 1,6 1,8 2

Deflection ξ [mm]

Blo

ckin

gFo

rce

F 0[m

N]

max. deflection ξ0

blocking force F0

bending energie

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

monomorph bending actuator

ceramic

passiv layerh1

h2

Bending actuator - force-deflection characteristic

a) maximum deflection ξ0

ξ0 = 3/4 d31 U (l2 / h12) fE

4 a c (1 + a) fE =

4 a c (1 + a)2 + (1 - a2 c)2

a) blocking force F0

Fo = 3/2 d31 U b E1 (h1 / l) fm

a c (1 + a)fM =

2 (1 + a c)

ahh

=2

1

cEE

=2

1

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

performance index = blocking force * max. deflection

0

0,1

0,2

0,3

0,4

0,5

0,6

0,7

0,8

0 0,2 0,4 0,6 0,8 1 1,2 1,4 1,6 1,8 2

thickness proportion a

perfo

rman

ce in

dex

Bending actuator - Performance index

aluminium

carbon fibre

steel

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoproducts - Portfolio

Basic MaterialsBasic Materials Bending ElementsBending Elements Modules & DevicesModules & Devices

Piezo Masses

Ceramics likes:+ Discs+ Plates+ Rings+ Tubes+ Special

geometries

Bending actuators

Singlelayer Multilayer (> 2003) for: for:+ Braille modules+ Textile machines + Textile machines + Hard disks drives + Hard disks drives+ Valves + Valves+ Gas flow controls + Gas flow controls+ Switcher + Automotive

applications

Bending actuators for:+ Medical

engineering+ Other applications

Ultrasonic transducer for:+ Flow measurement+ Other applications

Pattering modules for:+ Jacquard machines+ Raschel machines+ Warp Knitting machines

SITEX M-Module for:+ Circular Knitting machines

Ultrasonic atomizers for:+ Refrigerated cabinets+ Home appliances+ Toys+ Inhalers for lung diseases+ Humidifier

Valves applications for:+ Glue valves+ Air pulse valves+ Air sort valves+ Door shuts+ Hydraulic systems

Ultrasonic systems for:tank level measuring

SensorsSensorsSensorsSensorsActuatorsActuators ActuatorsActuatorsActuators / SensorsActuators / Sensors

Stacks (> 2004) for:+ Piezo

generators+ Piezo motors+ Consumer

goods

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Divided into three groups

Basic Materials

Bending Elements

Modules & Devices

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Multilayer bending actuatorDesign of a monomorph multilayer bending actuator with thermal tension adjustment

Slide

Conntact

Passive layer

Copper contact pads

Multilayer ceramic

Inner electrods

Thermal tension layer

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezo braille module for controller keyboards

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Bending actuator for warp knitting machines

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Textile machine module for warp knitting machines

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

SITEX ® M - Textile machine module forcircular knitting machines

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

SITEX ® M - Textile machine module forcircular knitting machines

Circular knitting machines

SITEX M - Textile machine module

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

SITEX ® M - Textile machine module forcircular knitting machines

ConnectorElectronic control

Flaps

Bending actuators

Carrier

Front plate

Housing

Housing cover

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoceramic bending actuator for fiber optical switches

Advantages:· fast switching time· low insertion loss· high optical isolation· compact design· no additional wavelength dependence

Applications:· optical measurement systems· spectroscopy· optical engineering· telecommunications

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

High - dynamic pressure regulator

Flap On

+-3

12

Flap Off

+- 3

12

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

The new generation of piezoelectric valves

Plastic Housing+ higher precision+ lower weight+ cheaper

Bender+ „power free“ control+ nearly no wear+ ideal for intrinsic safety+ works digital and analog+ no self heating+ no electromagnetic load+ antimagnetic

Elastomere enclosure+ improved sealing+ protection against humidity+ separates medium from electric terminals

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

3/2 normally-closed piezoelectric micro valveConcept of a polymer micro valve with an piezoelectric multilayer actuator and an polymer strain sensor

Housing capElectronic control (closed loop control)

Strain sensors Piezoelectric multilayer actuator

Housing with pneumatic interface

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Micro valves for implantable microdosage systems

PrestressPiezoelectric bending actuator

Titanium housing

Silicon tappet

Pyrex valve seat

Medicament (2.5 bar)

Inlet

Piezoelectric bending actuator

Outlet

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoelectric actuated suspension for hard disk drivesPiezoelectric micro actuators for the positioning of write-read heads.

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoelectric micro actuatorsPiezoelectric micro actuators for the positioning of write-read heads.Applications: tape drives, hard disk drives, DVD- and CD-writer

Z

± 0,07

± 0,1

± 0,0555,055,0 ± 0,05

± 0,2519,25

94,9

0,25

± 0,

0528

,0

pin ø 3,18 pin ø 3,18

12,605,

45±

0,07

M. : 4 : 1

detail - Z

0,2

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoceramic bending actuator and sensor for implantable hearing aids

More info at: www.stcroixmedical.comThe PZT Sensor fulfills the role of a microphone in a conventional air conduction hearing aid.

The PZT Driver converts the amplified electrical signal received from the Sensor (via the SoundProcessor) into mechanical vibration to drive the stapes.

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

EnOcean - Piezoceramic generators

Conversion of mechanical energy into electrical energy.

Applications:

Light switchTire guard

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoceramic bending actuator for radio switches

Energy generator for the radio switch

Energy per one actuation

= 25 µWs

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Piezoceramic Bending Actuator for radio switches

The core element is the Piezoceramic

Parts of the radio switch

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

EnOcean - Piezoceramic bending actuatorfor radio switches

Batteryless radio switchConversion of mechanical energy into electrical energyTransmitting of signals and information

HF-Receiver

230V≈

SignalProcessing-

unit

Radio Transmitter

Actuation

Generator

PowerSwitch

Result,Value

RF-Transmitter

SignalProcessing-

unit

Radio Receiver

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

EnOcean - Piezoceramic Generators

Die Betätigungsenergie wird für batterielose Transpondersysteme verwendet.

Radio sensors

• Control Sensors• Position

Indicator Switch• Monitoring

Industry

Radio switches

• Keyless entry• Tire Guard

Automotive

Micro Radio Generators

• Control of the human body functions

Medical

Radio switches

• Installation• Renovation

Building

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Benefits of piezoelectric bending actuators

Rapid positioning speed results in significantly increased productivity.

High reliability dramatically reduces outage times.

The bending actuator produces no heat, therefore no cooling is required.

Energy consumption is noticeable low as with the magnet that results in reduced operating costs.

The compact construction means that the bending actuator requires significantly less space.

Silent operation provides for the most ergonomic possible workplace.

The bending actuator can be modified for specific applications.

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

Conclusion

Overview on the Application of Piezoceramics Bending Actuators

Electromechanical transformer (actuator/sensor/generator)

All-purpose usable. Usable in nearly all markets

High increacing market rates

Piezoproducts

Basic Materials

Bending Elements

Modules & Devices

Dipl. Phys. Andreas Joseph SchmidTel.: ++ 49 / 9574 / 81-250Email: Andreas_Joseph.Schmid@argillon.com

Piezoproducts

References

[1] M. Laurent, H. Bödinger, T. Steinkopff, K. Lubitz, C. Schuh, S. Wagner, M. J. Hoffmann, H. Murmann-Biesenecker, A. J Schmid, ”Influence of ceramic layer thickness on the properties of piezoelectric multilayer actuators”, Processing of Electroceramics, Symposium 2003, (2003)[2] U. Dibbern: Piezoelectric Actuators in Multilayer Technique. Proceedings of Actuator 94, (1994)[3] B. Anderson: Properties and Performance of Multilayer Actuators for Dynamic Applications. Proceedings of Actuator 1996, (1996)[4] A. J. Schmid, U. Töpfer, R. Ballas, H. F. Schlaak, G. Munz, M. Maichl, A. Münzenmaier, ”Piezoelectric Beam Multilayer Actuator with an Integrated Capacitive Strain Sensor to Detect Deflection”, Sensor 2003, (2003)[5] M. Weinmann, M. Maichl, G. Munz, C. Hanisch, H. P. Post, ”A 3/2 Normally Closed Polymer Piezoelectric Microvalve with Integrated MID Electronics for Industrial Automation”; Actuator 2002, (2002)[6] Y. Nui, W. Guo, G. Guo, E. Hong, T. Huang, “Piezoelectrically Actuated Suspension for Hard Disk Drives Storage“, Proc. Syst., Vol. 1.; 321 -327, (1999)[7] A. J. Schmid, U. Töpfer, ”Smart Piezoelectric Multilayer Actuator with an Integrated Sensor to Compensate External Loads”, Adaptronic Congress 2003, (2003)[8] A. J. Schmid, „Piezokeramische Systeme – Physikalische Eigenschaften und Anwendungen“, Technische Keramik in der Praxis, Verband der keramischen Industrie e.V., Selb, (2002)[9] C. Schuh, K. Lubitz, Th. Steinkopff, A. Wolff, “Piezo electric Components for Technical Applications”, Piezoelectric Materials, Ed.: C. Galassi et al., Kluwer Academic Publ. 2000, 391- 399, (2000)[10] A. J. Schmid, “Smarter Niedervoltaktor – Multilayer Biegewandler mit integrierter Sensorik”, Deutsche Keramische Gesellschaft, 10. Keramik-Tag der Bundesanstallt für Materialforschung, Symposium: Folien und Multilayertechnologie für funktionskeramische Anwendungen, (2003)