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Applications of piezoceramic thick films E. Ringgaard, T. Zawada, K. Astafiev, M. Guizzetti, L.M. Borregaard, R. Xu, K. Elkjaer and W.W. Wolny

12 June 2014

Outline

Piezoceramic thick films 2 Flexible piezoelectric films – PiezoPaint™ 3 Applications of piezoelectric films 4 Conclusion 5

1 Company introduction

Applications of piezoceramic thick films

June 2014 | © Meggitt Sensing Systems. Proprietary.

Company introduction 1

Meggitt – overview

Provides high technology products and

systems for the aerospace, defence and

other specialised markets, e.g. medical,

industrial, energy, test and automotive

60 years experience in extreme environment

engineering

Annual sales (2012), £1.6 billion

Listed on London Stock Exchange (in

FTSE100)

Civil aerospace

Military

Energy and other

OE 52% / Aftermarket 48%

A global presence

Asia and RoW Employees: 650

Locations: 8 Australia, Brazil, China, India, Singapore, UAE and Vietnam

Mainland Europe Employees: 1,450

Locations: 7 Denmark, France, Germany, Spain and Switzerland

UK Employees: 2,090

Locations: 13

North America Employees: 5,790

Locations: 31 USA, Canada and Mexico

10,000 employees worldwide

. . . . . . . . . .

. . . .

. . . . . . .

. . . . . . . . . . . . .

Meggitt Sensing Systems Denmark

Meggitt A/S is a manufacturer of piezoelectric materials, components and

devices under the trademarks Ferroperm™ and InSensor™

2-3 million units produced annually

Major markets

− Medical ultrasound

− Underwater acoustics

− Acceleration sensors

− Flowmeters

− Energy harvesting

Piezoceramic thick films

for integrated devices 2

PZT thick films – InSensor™

Technology of piezoelectric thick films – enabling deposition and integration of piezoelectric

layers (10 µm to 100 µm in thickness) with high lateral resolution (100 µm x 100 µm)

Key features of InSensor™ technology

− Capable of manufacturing miniaturized devices

− Low prototyping costs

− High volume production

− High lateral resolution

− High frequency

− High response

− Piezoelectric material can be deposited on a number of different substrates (compatible with MEMS)

Thick Films

Deposition – screen printing

Paste: PZT powder dispersed

in an organic vehicle

Deposition – pad printing

PZT thick film compatibility

Stainless steel

Ceramics

Silicon

SUBSTRATES

[A. Guiroy et al.,

IEEE UFFC 60

2634 (2013)]

Evolution in screen printing

of piezoelectric materials

Substrate

Ceramic (e.g. alumina, PZT)

Steel, silicon, ceramic, LTCC

Polymer

Textile

Processing temperature

1100 ºC – 1250 ºC

800 ºC – 900 ºC (InSensor™)

150 ºC (PiezoPaint™)

100 ºC

100 ºC or less

Flexible piezoelectric

materials – PiezoPaint™ 3

Flexible piezoelectric film – PiezoPaint™

Ultralow-temperature processing piezoelectric material, T < 150 ºC

High response (d33 > 45 pC/N) compared to piezoelectric polymers

The outstanding properties make the material very attractive for several

application

− Sensors

− Transducers

− Actuators

Patent registered: 2608287-EPO

PiezoPaint™

PiezoPaint™ – choice of substrates

Fabrics

Textiles

Composites

Metals

Plastics/polymers

Laminates

Ceramics

PiezoPaint™ on polymer

PiezoPaint™ on fabric

PiezoPaint™ on PCB

Piezoelectric films – summary

PiezoPaint™ InSensor™ Bulk piezoceramics

InSensor™ and PiezoPaint™ are trademarks of Meggitt A/S

Applications of

piezoelectric films 4

Application examples

Energy harvesting 2

Medical imaging 3

Impact detection 4

Motion sensor 5

1 Structural health monitoring

Structural health monitoring: multi-element thick-

film arrays for Lamb wave generation

Number of elements: 24 (linear array)

Substrate: stainless steel

Thick film: PZT-based, h < 100 µm

Electrodes: bottom gold, top silver

[AISHA II, FP7]

Thick-film array with PCB and 16-pin IDC connectors

Mounting of connector

The two transmission

lines with connectors

mounted on all 5 arrays

500 mm

Lamb mode selection

Displacement measured by Doppler vibrometer

8 array elements selected to form a wave with λ = 20 mm (fexcit 267 kHz)

Measmt. by S. Creten &

C. Glorieux, ATF-KUL

Energy harvesting 2

Medical imaging 3

Impact detection 4

Motion sensor 5

Energy harvesting based wireless sensor

network

Star topology

Unidirectional transmission

16 sensor nodes

2.4 GHz radio link

Proprietary protocol

Distance (3-10 m) Base station

Node 1

Node 2

Node 3

Node N

Hub/concentrator

Gateway to LAN, Wi-Fi or

Kinetic energy harvesting – basic principle

The kinetic energy is transformed

into electrical energy

The kinetic energy can be in the

form of the following:

− Harmonic vibration

− Non-harmonic vibration

− Acoustic wave

− Displacement

− Rotation

− Torque

− etc.

Energy Harvesting – transforming low grade energy into usable electrical energy

enabling an autonomous, wireless operation of electronic devices

Characterization of harvesters

(previous generation)

Charge sensitivity up to 37 nC/g @

0.5 g peak

Open-circuit voltage up to

− 3 V @ 0.5 g peak (unimorph)

− 4 V @ 0.5 g peak (bimorph)

Maximum power range

− 12 μW ÷ 16 μW @ 0.5 g peak

(unimorph)

− 16 μW ÷ 20 μW @ 0.5 g peak

(bimorph)

Frequency range (tunable): 100 –

1000 Hz

Harvester

Shaker

PCB fixture

Reference

accelerometer

Fully assembled generator board

Four EH devices are combined in order to assure the proper power level

and bandwidth

Fully assembled board delivers approx. 100 µW of continuous power at

0.3 g RMS, resonance (e.g. 300 Hz)

Sensor node

Operation temperature

− Range: -40 – 70 ºC

Acceleration measurement

− 3D acceleration measurement

− Sampling frequency: up to 3200 Hz

− Resolution: 13 bits

Ambient temperature

− Accuracy: ±0.4 ºC (10 ºC - 60ºC)

Relative humidity

− Accuracy: ±3.0 %RH (20% - 80%)

Sensor nodes are linked using

2.4 GHz wireless communication in a

star-like network architecture

Industrial environment setup – an example

Energy harvesting powered sensors have been placed on hydraulic

pumps located outside of the factory building

The base station together with the data server was placed inside the

factory building

Operating harvesting frequency was 220 Hz

Battery powered sensor node was used as the reference

Results – example of data trends

Data trend

− Sensor ID

− First package time stamp

− Last package time stamp

Energy harvesting 2

Medical imaging 3

Impact detection 4

Motion sensor 5

High-frequency ultrasonic transducers

The characteristics of the printed thick film make

it a perfect candidate for medical imaging due to

the following:

− Low acoustic impedance (because of porosity)

− Low permittivity

− High frequency (more than 20 MHz) easily

obtained without machining

When the thick film is combined with the

optimised substrate, a relative bandwidth above

100 % is measured

“piston” mode

High-frequency ultrasonic transducers –

acoustic field

Acoustic field of thick film transducers measured by means of Schlieren setup,

a) flat transducer, b) focused transducer (courtesy of A. Nowicki, IPPT).

High-frequency ultrasonic transducers –

medical imaging

Source: Ulthera video http://www.youtube.com/watch?v=XhafnO0uB_k

Real-time image of soft tissue

during the treatment

Energy harvesting 2

Medical imaging 3

Impact detection 4

Motion sensor 5

Ultrasonic impact detection

What is it?

− Passive SHM method based on measuring the acoustic emission from an

impact.

How is it done?

− Piezoelectric transducers convert the acoustic wave into an electric output.

Transducer Impact

Test setup and procedure

The sensors were connected to four ports of an oscilloscope

No extra signal conditioning was used

Demonstrator

Test setup and procedure II

To track impacts a grid was drawn on the aluminium plate

A tube was fixed and used to control drop distance of a steel ball

− 153 impacts recorded

− Drop heights ranged

from 2 cm to15 cm

Impact localization

Sample size: 153

90.2 % had an

error < 5 cm

x Actual impact location

o Estimated impact location

Energy harvesting 2

Medical imaging 3

Impact detection 4

Motion sensor 5

Piezoelectric motion/displacement sensor

Operates in 31 mode, the active film being sandwiched between electrodes

The entire structure can be encapsulated with PVC or UV-curable dielectrics

Flexible and applicable on a variety of substrates, e.g. fabrics and polymers

Bottom

electrode

PiezoPaint™ motion sensor on polyester cotton fabric

MEGGITT

[MICROFLEX, FP7]

Piezoelectric motion/displacement sensor

Conclusions

Properties of PZT thick films are inherently different to the properties of the bulk

materials, and may depend on the substrate (clamping effect, chemical reactions)

Porosity in the thick films may be very beneficial in certain applications!

The InSensor™ PZT material system is compatible with a number of different

substrates: Silicon, stainless steel, alumina, LTCC

A number of different applications can be covered using PZT thick films due to their

very good piezoelectric properties, including:

− Medium- and high-frequency acoustic transducers

− Energy harvesting devices

− Integrated sensors

Since the PZT thick film technology is application driven it offers complementary

solutions filling the gap between thin films and bulk ceramic (especially the area of

integrated devices)

PiezoPaint™ printable piezoelectric material enables design and manufacturing of

sensors, actuators and transducers on a variety of flexible substrates, including

textiles and polymers

Acknowledgements

AISHA II, Aircraft Integrated Structural Health Assessment II (CP,

AAT-2007-212912)

MICROFLEX, Micro fabrication production technology for MEMS

on new emerging smart textiles/flexibles (CP, NMP-IP-2008-

211335-2)

Danish National Advanced Technology Foundation, contract no.

036-2009-1

Prof. Erik V. Thomsen, Anders Lei, DTU Nanotech, Denmark

Prof. Christ Glorieux, Sebastiaan Creten, ATF KU Leuven, Belgium

Prof. Andrzej Nowicki, IPPT, Warsaw, Poland

Thank you

Conclusions (EH)

The EH devices are capable of generation of 15 to 20 μW of power at moderate

accelerations of about ~0.3 g RMS

The PZT thick film micro generators can successfully power sensor nodes,

enabling energy autonomous, wireless measurement of acceleration, temperature

and humidity at low levels of vibration e.g. 0.25 g RMS

The data is easily accessible through number of standard network interfaces: LAN,

Wi-Fi, 3G

The wireless and battery-less sensor systems have been successfully applied in

monitoring of industrial equipment

The presented network of sensors can be applied in permanent as well as

temporary monitoring in e.g. difficult to access locations

Energy harvesting based sensor nodes enable systems that are:

− Energy autonomous

− Maintenance-free

− Very easy to deploy

General features of the EH system

Micro generator level

− Highly integrated

− Small (millimeter scale)

− Sourcing energy from vibrations

System level

− Low weight

− Energy autonomous

− Wireless

− Long life

− Wide range of working temperatures

Sensor node architecture

Harvesters convert kinetic energy in electrical energy

Electrical energy is stored and conditioned

When electrical energy is sufficient the load is

powered

Microcontroller repeats acceleration measurement

and data transmission at fixed time intervals

Design criteria for bending structures in energy

harvesting

Optimal design of a bending

structure should assure the

neutral bending axis to be

located a the interface between

active (PZT) and passive (Si)

materials

Typical device layer of an SoI

wafer (20 μm) requires 30-40 μm

of the active material (PZT)

Y: Young’s modulus

J.K. Olsen: Piezoelectric Components in Microfluidic Devices, Master Thesis, DTU, 2007

Energy Harvesting micro-generators – thick film

based bimorph

Realized with silicon micromachining technology and PZT thick films deposited by screen-

printing technique

Single clamped cantilevers with a silicon proof mass at the free end

Bimorph configuration

10 mm x10 mm lateral dimensions

Higher voltage and power compared to unimorph

Si/PZT fabrication + middle electrode + 2nd PZT layer + Si membrane removal

Climatic chamber

- Temperature

- Humidity

400 N Shaker

Shaker shaft

Energy harvesting based sensor nodes

Excitation: 300 Hz, 0.5 g RMS

Battery powered sensor

#161 #163

Climatic testing

500 hours test

Normal conditions test:

-30°C (night) and 60°C

4 hours => 1 day

− 500 hours => 125

days of operation

At 250 hours: -30°C

for 24 hours

TDoA demonstrator design

Top view of the sensor

Silver paste

Aluminium plate

Cross section of the transducer

PiezoPaintTM

The information contained in this document is the property of Meggitt

Sensing Systems and is proprietary and/or copyright material. This

information and this document may not be used or disclosed without

the express authorization of Meggitt Sensing Systems. Any

unauthorized use or disclosure may be unlawful.

The information contained in this document may be subject to the

provisions of the trade compliance regulations (including those

regulations governing transfer to a dual national or third country

national, export and re-export) of various countries; see the first page

for specific requirements. The recipient acknowledges that licences

from the applicable regulatory agency or agencies may be required

before the recipient may further disclose such information to others,

and that such licences may impose restrictions on further disclosure of

such information. The recipient agrees to comply with all applicable

governmental regulations as they relate to the transfer, export and re-

export of information disclosed in this document.

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